近年來，壓電材料因為具有電學與力學耦合之壓電效應，已在許多領域被廣泛應用。近代工程與科學材料已經由既往的結構性材料，發展到現今的多功能材料(智慧材料)，其中壓電材料所具有偵測、制動與感測能力，更是在微機電工程中有著舉足輕重的地位。相對於早期大部分的壓電元件所採用的基礎材料-陶瓷，高分子材料具有製造容易、成本低、可撓曲等優點；故近年來新型壓電基材之開發方向多轉往高分子材料作為基礎材料。本文使用COC (Cyclic Olefin Copolymer)為材料，製作成COC薄片後利用網印技術製作出薄板上下之電極，爾後給予高壓電場進行極化(poling)成為駐極體壓電性的高分子材料薄膜。利用儀器量測薄膜之壓電特性，針對量測結果加以討論以獲得一些在應用上可供參考的結果。

Because of the piezoelectric effect between the electric and mechanical coupling the piezoelectric materials, have been used extensively in recent years. Modern engineering and scientific materials have developed from early structural materials to the modern multi-functional materials. The piezoelectric material have the functions such as investigation, sensing and actuating, and have been applied to the engineering of microelectromechanical system. Compared with the early piezoelectric materials, the polymer materials have many advantages, such as easy to manufacture, low cost and flexible. So the polymers have been developed as the major new-type piezoelectric materials in recent years. In this paper, we use Cyclic Olefin Copolymer material to make a thin electrode layer of COC. Then the COC layer is poling by high voltage field and it’s piezoelectric properties are measured. Discussions are made to the obtained results.

封面內頁
簽名頁
授權書
中文摘要英文摘要誌謝目錄
圖目錄表目錄
符號說明

第一章 緒論
1.1研究背景與動機
1.2相關文獻回顧
1.3本文架構
第二章 駐極體材料之基本特性及壓電特性參數
2.1 駐極體材料各種特性之介紹
2.1.1 壓電效應
2.1.2 焦電效應
2.1.3 介電效應
2.1.4 電光效應
2.2 壓電特性參數
2.2.1 介電常數
2.2.2 機電偶合常數
2.2.3 壓電應變常數d 與壓電電壓常數g
2.2.4 焦電常數p
2.2.5 機械品質因數Qm
第三章 設備架構及製備程序
3.1 熱壓成型機
3.2 薄膜測厚儀
3.3 恆溫箱
3.4 手動網印平台以及網版
3.5直流電源供應器
3.6 1000倍高壓放大器
3.7 恆溫矽油槽
3.8 極化用夾具
3.9 阻抗分析儀
3.10 壓電係數量測儀
3.11 標準鐵電量測系統(RT6000
第四章 COC駐極體薄膜之製備與實驗量測方法
4.1 COC駐極體薄膜製備流程
4.1.1 COC薄膜壓製
4.1.2 COC薄膜退火處理
4.1.3 網印COC薄膜上下電極
4.1.4 極化
4.2 實驗儀器操作與量測
4.2.1 極化前之量測
4.2.2 極化後之量測第五章 結果與討論
5.1 COC駐極體薄膜試片於極化前後之量測結果與比較
5.2 實驗結果與討論第六章 結論
6.1 結論
6.2 未來研究建議
參考文獻

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