臺灣博碩士論文加值系統

本實驗利用市售DVD讀取頭建構出量測透明基板厚度之系統，採用雙DVD讀取頭方式，將其原透鏡拆除改置為等效焦距25.4mm聚焦透鏡，將焦點鎖在焦平面之方式，並將一顆DVD讀取頭(DVD-0)當做一檢測光束入射在另一顆DVD讀取頭(DVD-1)之PDIC1上，藉由DVD-1圓柱透鏡像散特性與位移相依關係，得到一關係曲線(S-Curve)。將待測透明基板放入架構量測區進行量測，根據 定律，光在經過不一樣的介質將產生不同的折射現象，因此PDIC1的聚焦誤差訊號將變異，將此變異量代入本實驗的線性區，可得一像散位移量並代入本實驗所推得的三角幾何公式，即可得到待測透明基板相對光學厚度，並與三次元量床測得之厚度相互驗證，準確度在99%，三倍標準差在1.5um以內。

In this study, the application of dual DVD pickup heads on the thickness measurement system of transparent base plate has been proposed. The experiment used the equivalent focal length of about 25.4 mm and focused on the focal plane. Using beam of the DVD pickup (DVD-0) enters the PDIC1 of the DVD pickup (DVD-1). The voltages and position curve is got by the astigmatic of the cylindrical lens of the DVD pickup (DVD-1). The voltages and position curve is called an S-curve. A geometrical optic model is used to obtain the sample’s thickness. The measurement method provides high accuracy in locating the focus error signal on the PDIC1 will change when the glass is put in measurement range. Using the S-curve linear zoom, the measurement of the sample thickness can be found by displacement of the astigmatic. The proposed thickness measurement system was verified using the Coordinate Measuring Machine (CMM). The accuracy of proposed system is 99 % and the thriple standard deviation (STDEV) is less then 1.5 μm.

目錄
中文摘要 ................ ........................vi
英文摘要 ................. .......................vii
誌謝 ……………………………………………………......viii
目錄...............................................ix
圖目錄………………………………………………… ......xi
表目錄…………………………………………….......……xiii
第一章 緒論 ……………………………......…………… 1
1-1 前言 ……………………….......…………………… 1
1-2 研究目的………………………………………………… 3
1-3文獻探討……………………………………………………4
第二章 量測系統元件及相關原理介紹………………………9
2-1 量測系統元件介.………………………………………9
2-1-1 DVD光學讀取頭元件介紹.…………………………9
2-1-2 DVD光學讀取頭作動原.……………………………11
2-1-3 NI PCI-6014 資料擷取.………………………… 13
2-1-4雷射干涉儀原理介紹…….…………………………14
2-2 DVD光學讀取頭誤差訊號感.………………………… 15
2-2-1 DVD光學讀取頭聚焦誤差訊號….……………………15
2-2-2像散法基本原理…………………….…………………15
2-2-3 S曲線分析…………………………….………………17
第三章 雙DVD讀取頭厚度量測系.……………………………19
3-1量測系統架構……………………………………………19
3-2系統量測原理與光學分析………………………………22
3-2-1 光路公式推導…………….…………………………24
3-2-2 系統誤差分析和數據處理….………………………29
3-2-3 S曲線線性區校正…………………………………31
3-3實驗結果與分析 ………………………………………38
3-3-1 雙DVD讀取頭厚度量測實驗.……………………38
3-3-2 三次元量床厚度驗證……………….…………………41
3-3-3 單DVD與雙DVD讀取頭厚度量測系統探討比較…44
第四章 雙DVD讀取頭厚度與折射率同時量測實驗探討…….48
4-1 量測系統架構與作動原理探討……………………48
4-2 光路公式推導探討…………………………………51
第五章 結論與未來展望………………………………………54
5-1結論…………………………………………………………54
5-2討論…………………………………………………………54
5-3未來展望……………………………………………………55
參考文獻 ………………………………………………………56
圖目錄
圖2-1顯微鏡下所掃描的PDIC..........................10
圖2-2 DVD光學讀取頭內部光路示意圖……………….…… 12
圖2-3為訊號擷取流程示意圖………….…………………… 13
圖2-4雷射干涉儀(5529A)位移量測示意圖.…………………14
圖2-5 像散法原理示意圖…………………………………… 17
圖2-6 S-Curve與四象限感測器光強分佈示意.…………… 18
圖3-1本研究架構實體圖……………………………….…… 21
圖3-2本系統光路示意圖………………………………………22
圖3-3 S曲線圖…………………………………………………23
圖3-4三筆S曲線平均值……………………………………… 24
圖3-5三筆S曲線標準差 …………………………………… 24
圖3-6光路平面示意圖…………………………………………25
圖3-7 光路分析圖…………………………………………….26
圖3-8 三角定理轉換示意圖………………………………….28
圖3-9 S曲線線性區一階方程式………………………………33
圖3-10一階方程式標準差…………………………………….33
圖3-11一階方程式殘餘誤差………………………………….34
圖3-12 S曲線線性區二階方程式…………………………….34
圖3-13二階方程式標準差…………………………………….35
圖3-14二階方程式殘餘誤差………………………………….35
圖3-15 S曲線線性區三階方程式…………………………….36
圖3-16三階方程式標準差…………………………………….36
圖3-17三階方程式殘餘誤差………………………………….37
圖3-18 蓋玻片量測訊號……………………………………..39
圖3-19蓋玻片聚焦誤差訊號量測值………………………….40
圖3-20 三次元量床實體圖……………………………………41
圖3-21蓋玻片量測區域示意圖……………………………….42
圖3-22蓋玻片量測值………………………………………….43
圖3-23 單DVD讀取頭厚度量測系統光路示意圖…………….45
圖3-24 單DVD讀取頭厚度量測系統光路推導示意圖……… 46
圖4-1 光路示意圖…………………………………………….50
圖4-2光路公式推導探討………………………………………51
表目錄
表3-1 DVD量測系統與三次元量床一覽表……………………43
表4-2 量測系統比較一覽表………………………………….47

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