在本論文中，我們將磷化銦鎵/砷化銦鎵/砷化鎵雙層通道擬晶性高電子遷移率電晶體之三層平面摻雜層進行系統化的研究及探討，其中以三層平面摻雜層和蕭特基能障層之厚度做為調變元件性能的主要因素，我們將利用SILVACO Atlas模擬軟體，對元件做詳細的計算和研究，包含著能帶圖、濃度分佈、直流及交流特性曲線圖等等。由於我們使用雙層通道的結構和利用大能隙之磷化銦鎵材料作為蕭特基接觸層及緩衝層，可使元件得到良好的載子侷限能力、通道載子均勻分佈和良好的蕭特基特性等優點。最後，我們也成功的將實驗製程和量測，並且在實驗結果與理論模擬是互相吻合的。因此，由結果得知，雙通道擬晶性高電子遷移率因利用適當的調變平面摻雜層可得到更好的元件特性，以有助於元件在微波電路之應用。

In this thesis, the device characteristics of InGaP/InGaAs/GaAs double channel pseudomorphic high electron mobility transistors (DCPHEMTs) with triple delta-doped sheets are systematically investigated. The triple delta-doped sheets densities and Schottky barrier layer thickness are important factors to affect device performance. Based on a two-dimensional simulator of Atlas, we report on detailed calculations and studies including energy band diagrams, distribution of carrier, DC and microwave performance. Due to the employed InGaAs DC structure and Schottky and buffer behaviors of InGaP “insulator”, good pinch-off and saturation characteristics, high current drivability, large transconductance and excellent microwave performance are obtained. For comparison, a practical DCPHEMT with good device performance is fabricated successfully. Generally, good agreements between experimental results and theoretical simulations are found. Therefore, it is concluded that the DCPHEMT with appropriate triple delta-doped sheets densities offers the promise for microwave device applications.

Contents
Abstract …………………………………………………………………………... i
Table Captions
Figure Captions
Chapter 1. Introduction ……………………………………………………... 1
1-1. Thesis Organizations ………………………………………………... 2
Chapter 2. Overview of Ⅲ-Ⅴ Field Effect Transistor
2-1. Introduction …………………………………………………………. 4
2-2. Development of HEMT Structure …………...……………………..… 5
2-3. Summary ……………………………………………………………. 10
Chapter 3. Investigation of InGaP/InGaAs Double Channel Pseudomorphic High Electron Mobility Transistors
3-1. Introduction ………………………………………………….……… 11
3-2. Model and Device Structure …………………………………..……. 13
3-3. Simulated Results and Discussion ……………………….….…….... 14
3-3-1. The Influence of Triple Delta-Doped Sheets Densities …………...... 14
3-3-2. The Influence of Schottky Barrier Layer Thickness (t) .…….……... 20
3-3-3. Comparison between Simulated and Practical Devices ……………… 22
3-4. Summary ……………………………………………………………. 23
Chapter 4. Conclusion and Prospect
4-1. Conclusion …………………………………………………………. 25
4-2. Prospect …………………………………………………………….. 26
References ………………………………………………………………………… 27
Tables
Figures
Publication List

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