跳到主要內容

臺灣博碩士論文加值系統

(3.95.131.146) 您好!臺灣時間:2021/07/29 01:07
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

: 
twitterline
研究生:歐廣順
研究生(外文):Kuang-shun Ou
論文名稱:非線性輸入修正法於靜電致動系統在穩定及非穩定區內之定位與減振研究
論文名稱(外文):Optimal Motion Planning for Suppressing Residual Vibrations in Both Stable and Pull-in Regimes for Electrostatic Actuators Using Nonlinear Command-Shaping Techniques
指導教授:陳國聲
指導教授(外文):Kuo-Shen Chen
學位類別:博士
校院名稱:國立成功大學
系所名稱:機械工程學系碩博士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:121
中文關鍵詞:輸入修正有限元素分析靜電致動微機電
外文關鍵詞:Finite Element AnalysisCommand-ShapingMEMSElectrostatic Actuation
相關次數:
  • 被引用被引用:0
  • 點閱點閱:144
  • 評分評分:
  • 下載下載:20
  • 收藏至我的研究室書目清單書目收藏:0
在微機電系統 (Micro Electro-Mechanical Systems, MEMS)中,微致動技術也是被認為是發展的主流之ㄧ,元件功能的展現所依靠的就是致動技術。 目前微致動的方式中以靜電致動的技術為發展主流,其挾帶著相當多的優點。 在靜電致動技術目前仍存在如:動態反應、定位精確度、安定時間與元件壽命等問題。 尤其靜電致動元件在非穩定區中的操作,是由結構不斷的撞擊電極板直到系統達到平衡,在此撞擊的過程中除會加速損耗元件的可靠度,並會拉長系統安定時間,降低系統動態性能。 本文使用輸入修正法的概念,分別針對單自由度的質量、阻尼、彈簧系統,還有未具阻尼影響的連續樑系統,詳細的推導出適合非穩定區內的輸入修正波型理論,並藉由模擬以及巨觀電磁致動實驗與微觀的靜電致動實驗,證明本文提出與推導之輸入修正波型。 其模擬與實驗結果皆證明本提出之輸入修正波型,可有效的提升接觸元件的系統動態性能,與元件壽命。 另外,針對連續樑系統,本文也推導出其在穩定區內的輸入修正波型理論,可應用於連續樑在穩定區內的定位上。 而針對機電藕合動態分析的部份,利用現有的EDS法為基礎做進一步擴展,發展成機電藕合動態分析方法(DEDS),並分別使用單自由度系統與連續樑受靜電力驅動的問題證明DEDS的正確性,故DEDS可應用於其他靜電致動元件上的動態與應力應變分析。 以元件性能觀點而言,反應速度與能量耗損存在著魚與熊掌不可兼得的問題。 本文藉由使用輸入修正法,使得元件的動態達到快速準確定位且無殘留振動,可算是取得一設計的平衡點。
Electrostatic actuation is important for many microelectromechanical systems (MEMS) applications. In particular, the reduction of motion induced vibration and impact forces during contact are critical for enhancing the performance and reliability of various MEMS devices in optical and RF MEMS applications. In this thesis, the schemes for achieving the above goals are successfully developed using a command-shaping approach. However, since the electrostatic actuation is inherently nonlinear and even unstable, the traditional linear command-shaping scheme can not be used. In this work, nonlinear command-shaping schemes are developed based on an energy approach. In parallel, an electro-mechanical coupling finite element solving scheme, called as DEDS, is also successfully developed. This module integrates an electrostatic distribution subroutine with commercial finite element codes to explore the influence of electrostatic load on mechanical dynamics and has been successfully verified by a lumped analytical model, a convergence test, and a RF MEMS switch case study. The developed shaping schemes are firstly simulated by both MATLAB/SIMULINK and DEDS finite element analyses for verifying the shaping schemes. In addition, the robustness study and more advanced shaping schemes for system containing non-negligible damping are also studied. These developed methods are then experimentally verified by using a super-scale electromagnetically actuated antilever beam. The experimental results indicate that the eveloped schemes can effectively reduce the vibration and the impact forces thus can be used to both increase the dynamic range and response and to enhancing the longevity of RF contact switches. Finally, a MEMS level testing system is also established. By integrating SU-8 thick film fabrication technology, high voltage actuation, and laser position sensing, the effects of the proposed command shaping method for suppressing vibration of MEMS structures are preliminary demonstrated. By the effort of this thesis, the possibility of enhancing the dynamic performance and device reliability have been demonstrated and formulated.
