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研究生(外文):Kuang-shun Ou
論文名稱(外文):Optimal Motion Planning for Suppressing Residual Vibrations in Both Stable and Pull-in Regimes for Electrostatic Actuators Using Nonlinear Command-Shaping Techniques
指導教授(外文):Kuo-Shen Chen
外文關鍵詞:Finite Element AnalysisCommand-ShapingMEMSElectrostatic Actuation
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在微機電系統 (Micro Electro-Mechanical Systems, MEMS)中,微致動技術也是被認為是發展的主流之ㄧ,元件功能的展現所依靠的就是致動技術。 目前微致動的方式中以靜電致動的技術為發展主流,其挾帶著相當多的優點。 在靜電致動技術目前仍存在如:動態反應、定位精確度、安定時間與元件壽命等問題。 尤其靜電致動元件在非穩定區中的操作,是由結構不斷的撞擊電極板直到系統達到平衡,在此撞擊的過程中除會加速損耗元件的可靠度,並會拉長系統安定時間,降低系統動態性能。 本文使用輸入修正法的概念,分別針對單自由度的質量、阻尼、彈簧系統,還有未具阻尼影響的連續樑系統,詳細的推導出適合非穩定區內的輸入修正波型理論,並藉由模擬以及巨觀電磁致動實驗與微觀的靜電致動實驗,證明本文提出與推導之輸入修正波型。 其模擬與實驗結果皆證明本提出之輸入修正波型,可有效的提升接觸元件的系統動態性能,與元件壽命。 另外,針對連續樑系統,本文也推導出其在穩定區內的輸入修正波型理論,可應用於連續樑在穩定區內的定位上。 而針對機電藕合動態分析的部份,利用現有的EDS法為基礎做進一步擴展,發展成機電藕合動態分析方法(DEDS),並分別使用單自由度系統與連續樑受靜電力驅動的問題證明DEDS的正確性,故DEDS可應用於其他靜電致動元件上的動態與應力應變分析。 以元件性能觀點而言,反應速度與能量耗損存在著魚與熊掌不可兼得的問題。 本文藉由使用輸入修正法,使得元件的動態達到快速準確定位且無殘留振動,可算是取得一設計的平衡點。
Electrostatic actuation is important for many microelectromechanical systems (MEMS) applications. In particular, the reduction of motion induced vibration and impact forces during contact are critical for enhancing the performance and reliability of various MEMS devices in optical and RF MEMS applications. In this thesis, the schemes for achieving the above goals are successfully developed using a command-shaping approach. However, since the electrostatic actuation is inherently nonlinear and even unstable, the traditional linear command-shaping scheme can not be used. In this work, nonlinear command-shaping schemes are developed based on an energy approach. In parallel, an electro-mechanical coupling finite element solving scheme, called as DEDS, is also successfully developed. This module integrates an electrostatic distribution subroutine with commercial finite element codes to explore the influence of electrostatic load on mechanical dynamics and has been successfully verified by a lumped analytical model, a convergence test, and a RF MEMS switch case study. The developed shaping schemes are firstly simulated by both MATLAB/SIMULINK and DEDS finite element analyses for verifying the shaping schemes. In addition, the robustness study and more advanced shaping schemes for system containing non-negligible damping are also studied. These developed methods are then experimentally verified by using a super-scale electromagnetically actuated antilever beam. The experimental results indicate that the eveloped schemes can effectively reduce the vibration and the impact forces thus can be used to both increase the dynamic range and response and to enhancing the longevity of RF contact switches. Finally, a MEMS level testing system is also established. By integrating SU-8 thick film fabrication technology, high voltage actuation, and laser position sensing, the effects of the proposed command shaping method for suppressing vibration of MEMS structures are preliminary demonstrated. By the effort of this thesis, the possibility of enhancing the dynamic performance and device reliability have been demonstrated and formulated.
摘要 I
Abstract II
誌謝 III
目錄 V
圖目錄 VIII
表目錄 XIV
符號表 XV

第一章 緒論 1
1.1 前言 1
1.2 靜電致動特性 4
1.3 結構定位減振方法 6
1.4 靜電致動與減振策略 8
1.5 研究動機 9
1.6 研究目標 10
1.7 本文架構 11
第二章 背景介紹 13
2.1多領域藕合分析 13
2.1.1機電藕合靜態分析 14
2.1.2機電藕合動態分析 15
2.2 微製程技術 17
2.3 接觸力學與元件壽命之關係 21
2.4 輸入波形與元件壽命之關係 22
第三章 輸入修正波型之理論推導 25
3.1 系統之數學模型 25
3.2 動態接觸理論 26
3.3 無阻尼系統之輸入修正波形推導 27
3.4 具阻尼系統之輸入修正波形推導 31
3.5 連續系統之輸入修正波形推導 33
3.6 本章結論 36
第四章 模擬分析方法的建立 38
4.1 單自由度系統 38
4.2 連續系統 40
4.3 DEDS 驗證 43
4.3.1 Lumped model 驗證 43
4.3.2 DEDS的收斂分析 46
4.4 範例研究 49
第五章 模擬結果 54
5.1 無阻尼之單自由度系統於非穩定區內的接觸行為 54
5.2 有阻尼之單自由度系統於非穩定區內的接觸行為 58
5.3 樑結構在穩定區內之定位 61
5.4 樑結構在非穩定區內之接觸行為 67
5.5 DEDS於其他機電藕合動態分析的應用 68
5.6 本章結論 76
第六章 巨觀機電系統實驗 78
6.1 等效機電系統 78
6.2 巨觀機電實驗系統架設 79
6.3 新型輸入修正波型之實驗結果 81
6.4 實驗結果討論 86
6.5 本章結論 90
第七章 微機電系統實驗驗證 91
7.1結構動態測試試片製作 91
7.1.1第一代試片設計---以KMPR光阻為犧牲層 92
7.1.2第二代試片設計---以銅為犧牲層 95
7.1.3第三代試片設計---結構與下電極個別製作後再結合 96
7.1.4 第四代試片設計---降低結構剛性 99
7.1.5 第五代試片設計---懸臂式固定設計 100
7.2 結構動態測試實驗架設 101
7.3 實驗結果 105
7.3.討論 108
7.4 本章結論 109
第八章 結論 111
8.1 本文結論 111
8.2 本文貢獻 112
8.3 未來工作與展望 113
參考文獻 115
自述 119
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