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研究生:韓旻坊
研究生(外文):Min-fang Han
論文名稱:平板型微擴流器整流效率之實驗研究
論文名稱(外文):Experimental Study of the Rectification Efficiency of Planar Microdiffusers
指導教授:王逸君
指導教授(外文):Yi-Chun Wang
學位類別:碩士
校院名稱:國立成功大學
系所名稱:機械工程學系碩博士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:73
中文關鍵詞:羅緒科數整流效率微擴流器閥
外文關鍵詞:rectification efficiencymicrodiffuser valueRoshko number
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本研究旨在設計與製造平板型微擴流器閥在非穩態流場下之整流效率測試平台,流體之驅動係使用陶瓷壓電致動器與PDMS薄膜的結合,並利用CCD雷射位移感測器來量測薄膜的位移,繼而得知致動腔體之體積變化量,另ㄧ方面在擴流器出口處量測淨流量。所量測之結果可用以計算微擴流器閥之整流效率。本研究針對頸部寬度為200μm,長度為3000μm,深度約為200μm,擴張角為10°~40°之平板型微擴流器,工作流體為甲醇,致動頻率範圍為2~100Hz,所對應之羅緒科數(Roshko number)為0.11~5.71進行量測。量測結果發現,四種角度的微擴流器閥都具有正向整流效率。其中當微擴流器之擴張角為100,羅緒科數(Roshko number)為2.29時,整流效率最佳,約為23.25%。
The purpose of the present study is to design and fabricate the test platform used for measuring the rectification efficiency of planar micro-diffuser valves under an unsteady flow field. The fluid is pumped and filmed with a stacked-type PZT. The displacement of the actuator is measured by a CCD laser displacement sensor so that volumetric variation of the chamber can be obtained. The net volumetric flow rate of the diffuser valve is also measured and used to calculated the rectification efficiency of the diffuser valve. The diffusers are designed with a throat width of 200μm and four different diverging angle of 10°~40°. The length and the depth of the diffuser are 3000μm and 200 μm, respectively. Methanol is used as the test fluid. The actuation frequency is ranged between 2 and 100 Hz resulting in the Roshko number between 0.11~5.71. Experimental results show that all the tested diffusers have positive rectification efficiency. The maximum rectification efficiency about 23.25% occurs at 10°-diffuser operating at the Roshko number of 2.29.
摘 要 I
A b s t r a c t II
誌 謝 III
目 錄 IV
表 目 錄 VII
圖 目 錄 VIII
符 號 說 明 XI
第一章 序論 1
1-1前言 1
1-2文獻回顧 3
1-3研究動機 9
第二章 實驗原理 12
2-1微擴流器閥之工作原理 12
2-2微擴流器閥之整流效率 13
2-3 擴流器整流效率之量測原理 18
第三章 微擴流器整流效率測試平台之設計與製作 21
3-1實驗參數 21
3-2微擴流器閥之製作 22
3-2-1 CO2雷射加工 22
3-2-2 微擴流器閥及腔體製作 23
3-3 壓電致動器 25
3-3-1陶瓷壓電致動器 25
3-3-2 致動器之動態特性 28
3-4整流效率測試平台 29
3-4-1陶瓷壓電層及平台底板 29
3-4-2 PDMS薄膜製作 30
3-4-3流道結構層及上板蓋 30
第四章 實驗架構與設備 40
4-1實驗架構與設備 40
4-1-1 實驗架構 40
4-1-2 實驗設備 41
4-1-2-1 波形產生器(Function Generator) 41
4-1-2-2 功率放大器(Power Amplifier) 41
4-1-2-3 CCD雷射位移感測器(CCD Laser Displacement Sensor) 42
4-2致動器位移之即時量測 43
4-3整流效率量測 44
4-4 背壓負荷對擴流器效能的影響 46
第五章 結果與討論 52
5-1致動頻率對擴流器整流效率之影響 52
5-2致動電壓對整流效率的影響 55
5-3 背壓差對淨體積流率之影響 55
第六章 結論與未來展望 66
6-1 結論 66
6-2 未來展望 67
參 考 文 獻 70
附件一 測試平台之各層尺寸圖(unit:mm).....................................73
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