摘要 I
Abstract II
誌謝 III
目錄 V
圖目錄 VIII
表目錄 XIV
符號表 XV

第一章 緒論 1
1.1 前言 1
1.2 靜電致動特性 4
1.3 結構定位減振方法 6
1.4 靜電致動與減振策略 8
1.5 研究動機 9
1.6 研究目標 10
1.7 本文架構 11
第二章 背景介紹 13
2.1多領域藕合分析 13
2.1.1機電藕合靜態分析 14
2.1.2機電藕合動態分析 15
2.2 微製程技術 17
2.3 接觸力學與元件壽命之關係 21
2.4 輸入波形與元件壽命之關係 22
第三章 輸入修正波型之理論推導 25
3.1 系統之數學模型 25
3.2 動態接觸理論 26
3.3 無阻尼系統之輸入修正波形推導 27
3.4 具阻尼系統之輸入修正波形推導 31
3.5 連續系統之輸入修正波形推導 33
3.6 本章結論 36
第四章 模擬分析方法的建立 38
4.1 單自由度系統 38
4.2 連續系統 40
4.3 DEDS 驗證 43
4.3.1 Lumped model 驗證 43
4.3.2 DEDS的收斂分析 46
4.4 範例研究 49
第五章 模擬結果 54
5.1 無阻尼之單自由度系統於非穩定區內的接觸行為 54
5.2 有阻尼之單自由度系統於非穩定區內的接觸行為 58
5.3 樑結構在穩定區內之定位 61
5.4 樑結構在非穩定區內之接觸行為 67
5.5 DEDS於其他機電藕合動態分析的應用 68
5.6 本章結論 76
第六章 巨觀機電系統實驗 78
6.1 等效機電系統 78
6.2 巨觀機電實驗系統架設 79
6.3 新型輸入修正波型之實驗結果 81
6.4 實驗結果討論 86
6.5 本章結論 90
第七章 微機電系統實驗驗證 91
7.1結構動態測試試片製作 91
7.1.1第一代試片設計---以KMPR光阻為犧牲層 92
7.1.2第二代試片設計---以銅為犧牲層 95
7.1.3第三代試片設計---結構與下電極個別製作後再結合 96
7.1.4 第四代試片設計---降低結構剛性 99
7.1.5 第五代試片設計---懸臂式固定設計 100
7.2 結構動態測試實驗架設 101
7.3 實驗結果 105
7.3.討論 108
7.4 本章結論 109
第八章 結論 111
8.1 本文結論 111
8.2 本文貢獻 112
8.3 未來工作與展望 113
參考文獻 115
自述 119
[1]N. Maluf, K. Williams, and I. NetLibrary, Introduction to microelectromechanical systems engineering. Boston: Artech House, 2000.
[2]黃淳權譯, 微機電概論: 高立, 台北, 2000.
[3]P. F. Van Kessel, L. J. Hornbeck, R. E. Meier, and M. R. Douglass, "A MEMS-based projection display," Proceedings of the Ieee, vol. 86, pp. 1687-1704, Aug 1998.
[4]O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, "Deformable Grating Optical Modulator," Optics Letters, vol. 17, pp. 688-690, May 1 1992.
[5]J. J. Yao, "RF MEMS from a device perspective," Journal of Micromechanics and Microengineering, vol. 10, pp. R9-R38, Dec 2000.
[6]W. C. Tang, T. C. H. Nguyen, and R. T. Howe, "Laterally Driven Polysilicon Resonant Microstructures," Sensors and Actuators, vol. 20, pp. 25-32, Nov 15 1989.
[7]R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, "Comb-drive actuators for large displacements," Journal of Micromechanics and Microengineering, vol. 6, pp. 320-329, Sep 1996.
[8]R. Zengerle, J. Ulrich, S. Kluge, M. Richter, and A. Richter, "A bidirectional silicon micropump," Sensors and Actuators a-Physical, vol. 50, pp. 81-86, Aug 1995.
[9]陳建人主編, 微機電系統技術與應用, 初版, 行政院國家科學委員會精密儀器發展中心出版, pp. 883, 2003.
[10]B. McCarthy, G. G. Adams, N. E. McGruer, and D. Potter, "A dynamic model, including contact bounce, of an electrostatically actuated microswitch," Journal of Microelectromechanical Systems, vol. 11, pp. 276-283, Jun 2002.
