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研究生:蔡明翰
研究生(外文):Ming-Han Tsai
論文名稱:新型CMOSMEMS全差動Z軸加速度計
論文名稱(外文):A NOVEL OUT-OF-PLANE ACCELEROMETER WITH FULLY-DIFFERENTIAL SENSING CIRCUIT AND SUB-MICRON GAP
指導教授:方維倫
指導教授(外文):Weileun Fang
學位類別:碩士
校院名稱:國立清華大學
系所名稱:微機電工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:中文
論文頁數:85
中文關鍵詞:全差分式電容感測三軸感測加速度計CMOS-MEMS
外文關鍵詞:CMOS-MEMSAccelerometerFully differential
相關次數:
  • 被引用被引用:3
  • 點閱點閱:284
  • 評分評分:
  • 下載下載:68
  • 收藏至我的研究室書目清單書目收藏:3
CMOS-MEMS主要是利用半導體製程來同時整合微小機械結構與電子電路在單一晶片中,其優勢在於系統整合之能力以及半導體製程的精準線寬,使MEMS與半導體CMOS製程相整合而具備有半商業化的優勢。
本研究之主題在於利用TSMC 0.35μm 2P4M CMOS的標準製程來設計製造與量測一出平面加速度感測器,本研究不同於以往CMOS-MEMS的地方在於整合濕蝕刻製程以達到次微米的極小感測電極間距,同時結構能夠符合完全差分式(Fully differential)電容感測介面,本論文之機械結構搭配整合於晶片上的CMOS感測電路使得此加速度感測器成為一個完整的感測器元件。本論文最後整合了出平面加速度計與舊有的同平面加速度計整合成一三軸感測加速度計晶片。
This thesis presents a novel CMOS-MEMS out-of-plane linear accelerometer. This capacitance type accelerometer contains special designed gap-closing sensing electrode arrays with on-chip fully differential sensing circuits. Moreover, the comb-finger electrodes have the characteristics of high fill-factor and sub-micron gap to increase the sensing capacitance. Thus, the sensitivity and signal to noise ratio can be further improved. This study has established a post-CMOS wet-etching process to realize the accelerometer with sensing electrodes of sub-micron gap in the out-of-plane direction. The present accelerometer has been demonstrated using the standard TSMC 2P4M process plus the post-release technique. This study also integrates previous in-plane linear accelerometers to fabricate a fully differential 3-axes accelerometer chip.
目 錄 I
圖 目 錄 III
表 目 錄 VIII
第一章 前言 1
1-1 研究動機 1
1-2 加速度計基本原理 3
1-3 文獻回顧 4
1-3.1 微機電出平面加速度計 5
1-3.2� CMOS-MEMS 後製程分類 8
1-4 研究目標 9
第二章 元件設計與分析 17
2-1 金屬濕蝕刻結構設計 17
2-2 機械與感測結構設計 19
2-2.1 質量塊 20
2-2.2 彈簧 20
2-3 感測臂與自我測試致動器設計 22
2-4 出平面加速度計感測架構與整合 24
2-5 應力補償設計 26
第三章 製程與實驗 41
3-1 TSMC 0.35 μm 2P4M CMOS製程概述 41
3-2 定義CMOS MEMS 元件 42
3-3 CMOS MEMS後製程 43
第四章 元件特性量測與比較 59
4-1 結構特性量測與比較 59
4-2 元件特性量測 61
4-3 結果討論 62
4-4 三軸加速度計整合與量測 64
第五章 結論與未來工作 78
第六章 參考文獻 80
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