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研究生:王泳翔
研究生(外文):Yong-siang Wang
論文名稱:高長度直徑比的微米級圓針之研製
論文名稱(外文):The research of the high aspect ratio of a micron size round pin
指導教授:李榮宗李榮宗引用關係邱源成
指導教授(外文):Lee, Rong-TsongChiou, Yuang-Cherng
學位類別:碩士
校院名稱:國立中山大學
系所名稱:機械與機電工程學系研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:118
中文關鍵詞:鎢針氫氧化鈉
外文關鍵詞:tungsten needlesodium hydroxide
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本研究使用自行研製之微電解加工試驗機,以單點及往復方式,探討供應電壓和起始加工位置對鎢針幾何形狀之影響。以鎢針為陽極浸在2 wt. % 氫氧化鈉電解液中,304不�袗�針為陰極,其尖端直徑為100 μm,電極間距為10 μm進行鎢針之電解加工。
實驗結果發現在較高供應電壓下,因為鎢針直徑縮減速率極快,所以其直徑較難控制,且產生之氣泡較為激烈,容易將極細尺寸之鎢針撞裂。在較低供應電壓下,雖可將鎢針直徑加工至較細尺寸,唯加工時間增長。
在單點加工狀況下,供應電壓12V,起始加工位置為75 μm時,可用來製作短而均勻之微圓柱鎢針,其鎢針表面均勻且光滑、直徑約為9 μm。在往復加工狀況下,供應電壓4V,當起始加工位置介於-50 μm與0 μm之間,可用來製作長而均勻之微圓柱鎢針,其鎢針表面略為粗糙。在起始加工位置為0 μm時,以4V之供應電壓加工24分鐘,再以2V供應電壓加工約28分鐘,可得長度直徑比約為30、直徑約為9 μm之鎢針。
關鍵字:鎢針、氫氧化鈉
In this study, an electrolytic micro-machining tester is employed to investigate the effects of supply voltage and initial machining position on the geometry of the tungsten needle using the single-point and the reciprocating methods. The tungsten needle to be electrolyzed is dipped in an aqueous electrolyte of 2wt % sodium hydroxide as the anode, and the stainless steel needle with a diameter of 100 μm as the cathode, and the electrode gap is set to be 10 μm.
Experimental results show that it is difficult to control the diameter of the tungsten needle because the reduction rate of its diameter is quite fast and the bubbles are generated violently to cause the breakage of the tungsten needle at the higher supply voltage. At the lower supply voltage, the tungsten needle can be machined to a finer scale, but it takes a long machining time.
Under the single-point machining condition, it can be used to manufacture a short, uniform, and smooth tungsten needle with the diameter of 9 μm at the supply voltage of 12V and the initial machining position of 75 μm. Under the reciprocating machining condition, a long uniform micro-cylinder tungsten needle can be manufactured, but its surface becomes rough slightly at the supply voltage of 4V and the initial machining position in the range between -50 and 0 μm. A tungsten needle with the aspect ratio of 30 and the diameter of 9 μm can be manufactured using the following process: the machining time of 24 min at the supply voltage of 4V, and then the machining time of 28 min at the supply voltage of 2V.
Key words:tungsten needle, sodium hydroxide
封面 I
學位論文審定書 II
謝誌 III
總目錄 IV
圖目錄 VII
表目錄 X
中文摘要 XI
英文摘要 XII
第一章 緒論 1
1-1 前言 1
1-2 相關文獻 3
1-2-1 電解加工文獻 3
1-2-2 探針與微電極之製造 7
1-3 本文重點 10
第二章 基本原理 11
2-1 電解加工之基本原理 11
2-2 電化學表面拋光原理 13
2-3 過電壓與極化現象 15
2-4 電解液 18
2-4-1 電解液之選用 18
2-4-2 不同電解液之特性 21
2-4-3 電解液之壽命 23
第三章 實驗設備及實驗方法 25
3-1 實驗設備 25
3-1-1 高精度微電解加工試驗機 25
3-1-2 實驗資料蒐集分析與訊號量測設備 28
3-1-2-1 示波器擷取系統 28
3-1-2-2 顯微鏡設備 28
3-1-2-3 量測與資料收集分析 31
3-2 實驗試片之材料特性與幾何形狀 32
3-2-1 鎢棒材料特性與幾何形狀 32
3-2-2 電解液、輔助電極 33
3-3 試片處理 36
3-3-1 鎢棒試片 36
3-3-2 304不�袗�輔助電極 36
3-4 實驗條件設定 38
3-5 實驗步驟 40
3-5-1 NaOH水溶液之調配 40
3-5-2 電流波型量測 41
3-5-3 實驗流程 42
第四章 實驗結果與討論 45
4-1 單點加工對圓鎢針幾何形狀之影響 45
4-1-1 主軸速度之影響 45
4-1-2 電極間距之影響 53
4-1-3 加工位置之影響 61
4-1-4 供應電壓之影響 63
4-1-4 加工時間之影響 70
4-2 供應電壓對往復電解圓鎢針之影響 75
4-3 加工時間對往復電解圓鎢針之影響 85
4-4 調降供應電壓對往復電解圓鎢針之影響 90
第五章 結論與未來研究方向 97
5-1 結論 97
5-2 未來研究方向 100
參考文獻 101
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