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研究生:林育如
研究生(外文):Yu-Ru Lin
論文名稱:以離散事件模擬及雙反應曲面法求解十二吋晶圓廠自動物料搬運系統之直接式搬運策略
論文名稱(外文):The use of discrete-event simulation and dual-response surface method in solving the automated material handling system tool-to-tool strategy for a 300mm semiconductor wafer fab
指導教授:楊大和楊大和引用關係
指導教授(外文):Taho Yang
學位類別:碩士
校院名稱:國立成功大學
系所名稱:製造工程研究所碩博士班
學門:工程學門
學類:電資工程學類
論文種類:學術論文
畢業學年度:96
語文別:中文
論文頁數:110
中文關鍵詞:直接式搬運策略雙反應曲面法離散事件模擬方法均勻設計自動化物料搬運系統
外文關鍵詞:Uniform DesignDirect Tool-to-tool TransportationDiscrete-event SimulationAutomated Material Handling SystemDual Response Surface Method
相關次數:
  • 被引用被引用:4
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隨著晶圓尺寸越來越大,重量亦隨之增加,至十二吋晶圓時代,搬運工作已非人力所能負荷,必須仰賴自動物料搬運系統(Automated Material Handling System,AMHS)。而傳統自動物料搬運系統設備,將晶圓廠分割為兩部分─Intrabay系統與Interbay系統,使得不同通道間之工件搬運活動,必須被切割,進而增加呼叫搬運車次數與等待搬運車時間之浪費;近期自動物料搬運系統整合硬體設備後,晶圓廠內之搬運活動,可統一使用單一種搬運車來進行全廠搬運,此搬運策略稱為「直接式搬運策略」(Direct Tool-to-tool transportation)。
本研究應用離散事件模擬方法(Discrete-event Simulation),建立半導體製造流程,使用均勻設計(Uniform Design)搭配雙反應曲面法(Dual-response Surface Method),分析直接式搬運策略對於廠內生產週期時間、在製品水準、搬運車有效使用率與自動倉儲儲位使用狀況四個績效指標的影響,並找出與直接式搬運策略搭配之最佳AMHS設備配置。經由實驗分析結果得知,提高直接式搬運比例,對於半導體廠的生產績效與AMHS設備績效皆有不錯的提升與改善;另外將所得到之最佳方案與傳統搬運策略績效相比,直接式搬運策略可使生產週期時間降低9.7%亦同時降低廠內在製品水準;對於AMHS設備而言,直接式搬運策略可降低搬運車使用率,此績效提供決策者朝減少搬運車數量方向計畫,或是在使用其他製程改善計畫增加廠房之產能之餘,也無須擔心搬運車數量會變成製程的瓶頸。
With the increase in the size and weight of 300mm wafers, it become heavy loading to use manual handling the wafers, so an automated material handling system (AMHS) is necessary for a 300mm manufacture. In general, an AMHS comprises two types of systems: intrabay and interbay system. When materials are transported from one machine to another located in different process bay, the transportation will be divided. This kind of transportation makes material waste time setting in stocker to call and wait vehicle twice. Recently AMHS has been integrated into one system. 300mm Fab only need one kind of vehicle and rail to connet all process resource. This allows vehicles travel between intrabay and interbay systems directly. Therefore the material can be transported from one process bay to another without moving into the stocker and call another vehicle again. This kind of transportation called direct tool-to-tool transportation strategy.
This paper aims to realize what impact will happen when the direct tool-to-tool transportation is executed. First, using discrete-event simulation to build up a 300mm semiconductor manufacturing flow, and base on uniform design to excute a factorial experimental of three fators, include the ratio of direct tool-to-tool transportation, stocker utilization and quantity of machine load port. Finally, through the dual response surface method finds the optimal of three factors and the best performance in case. The result shows direct tool-to-tool transportation strategy improves the cycle time about 9.7% and also the level of work in process. In AMHS division, this strategy reduces the vehicle utilization and stocker storage size, this gives decision maker a good support when execute capacity improving plan.
摘要 i
Abstract ii
誌謝 iv
目錄 v
圖目錄 vii
表目錄 ix
1. 緒論 1
1.1 研究背景與動機 1
1.2 研究目的 2
1.3 研究範圍與限制 3
1.4 研究流程 3
1.5 論文架構 5
2. 文獻探討 6
2.1 半導體廠設計規劃 6
2.2 搬運系統車輛控制與績效衡量指標 18
2.3 均勻設計 20
2.4 雙反應曲面法 22
3. 研究方法 29
3.1 搬運策略 29
3.2 模擬模式建構程序 35
3.3 實驗流程之設計與分析程序 37
4. 案例分析 40
4.1 研究案例說明 40
4.2 模擬模式建構 45
4.3 實驗設計與分析 62
5. 結論 87
5.1 結論 87
5.2 未來研究建議 88
參考文獻 89
附錄A 缺適度檢定(Lack-of-fit Test) 94
附錄B AutoMod®程式 95
附錄C 製程步驟(以機台代號表示) 102
附錄D Minitab®報表 103
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