本文將利用「準分子雷射行星式加工法」，製作軸對稱之三維微結構，並應用此技術於高分子材料上，製作出折射式與非球面之光學微透鏡，再將此微透鏡與單模光纖黏合，完成一整合式的光纖透。本文主要研究二種光纖透鏡：一是聚焦式光纖透鏡，目的是使光纖導出的光直接聚焦，並利用非球面之光學設計與加工能力，使聚焦光點的大小逼近光學繞射極限；二是準直式光纖透鏡，目標是得到平行與準直的光束輸出。本研究之優勢在於非球面微透鏡的設計與加工能力，且透鏡之直徑大小僅200 μm，與光纖整合後之體積仍非常小，且整合式的光纖透鏡不需額外的光學對準與元件組裝。本文將使用單模光纖與波長1550 nm的雷射，主要原因是此種雷射在傳輸時，有最低的損耗，且此時光纖中只有單一模態傳輸，較利於分析。因此本文會先介紹光纖的基本原理及模態理論，與雷射光在光纖中的傳輸理論，並且利用光學模擬軟體ZEMAX，設計聚焦效率高與準直度高的微透鏡；再藉由「準分子雷射行星式加工法」，利用特殊的光罩設計及工件的自轉與公轉，使雷射投射在工件上的機率呈現三維的連續分布，快速且精確地製作軸對稱非球面光纖透鏡；最後實際量測經由光纖透鏡折射後出光之光纖光束的光學特性。實驗結果顯示此加工法所製作之微透鏡具有表面形貌控制性佳、表面粗糙度僅約10 nm、光學特性良好等優點，證明此準分子雷射行星式加工法應用於製作折射式微光學元件之發展潛力。

A single-mode fiber (SMF) with a microlens on one end is widely used as optoelectronic passive devices to facilitate laser-to-fiber coupling in optical communication systems. This thesis will apply the excimer laser planetary contour scanning method to fabricate refractive and aspheric microlenses which can be integrated with optical fibers. Two types of fiber lenses are investigated. The first one is for optic focusing aiming at a minimized focal spot size at a reasonable working distance.The second one is for optical collimation so that the beam coming out from the fiber has minimum divergence. Both types of fiber lenses can find a wide range of applications in electro-optic devices and optical communication.
This thesis starts with the basic analysis on electromagnetic wave propagation in an optic fiber. Gaussian beam theory and the ABCD Law are then applied to characterized important parameters involved.Numerical analysis and optimization of the surface profiles of microlenses are carried out by ZEMAX. Finally, an KrF excimer laser micromachining system is utilized for the fabrication processes. The basic idea is based on a specific mask design method and a sample rotation method which includes both self-spinning and circular revolving to provide a probability function of laser machining. The probability function created by the planetary scanning assures a continuous, smooth,and precise surface profile to the machined microstructures. The surface profiles are measured and compared with their theoretical counterparts.Excellent agreements both in profile shapes and dimensions are achieved. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components.

摘要......................................................I
Abstract .............................................. III
目錄..................................................... V
圖目錄.................................................VIII
表目錄.................................................XIII
符號說明............................................... XIV
第一章 緒論...............................................1
1-1 研究背景與目的..................................1
1-2 文獻回顧........................................3
1-3 本文架構........................................9
第二章 光纖基本原理......................................11
2-1 光纖種類.......................................11
2-2 圓柱型波導之模態分析...........................14
2-3 單模光纖的重要參數.............................21
第三章 高斯光束..........................................24
3-1 高斯光束的特性.................................24
3-2 高斯光束傳輸理論...............................30
第四章 微型光纖合透鏡分析、模擬..........................32
4-1 光學模型分析...................................32
4-2 光纖透鏡的參數模擬.............................37
4-2-1 聚焦微透鏡的設計.......................38
4-2-2 準直微透鏡的設計.......................44
第五章 微型光纖透鏡設計、製作............................47
5-1 準分子雷射.....................................47
5-1-1 準分子雷射原理.........................47
5-1-2 準分子雷射加工系統.....................48
5-2 行星式加工法...................................51
5-2-1 行星式加工法原理.......................51
5-2-2 光罩設計理論與設計結果.................55
5-2-3 準分子雷射加工.........................59
5-3 微透鏡製作結果.................................61
5-3-1 三維形貌檢測...........................62
5-3-2 掃描式電子顯微鏡（SEM）量測............68
5-3-3 表面粗糙度檢測.........................70
第六章 光纖透鏡效率分析..................................72
6-1 光纖與透鏡的整合...............................72
6-2 光纖效率檢測...................................76
第七章 結論與未來展望....................................86
參考文獻.................................................89

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