臺灣博碩士論文加值系統

本實驗以聚二甲基矽氧烷(PDMS)作為彈性基材，利用自製夾具預先施加5%單軸向拉伸應變後在表面沉積矽薄膜，隨後釋放應變並使用步進馬達控制釋放速率。我們藉由原子力顯微鏡(AFM)及光學顯微鏡(OM)來觀察試片表面的皺波結構；由OM觀察發現皺波結構上會出現裂縫及類差排兩種型態的缺陷，本實驗將著重在探討不同參數對皺波結構上類差排密度的影響，我們藉由OM影像圖來統計單位面積內類差排的數量。

　　實驗發現類差排密度會隨應變釋放速率增加而增加，較厚的鍍矽層能降低應變釋放速率所帶來的影響而使類差排密度約略維持定值；實驗也顯示類差排密度會隨鍍矽層厚度增加而減少。本實驗也嘗試將PDMS旋轉塗佈在不同基板上，實驗顯示塗佈在矽晶圓上所製備的PDMS其類差排密度會低於塗佈在聚酯膜上所得到的PDMS。在兩階段應變釋放實驗中，我們觀察到類差排密度僅與初期應變釋放速率有關；而對試片施予循環拉伸及釋放應變也顯示類差排密度不會有大幅度的變動。

摘要 I
Abstract II
致謝 III
總目錄 IV
圖目錄 VI
表目錄 XIV
第一章　前言 1
第二章　文獻探討 3
2.1 理論基礎 3
2.2 皺波結構的生成及現象 6
2.3 皺波結構的應用 14
2.4 實驗目的與範疇 16
第三章　實驗設計 23
3.1 實驗藥品及儀器設備 23
3.2 實驗流程 25
3.3 皺波結構試片製備 25
3.3.1 PDMS基材 25
3.3.2 真空鍍膜 28
3.3.3 應變釋放 28
3.4 表面形貌觀察與分析 29
3.4.1 光學顯微鏡與缺陷統計 29
3.4.2 原子力顯微鏡及輪廓儀 29
第四章　結果與討論 36
4.1 皺波結構的形成 36
4.2 皺波結構上的缺陷 39
4.2.1 裂縫 39
4.2.2 類差排 41
4.3 應變釋放速率對皺波結構上類差排密度的影響 42
4.4 旋轉塗佈材對皺波結構上類差排密度的影響 45
4.5 鍍矽層厚度對皺波結構上類差排密度的影響 46
4.6 兩階段應變釋放對皺波結構上類差排密度的影響 47
4.7 循環拉伸及應變釋放對皺波結構上類差排密度的影響 47
第五章　結論 82
參考文獻 84

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