臺灣博碩士論文加值系統

單元尺寸小於100奈米的陣列結構，近年來被廣泛使用在感測、光學、生化、分子反應動力學、單分子檢測、電子學等領域，因此需要一個能快速且批次量產的製程。
由於光學物理效應的限制，最早被使用來生產奈微米元件的光學微影技術在百奈米以下的尺度已出現瓶頸，雖然以更短波長的光源進行曝光、或步進對準等方式可有效提升解析度，但改善仍屬有限，因而近期又發展出更多創新之技術如電子束微影、掃描探針微影、奈米球自組裝微影等。其中奈米球自組裝微影技術係透過聚苯乙烯或二氧化矽球之單/雙層自我組裝膜當成遮罩，進而製備奈微米陣列，其兼具便宜且能批次操作的優點，並能適用於各種基材。
本論文提出如何應用不同尺寸之聚苯乙烯球製備大小、間距不同的奈米金球結構，並調整酒精比例以增加奈米球排列面積，最後透過改變金薄膜的沉積厚度、調整薄膜蒸度角度、及加熱聚苯乙烯球等方式進一步縮小陣列結構的尺寸，成功製備出30-40奈米金球陣列。
在未來，本技術可實際運用於光晶體、資料儲存器、生物感測器、蛋白質晶片、DNA晶片及單分子檢測等領域。

第一章　緒論 1
1.1 前言 1
1.2 研究動機 1
第二章　文獻回顧 5
2.1 光學微影技術 5
2.2 電子束微影技術 7
2.3 X－光微影技術 8
2.4 離子束微影技術 9
2.5 掃描探針微影技術 10
2.5.1 原子力學顯微鏡或掃描隧道顯微鏡加脈衝偏壓 11
2.5.2 掃描隧道顯微鏡化學氣象沈積 12
2.5.3 掃描隧道顯微鏡局部電化學沈積 13
2.6 奈米轉印微影技術 14
2.7 奈米球自組裝微影術 17
第三章　實驗設計 21
3.1 奈米球自我組裝機制 21
3.2 自我組裝遮罩製備方法 22
3.2.1 垂直塗佈法 23
3.2.2 化學或電化學沉積法 25
3.2.3 物理性模板法 26
3.2.4 旋佈法 29
3.3 實驗流程設計 30
3.4 實驗藥品與材料 32
3.4.1 化學藥品 32
3.4.2 實驗材料 33
3.4.3 實驗儀器 33
3.5 實驗步驟 35
3.5.1 試片清潔 35
3.5.2 聚苯乙烯球溶液 35
3.5.3 奈米球遮罩製作 35
3.5.4 離子蝕刻機處理奈米球遮罩試片 36
3.5.5 金薄膜蒸鍍 36
3.5.6 奈米球舉離 36
3.5.7 金薄膜退火 37
第四章　結果與討論 38
4.1 聚苯乙烯球490 奈米 38
4.1.1 奈米球自組裝排列 38
4.1.2 二維奈米金屬陣列 41
4.1.2.1 奈米球遮罩試片直接蒸鍍金薄膜 41
4.1.2.2 RIE蝕刻奈米球遮罩試片 45
4.1.3 二維金屬奈米陣列退火 49
4.1.4 薄膜沈積角度的影響 51
4.1.5 金薄膜厚度探討 53
4.2 聚苯乙烯球1010奈米 55
4.2.1 奈米球自組裝排列 56
4.2.2 二維奈米金屬陣列 60
4.2.3 二維金屬奈米陣列退火 60
4.2.4 金球結構縮小 61
4.2.4.1 金薄膜沈積角度的影響 62
4.2.4.2 溫度、時間調控與結構變化 66
第五章　結論 75
參考文獻 78

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