(3.236.214.19) 您好!臺灣時間:2021/05/06 22:07
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果

詳目顯示:::

我願授權國圖
: 
twitterline
研究生:吳府欣
研究生(外文):Fu-Hsin Wu
論文名稱:以陽極氧化技術備製之奈米材料及其光學特性研究
論文名稱(外文):Synthesis and optical properties of nano-structured anodic oxides
指導教授:黃智賢黃智賢引用關係
指導教授(外文):Jih-Shang Hwang
學位類別:碩士
校院名稱:國立臺灣海洋大學
系所名稱:光電科學研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:74
中文關鍵詞:陽極氧化氧化鋁二氧化鈦氧化鋅氧化銅
外文關鍵詞:anodic oxideAl2O3TiO2ZnOCuO
相關次數:
  • 被引用被引用:0
  • 點閱點閱:141
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
奈米科技是目前科學領域中廣泛被研究的主題,其中由於陽極氧化技術屬於常溫製程,擁有製程容易,成本低且可大面積製造等優點,近年來更是被討論的重點。其中較為人所知的,包含陽極氧化鋁(Anodic Aluminum oxide, AAO)所形成的整齊排列孔洞陣列,常被用來當奈米製程的樣板(template)使用,相信在未來的半導體製程中將具有相當程度的重要性。此外,以陽極氧化技術所形成的二氧化鈦奈米管陣列,也被開發並應用於太陽能源的轉換。
本論文主要是探討以陽極氧化技術在不同金屬材料下合成奈米的結構的氧化物,所以分別就鋁、鈦、銅、鋅四種金屬為陽極基材,控制陽極處理的變數(外加偏壓、電解液、操作時間)以合成不同形貌的奈米尺度的生成物。前半部份主要是根據相關文獻重新建構氧化鋁(Al2O3)、二氧化鈦(TiO2)奈米材料,後半部份期望嘗試合成氧化銅(CuO)、氧化鋅(ZnO),最後以掃描式電子顯微鏡(Scanning Electron Microscope ,SEM)、螢光激發光譜儀(Photoluminescence ,PL)、陰極激發光譜儀(Cathodoluminescence ,CL)、X光繞射儀(X-RAY Diffraction ,XRD)、場發射(Field Emission ,FE)等相關光電設備,探討其生成物的形貌與光學特性。
Subjects related to nano-technology have been widely studied recently. Among them, the technique of anode oxidation is getting more attention because of its advantages in simplicity, low cost and easy mass production at room temperature. The well known anodic aluminum oxide (AAO), with ordered nano-hole array formed by anode oxidation on aluminum, was often used as a template in nanofabrication, which is believed to play an important role in future semiconductor processing. Likewise, anodic oxidation on titanium forming array of titanium dioxide nanotubes was recently developed and applied to solar energy conversion.
The present study aims at applying the anode oxidation technique to different metals in order to synthesize metal oxides with nano-structures. The experiment uses aluminum, titanium, copper, and zinc as the anode substrates, and controls the variables, such as, external bias, electrolyte, processing time, to synthesize different forms of nano-products. Firstly, in the thesis, research efforts were devoted to reconstruct the well known nano-materials of Al2O3 and TiO2. Following the experiences, anodic oxidations on copper and zinc for nano-structured copper oxide and zinc oxide were successfully attained. Finally, the morphologies and optical properties of the developed nano-structured oxides were investigated using a scanning electron microscope (SEM), and equipments photoluminescence (PL), cathodoluminescence (CL), x-ray diffraction (XRD), and field emission (FE).
