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研究生:李羿宗
研究生(外文):Yi-Tsung Li
論文名稱:長行程奈米級精密平台研製
論文名稱(外文):Design and Control of a Long-Stroke-Nano-Positioning Stage.
指導教授:覺文郁覺文郁引用關係
指導教授(外文):Wen-Yuh Jywe
學位類別:碩士
校院名稱:國立虎尾科技大學
系所名稱:機械與機電工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:中文
論文頁數:84
中文關鍵詞:雙軸長行程奈米定位平台滾珠導螺桿數位化結構分析高剛性三自由度壓電奈米平台。
外文關鍵詞:Dual-axis long-stroke-nano-positioning stageBall ScrewDigitized structure analysisHigh rigidity 3-DOF piezo-nano-stage.
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本論文研製一奈米級長行程精密定位平台,並整合精密控制、精密量測、結構設計與加工組裝等四項主體,其特色是結合X-Y雙軸長行程導螺桿平台、三自由度壓電微動平台、三自由度量測系統與雙軸長行程奈米級精密平台控制系統。藉由X-Y雙軸長行程導螺桿平台進行微米級長行程定位後,再由三自由度壓電微動平台進行奈米級定位,最後經由三自由度量測系統,將量測數據傳送至PID控制系統,使本平台具有300 × 300 mm之長行程定位能力、定位可達10奈米之高精度、可以34.5 mm/s之高速度移動以及可讓偏搖角補償達1 acesec之低角度誤差等特性。
A dual-axis long-stroke-nano-positioning stage was developed in this project. A traditional ball screw and linear guided way, provided by the PMI Co. Taiwan, was employed with a 3-DOF piezo-stage, 3-DOF measurement system and a PID closed-loop countroller for this stage. The working range of the stage can be up to 300 mm × 300mm with a resolution of 10 nm in each linear axis and 1 arcsec in the rotary axis.
目錄
摘要 iii
Abstract v
誌謝 vi
目錄 vii
圖目錄 x
表目錄 xiv
第1章 、緒論 1
1-1前言 1
1-2文獻探討 1
1-3規格要求與內容簡介 11
1-3-1 規格要求 11
1-3-2 內容簡介 12
第2章 、長行程奈米級精密平台實體與系統各部 13
2-1 X-Y雙軸長行程導螺桿平台[1] 14
2-1-1 長行程導螺桿平台幾何誤差 16
2-1-1-1 Y軸長行程導螺桿平台幾何誤差 16
2-1-1-1-1 Y軸長行程導螺桿平台組裝過程 16
2-1-1-1-2 六自由度量測系統校正過程 18
2-1-1-2 X-Y雙軸長行程導螺桿平台幾何誤差 23
2-2 三自由度壓電微動平台 30
2-2-1 平台實體設計概念 30
2-2-2 平台實體與各部說明 30
2-2-3 三軸壓電平台靜態分析 36
2-2-3-1平台X軸位移分析 36
2-2-3-2平台Y軸位移分析 37
2-2-3-3 θz旋轉角偏擺 38
2-3量測系統部分 39
2-3-1 量測系統硬體說明 39
2-3-2 量測系統架構 41
2-3-2-1 雷射與移動軸平行度校正 42
2-3-2-2 鏡組垂直度檢驗 43
2-4長行程奈米級精密平台實體架構說明 45
第3章 、平台系統控制說明 48
3-1. X-Y雙軸長行程導螺桿平台控制系統設計 48
3-1-1. 閉迴路系統響應 48
3-2 三自由度壓電微動平台控制系統設計 50
3-2-1 閉迴路系統響應 51
第4章 、長行程奈米級精密平台控制系統整合 55
4-1長行程奈米級精密平台控制系統說明 55
4-2步階響應圖說明 56
4-3長行程奈米級精密平台弓型路徑結果 57
4-4長行程奈米級精密平台循圓控制結果 59
第5章 、結論 62
參考文獻 63
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