臺灣博碩士論文加值系統

本研究中，我們提出利用紫外光照射輔助無電鍍鎳磷(Ni-P)奈米顆粒，作為合成奈米碳纖維催化劑，並於400 C溫度下合成奈米碳纖維，以作為未來積體電路內連線應用。
本研究以無電鍍方式，將尺寸約6-15 nm鎳磷奈米顆粒於28 C下析鍍於溝渠壁，以作為成長奈米碳纖維之催化劑用。此因無電鍍可提供一種催化劑沉積方式，其有能力於小尺寸之連接窗孔洞與SiO2溝渠內形成催化劑，以催化生成奈米碳管或是奈米碳纖維連線。然而，在此研究中，由於奈米碳纖維缺陷和排列不整齊的石墨層結構，使得奈米碳纖維連線電阻率偏高(0.357 ohm-cm)，但相信經過進一步改進後，奈米碳纖維連線仍有其應用價值。此奈米碳纖維連線於製程上與現行積體電路製程有相容性，具備應用於未來全奈米碳結構連線之潛力。

目錄
Abstract I
摘要 II
第一章 緒論 1
第二章 文獻回顧 4
2.1 文獻回顧 4
2.1.1 奈米碳管及奈米碳纖維 4
2.1.2 無電鍍法 5
2.1.3 奈米碳基結構連線-奈米碳管、奈米碳纖維 8
第三章 實驗步驟與儀器簡介 10
3.1 實驗步驟 10
3.1.1 基座準備及清洗 10
3.1.2 無電鍍鎳磷奈米顆粒 12
3.1.3 奈米碳纖維連線成長 17
3.1.4 電性量測 19
3.2 量測及分析儀器 21
3.2.1 掃描式電子顯微鏡 21
3.2.2 穿透式電子顯微鏡 23
3.2.3 原子力顯微鏡 25
3.2.4 拉曼光譜 27
第四章 結果與討論 29
4.1無電鍍鎳磷奈米顆粒 29
4.2試片前處理對無電鍍鎳磷之影響 30
4.3 無電鍍溫度對鎳磷奈米顆粒表面形貌之影響 34
4.4 紫外光照射輔助無電鍍鎳磷奈米顆粒 36
4.4.1 無電鍍時間對於催化劑密度與尺寸之影響 36
4.4.2紫外光照射輔助無電鍍反應機制 41
4.5 鎳磷奈米顆粒表面形貌對奈米碳纖維成長之影響 45
4.6奈米碳纖維結構分析 49
4.7 奈米碳纖維連線之電性量測 52
4.8 無電鍍鎳磷顆粒催化奈米碳纖維成長於連接窗孔洞 57
4.9實驗結果與討論 59
第五章 結論 61
參考文獻: 62

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