臺灣博碩士論文加值系統

本論文之目的為利用微電鑄暨熱壓成形技術，製作高穿透率藍光塑膠非球面透鏡，以取代昂貴之精密車削或射出成形技術。非球面透鏡之母模由紫外光可固化之高分子材料SU-8以靜電吸引力製作，因為此類型材料對於藍光之穿透率僅約40-50％，光學效率低，故不適合用於需高能量之光存取系統中。因此本論文擬利用低應力、低表面粗糙度鎳微電鑄模造技術，利用熱壓成形技術製作高穿透率COC塑膠非球面透鏡(穿透率:88％ at 405nm)。目前所製作模具表面粗糙度最佳約8nm，經熱壓後之COC塑膠(n=1.53)非球面透鏡與原SU-8(n=1.67)非球面透鏡其高度差約為2.6％，聚焦光點大小之誤差約11％。聚焦光點誤差除來自於形貌誤差外，約8.38％來自於兩材料折射率差異。
論文中亦探討不同熱壓溫度及壓力，對於熱壓後非球面透鏡表面粗糙度與聚焦光點大小之關係。此技術若能開發成功，將可彌補高分子材料SU-8對於藍光穿透率的不足及靜電力所製作非球面透鏡不具flange較難封裝之缺點。

The purpose of this paper is to use micro-electroforming and hot-embossing technology as an alternative to high-cost precision cutting or traditional injection molding, in the fabrication of plastic aspheric lenses with high blu-ray transmittance. The female dies for aspheric lenses are fabricated from UV-cured SU-8 polymer via electrostatic attraction. However, SU-8 has a 405 nm blu-ray transmittance of only roughly 40-50%, which is not appropriate for use in high-density optical pickup systems. This paper, therefore, uses low-stress, low surface roughness, nickel micro-electroforming and molding technology, and employs a micro hot-embossing system, to form aspheric lenses with high blu-ray transmittance from COC plastic (transmittance: 88% at 405 nm).The resulting lenses have a clear aperture of approximately 1 mm, and a numerical aperture of roughly 0.65.The electroforming mold has a roughness of approximately 8 nm by AFM. The roughness of the COC aspheric lenses after hot-embossing is good by AFM. The shape precision of the hot-pressed COC aspheric lens and original SU-8 aspheric lenses can be controlled with approximately 2.6% error. The spot size of the hot-pressed COC and original SU-8 aspheric lenses can be controlled with approximately 11% error. Roughness and spot size were also tested using different pressing temperatures and forces. If this technology can be successfully developed, it would be possible to circumvent the poor blue light transmittance of SU-8 polymer and produce lenses that can be used in blu-ray DVD micro-optical systems.

