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研究生:林尚明
研究生(外文):Shang-Ming Lin
論文名稱:以田口法進行光學玻璃基板拋光製程最佳化研究
論文名稱(外文):Study of optimal polishing process for optical glass substrate using Taguchi method
指導教授:施錫富
指導教授(外文):Hsu-Fu Shih
學位類別:碩士
校院名稱:國立中興大學
系所名稱:機械工程學系所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:60
中文關鍵詞:田口法表面粗糙度表面平坦度穿透率
外文關鍵詞:Taguchi methodroughnessflatnesstransmittance
相關次數:
  • 被引用被引用:6
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  • 收藏至我的研究室書目清單書目收藏:0
本文使用田口法進行光學玻璃基板的最佳化機械拋光製程研究,以找出達到最佳表面品質和光學性質的拋光參數。研究中使用了二種材質的玻璃,分別為Soda-lime玻璃和Crysterna玻璃,製作厚度0.7mm的光學玻璃。針對影響表面品質和光學性質甚巨的機械拋光參數,選擇田口方法的直交表格進行實驗,拋光後評量品質的量測數據有表面粗糙度、表面平坦度和玻璃穿透率,利用田口法進行分析數據,以得到粗糙度最低、平坦度最佳和穿透率最高的光學玻璃基板。
實驗結果顯示,使用本文設計之製程參數,光學玻璃基板可達到最小表面粗糙度Sa=0.66nm、最佳表面平坦度PV=9.177fr和最佳穿透率T%=91.66%,使用強光燈檢查玻璃表面,呈現高度透明、無刮傷、無雜質的優良狀態。比較兩種材質的玻璃,Crysterna玻璃的實驗結果優於Soda-lime玻璃,製程參數也較穩定。本研究提出之製程參數,能有效試製出高表面品質與光學性質的光學玻璃,可應用於面板產業、光學產業、手機產業和太陽能電池產業。
In the study, we use Taguchi method to investigate optical glass substrate’s optimal mechanical polishing process in order to obtain the polishing parameters which refer to the best surface and optical quality. We made the 0.7mm thickness optical soda-lime and crysterna glasses, respectively. Since the parameters may have considerable influence on surface quality and optical quality, Taguchi’s orthogonal arrays are chosen to set up the experiment. After polishing, we first measure roughness, flatness, and transmittance to examine the result and then analyze the data by Taguchi method to gain the optimal optical glass substrate with the lowest roughness, best flatness, and highest transmittance.
The result of the experiment shows that using the optimal polishing parameter, designed by this study, can meet the lowest roughness Sa=0.66nm, the best flatness PV=9.177fr (fringe), and the highest transmittance T%=91.66%. Moreover, the surface of glass shows high transparent, non-scratch, and non-particle substrate with excellent quality under the inspection by blaze. Comparing the experiment result, crysterna glass is evidently better than soda-lime glass for its more steady process and better optical quality. The process parameter proposed by the study would lead to the qualified optical glass making with high surface and optical quality. Furthermore, it contributes to TFT-LCD, optical lens, mobile phones, solar cells, and the relative industries.
致謝……………………………………………………………………Ⅰ
中文摘要………………………………………………………………Ⅱ
英文摘要………………………………………………………………Ⅲ
目次……………………………………………………………………Ⅳ
表目次…………………………………………………………………Ⅵ
圖目次…………………………………………………………………Ⅷ
第一章 緒論……………………………………………………………1
1-1 前言……………………………………………………………1
1-2 文獻回顧………………………………………………………2
1-3 研究動機………………………………………………………4
1-4 論文架構………………………………………………………4
第二章 基礎理論………………………………………………………5
2-1 田口法基本理論………………………………………………5
2-2 玻璃的光學性質………………………………………………7
2-2-1 玻璃的穿透率……………………………………………7
2-2-2 玻璃的反射率……………………………………………8
2-3 玻璃切割………………………………………………………9
2-4 玻璃研磨………………………………………………………10
2-5 玻璃拋光………………………………………………………11
第三章 光學玻璃基板製作……………………………………………13
3-1 玻璃特性與工藝流程…………………………………………13
3-2 玻璃切割………………………………………………………14
3-3 玻璃雙面機械研磨……………………………………………15
3-4 玻璃雙面機械拋光……………………………………………17
3-5 超音波清洗……………………………………………………19
第四章 實驗方法與測量儀器介紹……………………………………20
4-1 實驗方法………………………………………………………20
4-2 白光干涉儀……………………………………………………25
4-3 分光光譜儀……………………………………………………26
4-4 雷射干涉儀……………………………………………………28
第五章 實驗結果………………………………………………………30
5-1 Asahi玻璃實驗結果……………………………………………30
5-1-1 表面粗糙度………………………………………………30
5-1-2 表面平坦度………………………………………………33
5-1-3 穿透率……………………………………………………35
5-2 IG3玻璃實驗結果………………………………………………37
5-2-1 表面粗糙度………………………………………………37
5-2-2 表面平坦度………………………………………………40
5-2-3 穿透率……………………………………………………42
5-3 差異分析………………………………………………………44
第六章 結論……………………………………………………………47
6-1 結果與討論……………………………………………………47
6-2 未來展望………………………………………………………48
參考文獻………………………………………………………………49
附錄A 表目錄…………………………………………………………51
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