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研究生:蕭明全
研究生(外文):Ming-Chuan Hsiao
論文名稱:以微機電架構製作高分子奈米布拉格式光閘之波導元件
論文名稱(外文):Fabrication of Polymer Nano-Bragg Grating Waveguide Devices by Using MEMS
指導教授:張文俊張文俊引用關係
指導教授(外文):Wen-Chung Chang
學位類別:碩士
校院名稱:南台科技大學
系所名稱:電子工程系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:英文
論文頁數:48
中文關鍵詞:布拉格光閘全像干射波導
外文關鍵詞:Bragg gratingHolographic interferenceWaveguide
相關次數:
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  • 下載下載:29
  • 收藏至我的研究室書目清單書目收藏:0
本篇論文結合了光微影技術(Photolithography)及軟式翻模(Soft molding)技術提出一種創新的製程,為了製作布拉格光閘(Bragg grating),利用沾印(Stamping)傳輸技術配合全像干射(Holographic interference)技術將光閘由光電阻母模轉印到PDMS軟式橡膠子模,然後由PDMS高分子子模透過微影及軟式翻模技術在OG146高分子上製作成奈米布拉格式光柵,再利用微機電製程於光柵上製通道式光波導模仁,以上述軟式翻模技術製作光波導布拉格濾波器。
透過此項技術可降低損耗、製程成本及簡單化處理的優點,光波導及光閘的特性量測是透過高倍率電子顯微鏡和原子力顯微鏡(AFM)系統來完成,所量測的結果達到理想的散射效率,而光傳輸特性結果經由光學頻譜分析儀(OSA)所測量。
In this paper, we proposed a novel process, which incorporates with the photolithography and soft molding techniques. For the Bragg grating fabrication, the stamping transfer technique, incorporated with holographic interference technology, was used to transfer the grating from photoresist master mold to the PDMS soft rubber mold. Then, we use the PDMS polymer mold to obtain the Bragg reflection grating waveguide on the OG146 polymer by using of the photolithography and soft molding techniques. Therefore, it utilized Micro-Electro-Mechanical System (MEMS) to produce a channel optical waveguide molding and then it fabricated a optical waveguide Bragg filter by using mentioned soft molding technology.
This technique has the advantages such as simple treatment, low loss and fabrication cost. Optical waveguide and grating were observed through SEM and AFM system. The observed results achieve the optimal diffraction efficiency. The optical transmission characteristics were measured in terms of optical spectrum analyzer (OSA).
中文摘要 iv
Abstract v
各章中文簡介 vi
誌謝 xiv
Table of Content xv
List of Table xvii
List of Figure xviii
Chapter 1 Introduction 1
1.1 Development of Optical Fiber communication 1
1.2 Motivation of Research and development of waveguide components 2
1.3 Outline of the Thesis 3
1.4 MEMS 4
Chapter 2 Theory of optical waveguide and soft lithography 5
2.1 Theory of optical waveguide 5
2.2 Optical waveguide components 6
2.3 Soft lithography 10
2.3.1 Replica Molding, (REM) 11
2.3.2 Micromolding in Capillaries (MIMIC) 11
2.3.3 Microtransfer Molding (TM) 12
2.3.4 Microcontact Printing (μCP) 12
2.4 PDMS 13
2.4.1 Features of PDMS 13
2.4.2 Fabricating conditions of PDMS 14
Chapter 3 Fabrication of OG polymer optical fiber grating 16
3.1Holography 16
3.2 Theory of fabricating Bragg grating 19
3.3 The structure of Bragg grating interference 21
3.4 Fabrication of polymer Bragg grating 23
3.4.1 Photolithography fabrication of Bragg Grating 24
3.4.2 Stamp Molding of Bragg grating 28
3.5 Results of lift molding fabrication 30
Chapter 4 Reflective waveguide of polymer Bragg grating 31
4.1 Structure of reflective waveguide of polymer Bragg grating 31
4.2 SU-8 thick filmed photoresist 31
4.3 SU8 thick filmed photoresist reflective waveguide of polymer Nano-Bragg grating 32
4.4 Master molding fabrication of reflective waveguide of Bragg grating 34
4.5 Discussion of Experimental results of Master molding in OG polymer waveguides 37
4.5.1 Characteristics of both SU-8 photoresist and substrate of OG polymer diffractive grating 37
4.6.1 Basic principles of optical fiber grating 38
4.6.2 Measurement of reflective waveguide of polymer Bragg grating 39
Chapter 5 Conclusion 46
Reference 47
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[3]LaBianca, N., Gelorme, J., Le e, K., Sullican, E., and Shaw, J., ”High aspect ratio optical resist chemistry for MEMS applications,” Proc. 4th Int. Symp. On Magnetic Materials, Processes, and Devices, The Electrochem. Soc., Vol. 95-18, pp. 368-396, (1995).
[4]Lorenz, H., Despont, M., Fahrni, M., LaBianca, N., Vettiger, P., and Renaud, P., “SU-8: a low-cost negative resist for MEMS,” J., Micromech. Microeng. 7, pp.121-124 (1997).
[5]Zhang, J., Tan, K. L., Hong, G. D., Yang, L. J., Gong, H.”Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS,” J. Micromech. Microeng. 11,pp.20-26 (2001)
[6]Zinner H, Sensors and Actuators A, 1995, 46-47, 1
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[13]Anadi Mukherjee, Ben Joy Eapen, and Swapan K. Baral, “Very low loss channel waveguides in polymethylmethacrylate “, Appl. Phys. Lett. 65, 3179 (1994)
[14]Chang-Yen, D.A.; Eich, R.K.; Gale, B.K.;”A Monolithic PDMS Waveguide System Fabricated Using Soft-Lithography Techniques”, Lightwave Technology, Journal of Volume 23, Issue 6, June 2005 Page(s):2088 – 2093
[15]T. C. Sum, A. A. Bettiol, J. A. van Kan, F. Watt, E. Y. B. Pun, and K. K. Tung, “Proton beam writing of low-loss polymer optical waveguides”, Appl. Phys. Lett. 83, 1707 (2003)
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[17]Yueh-Lin Loo, Robert L. Willett, Kirk W. Baldwin, and John A. Rogers, “Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics”, Appl. Phys. Lett. 81, 562 (2002)
[18]Daniel B. Wolfe, J. Christopher Love, Byron D. Gates, George M. Whitesides, Richard S. Conroy, and Mara Prentiss, “Fabrication of planar optical waveguides by electrical microcontact printing”, Appl. Phys. Lett. 84, 1623 (2004)
[19]Xia, Y., et al. 1997. “Replica molding using polymeric materials: A practical step toward nanomanufacturing”, Adv. Mater. 9: 147-149.
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