臺灣博碩士論文加值系統

在本篇論文中，我們利用調變不同製程參數與元件幾何結構，成功製備出Enhancement Mode N-Type ZnO-TFT，其最大場效載子遷移率(μFE)為 4.2 cm2/V.s，開關比ION/OFF Ratio約104~107之間，最佳次起始斜率S.S=0.83V/Decade，並將元件應用於光電顯示之縮小元件幾何面積、OLED電流驅動與邏輯運算之靜態負載式反向器製作。
本篇論文大致可分兩部份，第一部分探討氧化鋅半導體薄膜特性。不同之濺鍍參數環境(Sputtring Parameter)與後處理(Post-Treatment)對於氧化鋅薄膜之影響，藉由XRD、AFM、SEM分析之，並且將ZnO-TFT元件I-V特性加以討論。
第二部份則探討ZNO-TFT元件之應用。包含新型HEXAGONAL元件結構之探討;另外，並用ZNO-TFT製作顯示器相關應用電路OLED驅動、反向器邏輯運算。

In this paper,we demonstrate an Enhancement Mode N-Type ZnO-TFT by changing the Process Parameter and Device Geometric Structure.The maximum Field Effect Mobility(μFE) is 4.2 (cm2/V.s) and the ION/OFF~104~107,the optimized Subthreshold Swing (S.S) is 0.83(V/Decade).We also did some applications of saving device area、driving OLED and integrating to Logic Inverter by ZnO-TFT devices.
There are two parts of this paper,In the first part,we discuss different Sputtering Parameters and Post-Treatment for ZnO-TFT analysing by XRD、AFM、SEM and I-V Measurement.In the second part,we discuss New Hexagonal device structure for saving device area、driving OLED(Organic Light Emitting Diode) and integrating logic device of ZnO-TFT for display and logic applications.

第一章 簡介....... ....................................10
1-1研究動機與目標..................................... 10
第二章 理論基礎... .....................................11
2-1 氧化鋅(ZNO)晶體結構及特性....... ...................11
2-2 二氧化矽(SIO2)介電氧化層特性.... ...................14
2-3 濺鍍原理...... ......................................16
2-4 電晶體元件操作原理..... .............................19
第三章 實驗步驟及方法...... .............................24
3-1 實驗材料與儀器 ......................................24
3-2 元件結構與製程 ......................................26
3-3 ZNO薄膜剖面特性........ .............................28
第四章 實驗結果與討論...... .............................29
4-1 ZNO-TFT元件特性與製程參數....... ....................29
4-1-1 濺鍍氧化鋅之氧濃度參數對ZnO-TFT特性之影響....... ..29
4-1-2 時間變化影響氧空缺位對ZnO-TFT特性之討論......... ..43
4-1-3 濺鍍氧化鋅之基板加溫參數影響ZnO-TFT特性之討論... ..48
4-1-4 氧化鋅半導體層之薄膜厚度影響ZnO-TFT特性之討論... ..54
4-1-5 以UV-OZONE對元件後處理之ZnO-TFT特性討論......... ..61
4-1-6 不同W/L之ZnO-TFT元件特性討論.................... ..71
4-2 ZNO-TFT元件在光電顯示及邏輯運算之應用............. ..80
4-2-1 高電流推動力、高解析度之Hexagonal ZnO-TFT....... ..80
4-2-2 以ZnO-TFT驅動有機發光二極體(OLED)元件之應用..... ..88
4-2-3 ZnO-TFT反向器(Inverter)邏輯運算應用............ ..92
第五章 結論與未來展望................................. ..97
參考文獻.............................................. ..98

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