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研究生:林于智
研究生(外文):Yu-Chih Lin
論文名稱:精密條紋式塗佈工程之研究
論文名稱(外文):An Experimental Study on Precision Stripe Coating
指導教授:劉大佼劉大佼引用關係
指導教授(外文):Ta-Jo Liu
學位類別:碩士
校院名稱:國立清華大學
系所名稱:化學工程學系
學門:工程學門
學類:化學工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:172
中文關鍵詞:彩色濾光片條紋塗佈光阻劑氫鍵效應
外文關鍵詞:color filterstripe coatingphotoresisthydrogen bonding
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本研究的目標為發展一種特殊塗細條及薄層的塗佈技術,取代傳統寬幅式塗佈彩色濾光片製程,如能成功,可減少塗液之使用和減少塗液之成本,省下曝光、蝕刻等手續。
  影響條紋式塗佈工程的因素非常多,物理參數如黏度、表面張力、接觸角,幾何參數如狹縫間隙、塗佈間隙等,除此之外,由於本實驗操作尺度更為精細,所以實驗過程中發現了更多微小的細節會影響到條紋式塗佈工程的成功與否,其原因主要在於實驗本身操作機制的精密度與塗液本身性質的配合有關。此外,本研究利用CCD建立流場觀測技術以及拍照分析膜面的平整性與寬度,藉此觀察這些不同參數對於塗膜的影響程度。
  本研究需要克服膜寬上尺度的限制,必須使用更為精密的流量控制器來提供所需要的微小流量,所以本實驗採用了一套精密空氣控制系統作為塗出150μm膜寬的供料系統,同時採用精密點膠塗佈設備做為塗佈工具,此系統可完全克服塗佈流體潤濕膜唇以及塗液回流等問題,如此一來,配合實驗參數即可塗出150μm的條紋寬度,但礙於實驗機台與儀器配合上的限制,未能找到屬於150μm條紋塗佈的塗佈視窗,只能設定一個操作區間能有150μm條紋膜寬出現,此外,藉由工研院膜厚測量儀的幫助下,發現了一項特殊的物理現象,本實驗定義此現象稱為雙牛角現象(double horn effect),在透過多次實驗上的測試輔助和塗液改良後,已經掌握控制雙牛角現象形成的機制和塗液配方,並經由FTIR和流變儀的分析結果,了解到高分子鏈氫鍵效應的發生是雙牛角現象形成的主要關鍵,只要掌握控制塗液氫鍵能力的強弱以及有適當溶劑的搭配,就可以控制雙牛角現象。
摘要 III
Abstract V
目錄 VI
圖目錄 IX
表目錄 XV
壹. 緒論 1
1-1 液晶平面顯示器及其原件介紹 1
1-2 塗佈方式介紹 5
1-3 塗佈視窗與塗膜缺陷的定義 9
1-4 非連續狹縫式塗佈簡介 11
貳. 文獻回顧 13
2-1 狹縫式塗佈工程 13
2-2 條紋式塗佈工程 15
2-2-1 巨觀流體理論分析與專利介紹 15
2-2-2 微觀流體理論分析與專利介紹 26
2-2-3 高分子溶液組成探討與專利介紹 48
2-2-4 應用儀器專利介紹 52
參. 實驗方法與操作系統 54
3-1 實驗藥品 54
3-2 實驗儀器 58
3-3 實驗流體配置 63
3-3-1 光阻劑配置方法 63
3-3-2 PVA溶液配置方法 64
3-3-3 PVA+TiO2配置方法 64
3-4 實驗步驟 65
3-5 方塊式塗佈機 68
3-6 精密點膠塗佈系統 70
肆. 條紋塗佈工程技術之設計 75
4-1 1mm真實光阻劑條紋塗佈工程 75
4-2 150μm條紋塗佈工程改良機制 77
4-2-1 150μm不鏽鋼模具塗佈實驗 77
4-2-2 塗佈起始機制建立之研究 80
4-2-3 粗略針頭式塗佈實驗 83
4-2-4 微小針頭式塗佈實驗 85
4-2-5 精密點膠機參數測試 90
4-3 150μm條紋塗佈工程 93
4-3-1 黏度的效應 94
4-3-2 乾燥的效應 98
4-3-3 塗佈系統的差異 99
4-3-4 膜寬穩定度分析 101
伍. 雙牛角現象之形成與改善 105
5-1 塗液的粒子效應 106
5-2 材料性質研究(一) 109
5-3 材料性質研究(二) 119
5-4 材料成份分析 127
5-4-1 流變性質分析 130
5-4-2 化學性質分析-FTIR測試 137
5-4-3 最佳化條件塗佈分析 155
陸. 結論及未來展望 158
參考文獻 160
附錄一. 標準測量方法 166
附錄二. 符號說明 170
自述 172
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