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研究生:黃伯融
研究生(外文):Po-Jung Huang
論文名稱:以靜電紡絲製備氧化鋅奈米線於氣體感測研究
論文名稱(外文):Fabrication ZnO nanowires using an electrospinning technique and their application as gas sensors
指導教授:丁志明丁志明引用關係
指導教授(外文):Jyh-Ming Ting
學位類別:碩士
校院名稱:國立成功大學
系所名稱:奈米科技暨微系統工程研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:108
中文關鍵詞:氣體感測靜電紡絲氧化鋅柰米線
外文關鍵詞:gas sensorZnO nanowireselectrospinning
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本研究利用簡易之靜電紡絲技術配合溶-凝膠法製備氧化鋅奈米線,首先將高分子聚乙烯醇溶入醋酸鋅溶液中,形成前驅物溶膠,將此前驅物溶膠經靜電紡絲術形成一維結構,所製備之前驅物電紡絲經由煅燒處理移除有機相形成氧化鋅奈米線,藉由改變其前驅物溶膠特性、靜電紡絲製程參數(噴射距離、噴射速率),煅燒處理溫度和時間以及升溫速率等,可瞭解各種參數對於氧化鋅電紡絲結構與性質的影響,並以熱重分析儀去分析電紡絲的熱性質,掃描式電子顯微鏡觀察其表面型貌,X-ray量測其成份以及晶面,陰極螢光激發光譜探討其氧化鋅電紡絲的光學性質,從X-ray分析得知氧化鋅電紡絲結構與結晶性會受到煅燒處理的影響,在電子顯微鏡下觀察所製備之氧化鋅電紡絲可發現生成的直徑藉由參數的改變可從500nm到90nm,直徑會隨著煅燒溫度升高與時間增長而變細,也會因前驅物導電特性變好而變細,陰極激發光譜證明氧化鋅在紫外光處(368nm)有明顯波峰,可見光激發則相對微弱,說明所製備之氧化鋅電紡絲結構與紫外光發光特性良好,並利用靜電紡絲術直接將前驅物電紡絲沉積在感測電極上形成電極間之架橋,並在煅燒處理後,對乙醇氣體進行感測特性的探討。
This paper reports a simple method for large-scale fabrication of ZnO nanowires by combining a sol-gel process and an electrospinning process. Gel containing polyvinyl acetate (PVA) and zinc acetate was first prepared as the precursor. The precursor was then electrospun to nanowires. The polymeric nanowires thus obtained were calcined to form ZnO nanowires. By varying the precursor gel properties, the electrospinning conditions (injection rate and spray distance), calcination temperature, and calcination time, the ZnO nanowires having desired characteristics were obtained. The nanowires were characterized using thermogravimetry analysis for the thermo properties, scanning electron microscopy for the morphology, X-ray diffractometry (XRD) and cathode luminescence spectrometry for the luminescence property. The XRD results show that crystal structure of zinc oxide nanowires largely depends on the calcination temperature and time. The SEM analysis reveals that the zinc oxide nanowires have diameters in the range of 90-500nm. The diameter of the zinc oxide nanowires decreases with increasing zinc acetate concentration, and also decreases as the calcination temperature and time increase. The CL results show that the ZnO nanowires obtained exhibit very weak visible band emission and very strong UV band emission at 368 nm, indicating a good structure quality. This electrospinning technique allows the direct placement of ZnO nanowires during their synthesis to bridge the sensor electrodes. Ethanol-sensing characteristics were also studied.
摘要 I
Abstract II
總 目 錄 III
圖 目 錄 VII
表 目 錄 XI
第一章 序論 1
1-1 前言 1
1-2 研究動機與目的 3
第二章 理論基礎和文獻回顧 4
2-1 氧化鋅的結構、基本性值及應用 4
2-1-1 晶體結構[][] 5
2-1-2 光學性質 7
2-1-3 電學性質 11
2-2 靜電紡絲術 12
2-2-1 靜電紡絲術簡介 12
2-2-2 靜電紡絲術成長機制 15
2-2-3 合成無機靜電紡絲 17
2-3 半導體電阻式氣體感測器的工作原理 19
2-3-1 蕭特基接觸 21
2-3-2 氧氣的吸附與還原性氣體的作用 25
2-3-3 氧空位 28
第三章 實驗方法 30
3-1實驗設計與流程 30
3-2 前驅物製備 31
3-2-1反應藥品與製造商;前驅物合成 31
3-2-2 設備與製造商 31
3-3 靜電紡絲術合成氧化鋅奈米線 32
3-4氣體感測元件製程簡介 36
3-4-1 晶片清潔 36
3-4-2 高溫氧化製程 37
3-4-3 微影製程 39
3-4-4金屬剝離製程 42
3-5 試片表面形貌和微結構分析 43
3-5-1 掃描式電子顯微鏡(Scanning Electron Microscope, SEM) 43
3-5-2 X射線繞射分析(X-ray Diffraction, XRD) 45
3-6 陰極螢光光譜分析 47
3-7 電性量測及氣體偵測 50
第四章 結果與討論 52
4-1 利用靜電紡絲術製備前驅物奈米纖維 53
4-1-1 前驅物奈米纖維熱性質分析 54
4-2 不同煅燒溫度處理對生成氧化鋅奈米結構之影響 57
4-3不同煅燒時間處理對生成氧化鋅奈米結構之影響 59
4-3-1 氧化鋅奈米結構結晶性與晶粒大小分析 62
4-4 不同煅燒升溫速率對生成氧化鋅奈米結構之影響 65
4-5 調整靜電紡絲製程噴射速率對生成氧化鋅奈米結構之影響 67
4-6改變PVA/Zinc acetate前驅物溶液之不同比例成長氧化鋅奈米結構之影響 69
4-7 不同煅燒溫度處理對於氧化鋅奈米線之螢光激發的影響 72
4-8 微機電製程 77
4-8-1微影製程 78
4-9 氧化鋅感測器對酒精氣體感測特性分析 83
4-9-1不同操作溫度對感測度的影響 85
4-9-2不同氣體濃度對感測度的影響 92
4-9-3 不同煅燒處理之氧化鋅奈米結構感測特性之比較 98
第五章 結論 100
第六章 未來展望 102
第七章 參考文獻 103
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