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研究生:趙堂烈
研究生(外文):Tang-Lie Zhao
論文名稱:極化多彩數位全像顯微鏡技術之開發
論文名稱(外文):Polarized multi-color digital holographic microscope
指導教授:陳政雄陳政雄引用關係
指導教授(外文):Zheng-Xiong Chen
學位類別:碩士
校院名稱:國立中正大學
系所名稱:光機電整合工程所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:83
中文關鍵詞:數位全像顯微鏡相位混淆Fresnel繞射
外文關鍵詞:digital holographic microscopeFresnel diffractionphase unwrapping
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數位全像顯微術擁有高解析及快速量測的特性,在離軸全像下還可達到one-shot之目的,因此對於環境震動的敏感度較低,適合用於生產線上的檢測。以往數位全像顯微術對於表面高度大於量測波長時,重建後則會產生相位混淆的現象。本研究將以極化多彩光源作照明,並在one-shot下改善重建後之相位混淆。
本文以R、G、B雷射為照明光源,並對各波長施予不同極化方向,以減少多波長同時照明之干擾。光路上採用麥克詹達(Mach-Zender)方式架設,並對參考光施予離軸角。影像紀錄方面則是以彩色CCD做為紀錄工具,如此便能在單張攝像擷取三波長產生的全像片。數位全像片是以數值模擬參考光並以Fresnel繞射方式將物光解出。最後將不同波長重建後的振幅對比疊合成為彩色重建影像,而各波長之相位對比再次經由計算解決相位混淆。
極化多彩數位全像顯微鏡在單次拍攝能重建出15.395um高度而無相位混淆的發生,相較於以單波長(He-Ne雷射)之數位全像顯微術,待測物若高於632.8nm則將產生相位混淆。因此極化多彩數位全像顯微鏡將能彌補數位全像顯微術之缺點(相位混淆),並同時擁有其快速量測之優點。
Digital holography is one kind of optical measurement which have the important characteristics of non-contact and high resolution. Off-axis digital holographic microscope (DHM) is a technique of performing measurement by single hologram acquisition. As a result, it reduce the susceptibility to the environment vibration. Holography is a well-proven method to quickly catch the 3D information of a sample by one-shot measurement and to provide the high resolution of measurement.

This paper is focused on the measurement of micro-three-dimensional object by using the multicolor digital holographic microscope (MDHM). Three lasers with different wavelength and polarization consist of the light source of the DHM. The basic light path of architecture is Mach–Zender interferometer, and the reference wave is oriented such that the reference wave reaches the CCD camera with a small incidence angle. We use color CCD camera for one-shot recording, and utilize digital reconstruction to produce unwrapped phase images. The numerical reconstruction method consists basically of calculating the Fresnel diffraction pattern of the hologram.

Polarized multi-color digital holographic microscope can be used to extend the axial range of the object being imaged by one shot. And it can reconstruct the range of the surface axial about 15.395um without phase ambiguity. So Polarized multi-color digital holographic microscope has an advantage of fast measurement and elimating the phase wrapping.
第一章 緒論 1
1-1 前言 1
1-2 研究動機與目的 2
1-3 論文架構 4
第二章 文獻回顧 6
2-1前言: 6
2-2離軸式數位全像術 8
2-3同軸式數位全像術 10
2-4多彩數位全像術 13
2-5 偏極化數位全像顯微鏡 20
2-6 重建過程處理 22
第三章 數位全像光路架構 26
3-1多彩離軸數位全像架構 26
3-2多彩同軸數位全像架構 28
3-3 離軸與同軸架構討論 29
第四章 偏極化多彩數位全像顯微鏡理論推導 31
4-1離軸數位全像術 31
4-1-1影像之紀錄 31
4-1-2影像之重建 32
4-2多彩數位全像術 33
4-2-1多彩數位全像術之紀錄 33
4-2-2多彩數位全像術之重建 35
4-3 多彩數位全像顯微鏡 37
4-1多彩數位全像顯微鏡之紀錄 37
4-3-2多彩數位全像顯微鏡之重建 39
第五章 實驗架構 41
5-1 光路架設: 41
5-2 數位全像片重建步驟 46
5-3 離軸數位全像顯微鏡重建式之驗證: 48
5-4參數取得與頻域處理: 50
5-5 one-shot量測之驗證 57
5-6重建解析度之驗證: 65
5-7解決相位混淆: 67
第六章 結論與未來研究重點 71
6-1 結果討論 71
6-2 未來與展望 75
參考文獻 81
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