目 錄
明志科技大學碩士學位論文指導教授推薦書 i
明志科技大學碩士學位論文口試委員審定書 ii
明志科技大學學位論文授權書 iii
博碩士論文電子檔案上網授權書 iv
誌謝 v
中文摘要 vi
英文摘要 vii
目錄 viii
表目錄 xi
圖目錄 xii
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 2
1.2.1傳統透鏡加工 2
1.2.2微成形模造技術 4
1.2.3非球面透鏡製作方式 8
1.3非球面鏡 9
1.3.1非球面之定義 10
1.3.2非球面之特點與應用 12
1.4 研究動機與目的 13
第二章 塑膠材料特性與電鑄概論 14
2.1 光學塑膠概論 14
2.2 光學塑膠特性 15
2.2.1 COP/COC簡介 15
2.2.2塑膠材料比較 17
2.3 電鑄技術基本原理 19
2.3.1金屬電鑄 21
2.3.2合金電鑄 22
2.3.3複合電鑄 22
2.3.4電鍍公式 23
2.4 微結構模造技術 25
2.4.1微熱壓成形技術 26
第三章 實驗流程與設計 28
3.1 微型塑膠非球面透鏡製程實驗 28
3.1.1鎳模具電鑄實驗 29
3.1.2微熱壓成形實驗 33
3.2 塑膠材料穿透率實驗 37
3.3 具支架(flange)透鏡實驗 38
第四章 實驗結果 40
4.1 製程結果 40
4.2 測量結果與討論 48
4.2.1非球面模具表面粗糙度測量 48
4.2.2塑膠非球面透鏡表面平坦度測量 49
4.2.3曲線(SU-8、COC Lens、模具)fit測量 50
4.2.4 SU-8與COC Lens、模具與COC Lens高度差測量 52
4.2.5聚焦光點測量 54
第五章 結論與未來展望 65
5.1結論 65
5.2未來展望 66
參考文獻 67
表 目 錄
表2.1光學塑膠與光學玻璃的性能比較表 14
表2.2常見的COP/COC光學塑膠之性能表 15
表2.3常見的光學塑膠之性能表 17
表2.4電鑄金屬材料特性與應用目的 20
表3.1胺基磺酸鎳鍍液組成及操作條件 31
表3.2模具實驗參數表 33
表4.1 SU-8 Lens與COC Lens之平均高度差 54
表4.2模具與COC Lens之平均高度差 54
圖 目 錄
圖1.1傳統光學透鏡流程圖 3
圖1.2加工機實體圖 3
圖1.3熱壓成形法 4
圖1.4塑膠微透鏡 4
圖1.5射出成形法 5
圖1.6射出後之成品圖 5
圖1.7氣體輔助式熱壓機 6
圖1.8模具與微透鏡 6
圖1.9軟性滾筒 7
圖1.10軟性滾筒式壓印機 7
圖1.11準分子雷射加工圖 8
圖1.12氫氧化鉀對矽基板蝕刻過程圖 9
圖1.13鏡面的凹陷度Z與鏡面的孔徑半徑r之示意圖 10
圖1.14圓錐係數與曲面的關係 11
圖2.1非晶質環烯烴共聚物(COC)反應生成圖 16
圖2.2電鑄基本原理示意圖 19
圖2.3電鑄技術應用產業及產品關連圖 19
圖2.4微結構模造技術(LIGA)示意圖 26
圖2.5微熱壓製程示意圖 27
圖3.1微型非球面透鏡製程流程圖 28
圖3.2接觸角(Contact Angle)之定義 29
圖3.3電鑄槽 30
圖3.4電鑄鎳模具實驗流程參照圖 32
圖3.5壓印壓力與溫度變化關係圖 33
圖3.6初期壓印(砝碼)方式圖 34
圖3.7微熱壓成形機 35
圖3.8微熱壓成形實驗流程參照圖 36
圖3.9塑膠材料(COC) 37
圖3.10加熱板、烘箱、真空燒結爐 37
圖3.11塑膠材料實驗流程參照圖 37
圖3.12具flange透鏡實驗流程參照圖 38
圖3.13具flange透鏡製程流程圖 39
圖3.14具flange透鏡之示意圖 39
圖4.1非球面透鏡母模基板貼法圖 40
圖4.2模具邊緣突起區域圖 41
圖4.3鎳模具圖 41
圖4.4塑膠非球面透鏡(COC Lens)側拍圖 42
圖4.5模具放置圖 42
圖4.6塑膠非球面透鏡(COC Lens)側拍圖 43
圖4.7不同壓力與溫度下與flange厚度之關係圖 43
圖4.8 Lens載具設計圖 44
圖4.9 Lens載具實體圖 44
圖4.10塑膠材料於真空燒結爐 45
圖4.11塑膠材料於烘箱 45
圖4.12塑膠材料於加熱板 46
圖4.13各種塑膠材料對於藍光雷射(波長405nm)測試 47
圖4.14 COC藍光穿透率測試 47
圖4.15 flange圖 48
圖4.16模具凹面處之粗糙度圖 49
圖4.17塑膠非球面透鏡之表面平坦度 50
圖4.18設計之透鏡(SU-8 Lens)與模具曲線fit圖 50
圖4.19 SU-8 Lens、模具與COC Lens(10kg下)之曲線fit圖 51
圖4.20 SU-8 Lens、模具與COC Lens(20kg下)之曲線fit圖 51
圖4.21 SU-8 Lens、模具與COC Lens(30kg下)之曲線fit圖 52
圖4.22 SU-8 Lens、模具與COC Lens(40kg下)之曲線fit圖 52
圖4.23 SU-8 Lens與COC Lens之平均高度差 53
圖4.24模具與COC Lens之平均高度差 53
圖4.25聚焦測試之實驗裝置架構圖 55
圖4.26 SU-8 Lens聚焦情況 56
圖4.27 COC Lens(10kg)聚焦情況 57
圖4.28 COC Lens(20kg)聚焦情況 58
圖4.29 COC Lens(30kg)聚焦情況 59
圖4.30 COC Lens(40kg)聚焦情況 60
圖4.31各壓印力與溫度聚焦光點之彙整圖 61
圖4.32壓印力與溫度關係 61
圖4.33 AFM量測示意圖 62
圖4.34 10kg/185℃表面粗糙度 62
圖4.35 20kg/185℃表面粗糙度 63
圖4.36 30kg/155℃表面粗糙度 63
圖4.37 40kg/155℃表面粗糙度 64

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