臺灣博碩士論文加值系統

隨著大尺寸面板的發展，對於玻璃基板升降系統成為一重要課題，因此本文針對7.5代玻璃基板升降系統進行結構分析，利用繪圖軟體SOLIDWORK建立升降系統數值模型，而後用有限元素軟體ANSYS10.0 Workbench模擬出升降系統可承受最大負載及系統變動負載時系統結構的反應。
本文以PC-Based架構發展7.5代氣壓平衡式升降系統伺服定位，應用函數近似適應性滑動控制器，定位採用軌跡控制，改善傳統PLC控制無法達到較高控制效能及改善系統平台振動的問題。
由於系統架構在面臨升降過程中負載變動無法即時調整比例壓力閥壓力，因此發展主動式氣壓平衡技術使用函數近似適應性滑動控制器控制比例壓力閥，主動式氣壓平衡補償控制技術結合伺服定位控制，模擬升降運動過程中負載變動軌跡控制定位以達到馬達能以更小驅動力來帶動升降平台。
關鍵字: 結構分析、ANSYS、函數近似、適應性滑動控制、伺服定位、氣壓平衡

Due to the development of the larger size of FPD, the conveyor system, especially the lifting system, become a significant topic. This paper aims to develop novel lifting system with the AC servo driving and the pneumatic balanced system for the 7.5th generation of LCD glass substrates. At first, the structure design using SOLIDWORK and the structure analysis using finite element method, ANSYS10.0 Workbench, of the lifting system are made for different loading conditions.
A PC-Based control system is developed instead of the PLC for achieving better response and position accuracy. Adaptive sliding mode control with function approaching technique is used in this paper as the control strategy. In order to improve the jerk problem during the motion process, path control is used.
Owing to the large variation range of the loading in the new generation lifting system, the pneumatic balanced system is developed for counterbalanced the weight of the loading for reducing the loading power of the AC servo motor. The proposed new lifting system with pneumatic balanced technique is implemented and verified through simulation and experiment.
Keywords: structural analysis, ANSYS, function approaching technique, adaptive sliding control, positioning control, pneumatic balanced.

摘要......................................................I
Abstact..................................................II
誌 謝......................................................III
目錄.......................................................IV
圖目錄.....................................................VIII
表目錄......................................................XIV
符號索引.....................................................XVII
第一章 緒論........................................................1
1.1 前言........................................................1
1.2文獻回顧........................................................2
1.2.1 AC伺服馬達文獻回顧........................................................2
1.2.2有限元素法文獻回顧........................................................2
1.2.3控制理論文獻回顧........................................................3
1.3 研究動機........................................................4
1.4 本文架構........................................................5
第二章 7.5代平面顯示器玻璃基板氣平衡式升降系統之架構與建立........................................................7
2.1 7.5代平面顯示器玻璃基板氣壓平衡式升降系統之架構........................................................8
2.2 氣壓平衡升降系統.......................................................11
2.3 實驗設備.......................................................12
2.3.1 無桿氣壓缸.......................................................12
2.3.2 無桿電動缸.......................................................12
2.3.3 AC伺服馬達.......................................................13
2.3.4 磁簧開關.......................................................14
2.3.5 升降平台位置計算.......................................................15
2.3.6 PC-Based控制器.......................................................15
第三章 結構分析建模.......................................................16
3.1 電腦輔助工程分析.......................................................16
3.2 有限元素法.......................................................17
3.3 有限元素法分析軟體ANSYS ................................................21
3.3.1 ANSYS10.0 Workbench有限元素分析步驟.......................................................22
3.4 建立3D機構數值模型.......................................................24
3.4.1 替代7.5平面顯示器玻璃基板升降系統機構模型.......................................................25
3.5 ANSYS10.0 Workbench結構分析設定.......................................................29
第四章 結構分析結果.......................................................30
4.1 不同負載機構變形量.......................................................30
4.1.1 空載.......................................................30
4.1.2 負載100kgf...................................................34
4.1.3 負載200kgf...................................................37
4.1.4 負載300kgf...................................................40
4.1.5 負載400kgf...................................................43
4.1.6 負載500kgf...................................................46
4.1.7 負載600kgf...................................................49
4.1.8 負載700kgf...................................................52
4.1.9 負載800kgf...................................................55
4.1.10 負載900kgf...................................................58
4.1.11 負載1000kgf..................................................61
4.2 變動負載結構分析.......................................................64
4.3 結構分析結果與討論.......................................................66
第五章 控制理論.......................................................69
5.1 正交函數.......................................................69
5.2 廣義傅立葉級數 ................................................71
5.3 可變結構控制.......................................................73
5.3.1 滑動條件.......................................................73
5.3.2 迫近條件.......................................................75
5.3.3 等效控制.......................................................76
5.3 函數近似適應性滑動模式控制.......................................................78
5.4 控制器設計.......................................................81
第六章 伺服定位動態模擬與實驗.......................................................84
6.1 升降系統數學模型.......................................................84
6.2 升降系統伺服定位動態模擬.......................................................89
6.2.1 升降系統軌跡定位動態模擬.......................................................89
6.2.2 主動式氣壓平衡控制模擬.......................................................98
6.2.3 主動式氣平衡定位控制模擬......................................................100
6.3 升降系統伺服定位實驗......................................................103
第七章 結論與未來展望......................................................114
7.1 結論......................................................114
7.2 未來展望......................................................115
參考文獻......................................................116
作者簡介......................................................118

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