臺灣博碩士論文加值系統

摘要

本論文研究的主要目的是發展出一套以自行架設之Michelson光學干涉儀系統，此系統包含有Michelson干涉儀、移相裝置與升溫裝置，並以此系統來量測與分析一高反射率的物體，在不同溫度下的表面形貌。其方法為利用所架設之Michelson干涉儀系統，根據五步相移法的理論，以移相裝置帶動參考鏡面，取得受測物表面的五張連續干涉圖，之後以相移干涉術中的五步相移法計算後，可求得受測物表面的相位圖，藉此分析受測物表面相位的變化，再經由相位重建技術，即可得到受測物的表面輪廓。
由於光學量測具有非接觸性、非破壞性的優點，不會對於受測物造成不必要的損壞，再加上Michelson干涉儀是一種具備全域性分析的實驗方法，特別適用在表面輪廓的量測，因此，利用本光學系統其全域性、非接觸性、非破壞性與方便架設的量測特性，針對各種溫度加載於受測物表面，即可得到不同溫度下的表面輪廓。

Abstract

This thesis is proposed to measure and analyze surface profile of a high reflective object during temperature cycle by Michelson interferometer. A home made system, which incorporates a Michelson interferometer, a phase shifting device and a temperature controller has been built. Five-steps algorithm had been adapted to reconstruct sample surface height profile via a set of five interferograms. The measurement of optical method has the advantage of non-contact and non-destructive. Michelson interferometer is a whole-field measurement, which is useful for measuring the high reflective object surface profile. A raw silicon wafer subjected to different temperatures had been used to test the functionality of the system. The merit and limitation of this Michelson interferometer will be discussed.

目錄

摘要(中)..................................................Ⅰ
摘要(英)..................................................Ⅱ
目錄......................................................Ⅲ
表目錄....................................................Ⅵ
圖目錄....................................................Ⅶ

第一章 緒論................................................1
1-1 前言.................................................1
1-2 研究動機與目的.......................................3
1-3 文獻回顧.............................................6
1-4 本文架構.............................................9

第二章 基本干涉原理.......................................10
2-1 光波干涉的基礎知識..................................10
2-1-1 光波干涉原理....................................10
2-1-2 干涉條紋的可見度................................12
2-2 干涉儀基本原理......................................14
2-2-1 干涉儀概論......................................14
2-2-2 Michelson干涉儀.................................15

第三章 干涉條紋相位解析...................................17
3-1 相移干涉術..........................................17
3-1-1 相移技術基本觀念................................18
3-1-2 五步相移法......................................20
3-2 相位展開處理 .......................................22

第四章 實驗系統架設與量測.................................26
4-1 實驗系統架設 .......................................26
4-1-1 實驗設備........................................26
4-1-2 光學系統架設....................................31
4-1-3 步進馬達與參考鏡面移動之關係....................33
4-2 實驗步驟............................................37

第五章 實驗結果與討論.....................................40
5-1 影像分析軟體驗證....................................40
5-2 實驗結果............................................50
5-3 討論................................................61

第六章 結論與未來展望.....................................63

參考文獻..................................................65

附錄-影像分析程式.........................................67

參考文獻

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