[11]S. D. Jones and A. G. Ulsoy, "An approach to control input shaping with application to coordinate measuring machines," Journal of Dynamic Systems Measurement and Control-Transactions of the Asme, vol. 121, pp. 242-247, Jun 1999.
[12]O. J. M. Smith and U. o. C. Elec. Eng. Div., Berkeley, Calif., "Posicast Control of Damped Oscillatory Systems," in Proceedings of the IRE, 1957, pp. 1249-1255.
[13]L. Y. Pao and M. A. Lau, "Robust input shaper control design for parameter variations in flexible structures," Journal of Dynamic Systems Measurement and Control-Transactions of the Asme, vol. 122, pp. 63-70, Mar 2000.
[14]D. K. Miu, Mechatronics : electromechanics and contromechanics. New York: Springer-Verlag, 1993.
[15]T. D. Tuttle and W. P. Seering, "Creating time-optimal commands with practical constraints," Journal of Guidance Control and Dynamics, vol. 22, pp. 241-250, Mar-Apr 1999.
[16]W. E. Singhose, Command Generation for Flexible Systems, Ph.D. Thesis, Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, 1997.
[17]N. C. Singer and W. P. Seering, "Preshaping Command Inputs to Reduce System Vibration," Journal of Dynamic Systems Measurement and Control-Transactions of the Asme, vol. 112, pp. 76-82, Mar 1990.
[18]K. S. Chen, T. S. Yang, and J. F. Yin, "Residual vibration suppression for duffing nonlinear systems with electromagnetical actuation using nonlinear command shaping techniques," Journal of Vibration and Acoustics-Transactions of the Asme, vol. 128, pp. 778-789, Dec 2006.
[19]K. S. Chen, K. S. Ou, and L. M. Li, "Development and accuracy assessment of simplified electromechanical coupling solvers for MEMS applications," Journal of Micromechanics and Microengineering, vol. 14, pp. 159-169, Feb 2004.
[20]A. Collenz, F. De Bona, A. Gugliotta, and A. Soma, "Large deflections of microbeams under electrostatic loads," Journal of Micromechanics and Microengineering, vol. 14, pp. 365-373, Mar 2004.
[21]A. Cheng, J. Zhe, and X. T. Wu, "Analytical and finite element model pull-in study of rigid and deformable electrostatic microactuators," Journal of Micromechanics and Microengineering, vol. 14, pp. 57-68, Jan 2004.
[22]D. Hibbit, B. Karlsson, and P. Sorensen, ABAQUS/Standard User's Manial, Version 5.8 ed. Rode Island, USA: Hibbitt, Karlsson & Sorensen, Inc, 1998.
[23]K. Nabors, S. Kim, J. White, and S. D. Senturia, FastCap User's Guide: MIT, 1992.
[24]何正中, 等效微機電靜電致動器之控制器設計與實驗驗證, 國立成功大學機械所碩士論文, 2002.
[25]G. M. Rebeiz and J. B. Muldavin, "RF MEMS switches and switch circuits," Microwave Magazine, IEEE, vol. 2, pp. 59-71, 2001.
[26]M. R. Gabriel, RF MEMS: Theory, Design, and Technology: John Wiley & Sons, Inc., 2003.
[27]C. J. Kim, A. P. Pisano, R. S. Muller, and M. G. Lim, "Polysilicon Microgripper," Sensors and Actuators a-Physical, vol. 33, pp. 221-227, Jun 1992.
[28]R. Wierzbicki, K. Houston, H. Heerlein, W. Barth, T. Debski, A. Eisinberg, A. Menciassi, M. C. Carrozza, and P. Dario, "Design and fabrication of an electrostatically driven microgripper for blood vessel manipulation," Microelectronic Engineering, vol. 83, pp. 1651-1654, 2006.
[29]L. J. Guerin, M. Bossel, M. Demierre, S. Calmes, and P. Renaud, "Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic," in Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on, 1997, pp. 1419-1422 vol.2.
[30]I. H. Song and P. K. Ajmera, "Use of a photoresist sacrificial layer with SU-8 electroplating mould in MEMS fabrication," Journal of Micromechanics and Microengineering, vol. 13, pp. 816-821, Nov 2003.
[31]F. E. H. Tay, J. A. van Kan, F. Watt, and W. O. Choong, "A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels," Journal of Micromechanics and Microengineering, vol. 11, pp. 27-32, Jan 2001.
