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研究生:蘇晉鋒
研究生(外文):Jin-Fong Su
論文名稱:盤狀液晶的製備及其有機薄膜電晶體的應用
論文名稱(外文):Preparation of Discotic Liquid Crystals with Application to Organic Thin-Film Transistor
指導教授:黃文堯黃文堯引用關係
指導教授(外文):Wen-Yao Huang
學位類別:碩士
校院名稱:國立中山大學
系所名稱:光電工程研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:106
中文關鍵詞:有機薄膜電晶體盤狀液晶自組裝單分子層
外文關鍵詞:Organic Thin Film TransistorDiscotic Liquid Crystalsself-assembled monolayer
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本論文主要分成二個部份,第一部份為盤狀液晶Acid-6的製備,第二部份則是以盤狀液晶Acid-6為材料,在不同的基板溫度下,於二氧化矽與自組裝單分子層二種基板表面上製備有機薄膜,藉由原子力電子顯微鏡( AFM )與X-ray繞射儀( XRD )來觀察有機膜之表面型態與分子排列;然後應用於有機薄膜電晶體元件中,並藉由半導體參數分析儀來量測分析元件特性。
我們所測得的電性圖,在不同溫度變化及不同基板下皆沒有得到期望中的特性,推測由於盤狀液晶Acid-6為負型半導體材料,在大氣環境下易受到水氣的影響,因此無法獲得元件特性;另一方面,由於盤狀液晶Acid-6的分子量較大,所以其黏滯性較大而導致成膜晶體較小,因此影響了載子遷移率;最後從元件製程方面來探討元件的製程參數是否適用於製作有機薄膜電晶體。
The thesis is divided into two parts. One is about the preparation of discotic liquid crystals Acid-6. The other is about the growth of Acid-6 thin film by thermal evaporation on silicon oxide surfaces and modified silicon oxide surfaces such as self-assembled monolayer(SAM) in different temperature. The surface morphology and molecular orientation of the thin film were studied by Atomic Force Microscopy(AFM) , X-ray Diffraction (XRD) , and then they were applicated to organic thin film transistor and measured properties by Semiconductor Parameter Analyzer.
In the second part of our research, our expectative characteristics was not observed in different temperature and substructure. In the other side, we guessed that because discotic liquid crystals Acid-6 is negative semiconductor materials, so it is susceptible to hydrosphere, thus we can’t observe the electric characteristic of OTFT in the atmosphere. In addition, due to discotic liquid crystals Acid-6 have biggish moleculer weight, thus its viscosity was so big that cause the diameter of Acid-6 crystals to be too small. Therefore, it influenced the carrier mobility. Finally, from the aspect of procedure about fabrication of the devices we can discuss whether this parameter of this device can apply to OTFT.
誌謝.........................................................................................I
摘要........................................................................................II
Abstract.................................................................................III
目錄.......................................................................................IV
圖目錄...................................................................................XI
表目錄.................................................................................XV
Scheme目錄.....................................................................XVI
第一章 序論..........................................................................1
1.1前言..................................................................................1
1.2研究動機與目的.............................................................2
1.3有機半導體簡介.............................................................3
1.3.1 P-Type有機半導體....................................................3
1.3.2 N-Type有機半導體....................................................5
1.4有機半導體薄膜之製備方法.......................................7
1.4.1真空蒸鍍( Vacuum Evaporation )............................8
1.4.2溶液塗佈法( Solution-processed deposition ).....8
1.5有機自組裝單分子層之製備方法..............................9
第二章 理論基礎與文獻回顧 .........................................10
2.1有機薄膜電晶體概論..................................................10
2.1.1基本元件構造...........................................................10
2.1.2基本工作原理...........................................................12
2.1.3有機薄膜電晶體的重要參數與公式....................13
2.2盤狀液晶( Discotic Liquid Crystal, DLC-Acid6 )....15
2.3有機薄膜沉積原理......................................................18
2.4有機自組裝單分子層..................................................20
2.4.1分子之自組裝現象...................................................21
2.4.2十八烷基三氯矽烷之自組裝過程及影響因素...22
第三章 藥品與儀器...........................................................25
3.1實驗用藥品...................................................................25
3.2合成步驟.......................................................................27
3.3盤狀液晶( DLC-Acid6 )之基本特性量測.................35
3.3.1熱重分析儀( TGA )...................................................35
3.3.2熱示差掃描卡量計( DSC ).....................................36
3.4有機薄膜電晶體之元件製作.....................................38
3.4.1矽晶片的清洗...........................................................40
3.4.2製作自組裝單分子層..............................................40
3.4.3蒸鍍有機半導體層...................................................41
3.5.4蒸鍍汲極與源極.......................................................41
3.5接觸角量測儀...............................................................42
3.6原子力量子顯微鏡( AFM ) .........................................43
3.7 X-ray 繞射儀( XRD )....................................................43
3.8半導體參數分析儀( Semiconductor Parameter analysis HP 4155 )............................................................46
第四章 實驗結果與討論..................................................47
4.1盤狀液晶( DLC-Acid6 )之量測..................................47
4.1.1 TGA之探討................................................................47
4.1.2 DSC之探討...............................................................48
4.2自組裝單分子層之成膜特性量測............................49
4.2.1接觸角量測................................................................49
4.2.2 AFM量測 ....................................................................54
4.3盤狀液晶( DLC-Acid6 )半導體層蒸鍍薄膜之量測..........................................................................................56
4.3.1 AFM.............................................................................56
4.3.2 XRD............................................................................64
4.4有機薄膜電晶體之元件電性量測............................69
4.4.1電性量測結果與研究討論......................................69
第五章 結論與未來工作..................................................88
第六章 參考文獻...............................................................89
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