臺灣博碩士論文加值系統

大部分的微結構是經由光微影技術所製造而成，其製程需經過一道一道的曝光顯影蝕刻過程，其中的曝光步驟便需要藉由事先製作好的光罩來定義所需的圖案。為了節省製程的時間及成本，無光罩技術應運而生。所需要的結構可藉由雷射在試片上掃描過後而取得，亦可用來修補損壞的結構。本研究更進一步的探尋於氧化亞鐵硫桿菌代謝溶液中之雷射輔助金屬銅沉積的可行性。藉由長工作距離的物鏡將1064 奈米紅外光波長的釹-釔石榴石雷射聚焦於銅試片上，沉積出所需之結構，此以雷射輔助銅沉積的過程為一光熱反應。此一創新的金屬微結構成型技術結合氧化亞鐵硫桿菌代謝溶液蝕刻及雷射引導沉積兩種特性，原先被氧化亞鐵硫桿菌代謝溶液所蝕刻而產生的二價銅離子在其雷射所走過的軌跡上再度被還原成金屬銅。實驗後發現金屬銅沉積量〈線寬，厚度〉與雷射功率，掃描速度的倒數及掃描重複次數間存在著正相關性。

摘要 I
Abstract II
Contents III
List of Figures IV
List of Tables VII
Chapter 1 Introduction 1
1. 1 Background 1
1. 2 Motivation and objective of study 2
1. 3 Literature review 2
1. 3. 1 Laser assisted chemical liquid phase deposition on polyimide (PI) 3
1. 3. 2 Laser assisted chemical liquid phase deposition on glass 4
1. 3. 3 Laser assisted chemical liquid phase deposition on semiconductor 5
Chapter 2 Experimental Method 16
2. 1 Working medium 16
2. 2 Optical system setup 16
2. 3 Specimen preparation 17
2. 4 Processing parameters 17
Chapter 3 Results and Discussions 25
3. 1 Deposit composition 25
3. 2 Thickness and line width 25
3. 2. 1 Effects of scan repetitions 26
3. 2. 2 Effects of scanning speed 26
3. 2. 3 Effects of laser power 27
3. 3 Dimensional analysis 27
Chapter 4 Conclusion and Future Work 48
References 49

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