[32]H. Yu, U. Balogun, B. Li, T. W. Murray, and X. Zhang, "Building embedded microchannels using a single layered SU-8, and determining Young's modulus using a laser acoustic technique," Journal of Micromechanics and Microengineering, vol. 14, pp. 1576-1584, Nov 2004.
[33]Y. K. Yoon, J. W. Park, and M. G. Allen, "Polymer-core conductor approaches for RF MEMS," Journal of Microelectromechanical Systems, vol. 14, pp. 886-894, Oct 2005.
[34]F. Ceyssens and R. Puers, "Creating multi-layered structures with freestanding parts in SU-8," Journal of Micromechanics and Microengineering, vol. 16, pp. S19-S23, Jun 2006.
[35]F. J. Blanco, M. Agirregabiria, J. Garcia, J. Berganzo, M. Tijero, M. T. Arroyo, J. M. Ruano, I. Aramburu, and K. Mayora, "Novel three-dimensional embedded SU-8 microchannels fabricated using a low temperature full wafer adhesive bonding," Journal of Micromechanics and Microengineering, vol. 14, pp. 1047-1056, Jul 2004.
[36]K. L. Johnson, Contact mechanics. Cambridge, UK; New York: Cambridge University Press, 2004.
[37]K. L. Johnson, K. Kendall, and A. D. Roberts, "Surface Energy and Contact of Elastic Solids," Proceedings of the Royal Society of London Series a-Mathematical and Physical Sciences, vol. 324, pp. 301-&, 1971.
[38]B. V. Derjaguin, V. M. Muller, and Y. P. Toporov, "Effect of Contact Deformations on Adhesion of Particles," Journal of Colloid and Interface Science, vol. 53, pp. 314-326, 1975.
[39]D. Maugis, "Adhesion of Spheres - the Jkr-Dmt Transition Using a Dugdale Model," Journal of Colloid and Interface Science, vol. 150, pp. 243-269, Apr 1992.
[40]E. Zaretsky, J. Poplawaski, and C. Miller, "Rolling Bearing Life Prediction - Past, Present, and Future," NASA /TM 2000-210529, 2000.
[41]W. Singhose, W. Seering, and N. Singer, "Residual Vibration Reduction Using Vector Diagrams to Generate Shaped Inputs," Journal of Mechanical Design, vol. 116, pp. 654-659, Jun 1994.
[42]W. E. Singhose and N. C. Singer, "Effects of input shaping on two-dimensional trajectory following," Ieee Transactions on Robotics and Automation, vol. 12, pp. 881-887, Dec 1996.
[43]W. Singhose, E. O. Biediger, Y. H. Chen, and B. Mills, "Reference command shaping using specified-negative-amplitude input shapers for vibration reduction," Journal of Dynamic Systems Measurement and Control-Transactions of the Asme, vol. 126, pp. 210-214, Mar 2004.
[44]N. Singer, W. Singhose, and W. Seering, "Comparison of filtering methods for reducing residual vibration," European Journal of Control, vol. 5, pp. 208-218, 1999.
[45]K. S. Lee and Y. S. Park, "Residual vibration reduction for a flexible structure using a modified input shaping technique," Robotica, vol. 20, pp. 553-561, Sep-Oct 2002.
[46]J. Y. Smith, K. Kozak, and W. E. Singhose, "Input shaping for a simple nonlinear system," in American Control Conference, 2002. Proceedings of the 2002, 2002, pp. 821-826 vol.1.
[47]B. J. Hamrock, Fundamentals of fluid film lubrication. New York: McGraw-Hill, 1994.
[48]H. A. C. Tilmans and R. Legtenberg, "Electrostatically Driven Vacuum-Encapsulated Polysilicon Resonators .2. Theory and Performance," Sensors and Actuators a-Physical, vol. 45, pp. 67-84, Oct 1994.
[49]J. L. A. Yeh, C. Y. Hui, and N. C. Tien, "Electrostatic model for an asymmetric combdrive," Microelectromechanical Systems, Journal of, vol. 9, pp. 126-135, 2000.
連結至畢業學校之論文網頁點我開啟連結
註: 此連結為研究生畢業學校所提供,不一定有電子全文可供下載,若連結有誤,請點選上方之〝勘誤回報〞功能,我們會盡快修正,謝謝!
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
無相關期刊