臺灣博碩士論文加值系統

本文使用鎂誘鋰外擴散法在Z切鈮酸鋰基板上製作操作於藍光波段(473nm)之馬赫任德電光調變器，並與退火式質子交換法進行比較。由實驗結果發現，鎂誘鋰外擴散波導在寬度為3.2μm，氧化鎂厚度為500Å時，以1000°C的溫度擴散30 min可僅導單模態。以此條件製作操作在藍光波段下的馬赫任德電光調變器，在電極長度0.95 cm時，半波電壓為4 V，而訊熄比則約為7dB。對於光折效應的量測結果顯示以鎂誘鋰外擴散式波導製成之電光調變器雖然可正常運作，但其光折效應之影響比傳統的退火式質子交換波導明顯。

In this study, magnesium-oxide-induced lithium-outdiffusion (MILO) method is used to fabricate Mach-Zehnder electro-optic modulators on z-cut lithium niobate substrate for a blue laser source of wavelength 473nm. Similar devices fabricated by traditional annealed-proton-exchanged (APE) method are also prepared for comparison. Experimental data show that an MILO waveguide of width 3.2μm supports only single-mode when it is fabricated by sputtering a MgO thin-film of thickness 500Å and then diffusing at 1000°C for 30 min. Mach-Zehnder electro-optic modulator composed of MILO waveguide for blue-laser wavelength is demonstrated. Its halfwave voltage and extinction ratio are found to be 4.0V and 7dB, respectively, which are better than those fabricated by the APE method. Photorefractive effect on Mach-Zehnder electro-optic modulator is measured. Experimental results show MILO waveguides are found less-resistant to the photorefractive effect, although Mach-Zehnder modulators with MILO waveguides have been successfully fabricated.

第一章　緒論
1-1 研究背景 1
1-2 研究動機 2
1-3 內容簡介 3

第二章 波導特性簡介
2-1 質子交換式波導之簡介 5
2-2 鎂誘鋰外擴散式波導之簡介 8

第三章　馬赫任德電光調變器製作
3-1 馬赫任德式電光調變器原理介紹 11
3-2 光波導製程條件 16
3-3 電光調變器設計 19
3-4 馬赫任德電光調變器製作 21
3-5 元件特性量測 27
3-6 實驗結果討論 30

第四章　光折效應之量測
4-1 光折效應原理 33
4-2 光折效應量測系統 39
4-3 光折效應的觀察結果 40
4-4 結果討論 44


第五章　結論與未來展望
5-1 結論 46
5-2 未來展望 46

參考文獻 48
中英文名詞對照表 50

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