摘要 III
ABSTRACT IV
目錄 VI
圖目錄 XI
第一章 緒論 - 1 -
第二章 基本原理 - 5 -
2-1陽極氧化鋁基本特性與成長機制 - 5 -
2-1-1陽極氧化鋁基本特性 - 5 -
2-1-2陽極氧化鋁的形貌 - 6 -
2-1-3多孔氧的形成 - 8 -
2-1-4影響氧化鋁的成長參數 - 10 -
2-2陽極氧化鈦的基本特性與形成機制 - 13 -
2-3氧化銅與氧化鋅的基本特性 - 14 -
第三章 實驗流程與實驗步驟 16
3.1 鋁之奈米孔洞製作流程 17
3.1.1 基板清洗 17
3.1.2 高溫爐退火 18
3.1.3 電解拋光 19
3.1.4 一次陽極處理 22
3.1.5 蝕刻氧化鋁及二次陽極處理 22
3.2 鈦之奈米結構製作流程 23
3.2.1 基板清洗 23
3.2.2 陽極處理 24
3.3銅之奈米結構製作流程 24
3.3.1 基板清洗 24
3.3.2 陽極處理 24
3.4 鋅的奈米結構製作流程 25
3.4.1基板清洗 25
3.4.2電化學處理 25
3.5儀器與設備 25
3.5.1高溫爐 25
3.5.2掃描式電子顯微鏡 26
3.5.2能量分散光譜儀 29
3.5.3陰極發光光譜儀(Cathodoluminescence,CL) 29
3.5.4 X-ray光譜儀(XRD) 30
3.5.5場發射量測系統(Field Emission System) 32
3.5.6 PL光譜儀 36
3.5.7快速加熱製程RTP系統 37
第四章 結果與討論 39
4-1陽極氧化鋁的奈米結構 39
4-1-1氧化鋁SEM形貌 40
4-1-2陽極氧化鋁討論 43
4-2鈦的陽極氧化結構 43
4-2-1以陽極氧化方式於鈦表面SEM形貌 44
4-2-2陽極氧化鈦討論 46
4-3銅的陽極氧化結構 47
4-3-1以陽極氧化於銅表面SEM形貌 47
4-3-2陰極發光光譜(Cathodoluminescence ,CL) 57
4-3-3微區能量分散光譜(EDX) 58
4-3-4 X光繞射 59
4-3-5場發射特性 60
4-3-5陽極氧化銅片討論 61
4-4鋅的電化學結構 62
4-4-1鋅電化學處理SEM表面形貌 62
4-4-2 PL量測結果 63
4-4-3 電化學合成氧化鋅討論 65
第五章 結論 67
參考文獻 69
[1]H. W. Kroto, J.R. Heath, S. C. O’Brien, R. F. Curl, R.E.Smalley,”C60:Buckminsterfullerene,”Nature(London),318,162,(1985)
[2]S. Iijima, “Helical microtubules of graphitic carbon,” Nature, 354,(1991).
[3] J. X. Zhou, M. S. Zhang, J. M. Hong, Z. Yin, Solid State Communications 138, 242(2006)
[4] M. Hayashi, L. Thomas,Y. B. Bazaliy, C. Rettner, R. Moriya, X. Jiang,S. P. Parkin, Physical Review Letters 96, 197207(2006)
[5] Z. Y. Wang, Z. B. Zhao, J. S. Qiu, Progress in Chemistry 18,563(2006)
[6] Javey A, Guo J, Wang Q, Lundstrom M, Dai HJ, NATURE 424 (6949):654-657 AUG 7 2003
[7] Meyer C, Elzerman JM, Kouwenhoven LP, NANO LETTERS 7 (2):295-299 FEB 2007
[8]Uhlir, A. ,”Electrolytic shaping of germanium and silicon. Bell System TECH”J,.1956.35:p.333-347(1956).
[9]F. Keller, M. S. Hunter, and D. L. Robison, “Structural feature of oxide coatings on aluminium,” J. Electrochem soc.100,411(1953).
[10]V. Lecmann, H. Foll, J, “Formation mechanism and properties of electrochemicall etched trenches in n-type silicon,” J. Eelectrochem Soc. 137 (1990).
[11] C. T. Kresge, M.E. Leonowicz, W. J. Roth, J. . Vartuli, J. S. Beck, ”Ordered Mesoporous molecular sieves synthesized by a Liquid-Crystal Template Mechanism,” Nature. 359 710-712(1992).
[12] O’Sullivan J. P. and G. C. Wood, “Nucleation and growth of porous anodic films on aluminum”, Proc. R. Soc. A317,511(1970).
[13]Thompson G. E., R. C. Furneaus, G. C. Wood, J. A. Richardson and J. S. Goode, “Nucleation and growth of porous anodic films on aluminum” ,Nature 272,433(1978).
[14]H. Masuda and F. Fukuda ,”Ordered metal nano-hole arrays made by a two-step relication of honeycomb structures of anodic alumina”, Science 268,1466(1995).
[15] Gopal K. Mor, Karthik Shankar, Maggie Paulose, Oomman K. Varghese, and Craig A. Grimes, in: Use of Highly-Ordered TiO2 Nanotube Arrays in Dye-Sensitized Solar Cells, Nano Lett., 215 (2006).
[16] Jessensky, F. Muller, and U. Gosele, Appl. Phys. Lett. 72, 1173 (1998)
[17] T. Kyotani, L. F. Tsai, and A. Tomita, Chem. Mater. 8, 2109 (1996)
[18] Y. Li, G. W. Meng, L. D. Zhang, and F. Phillipp, Appl. Phys. Lett. 76, 2011 (2000).
[19]D. Routkevitch, T. Bigioni, M. Moskovits, and J. M. Xu, J. Phys. Chem. 100, 14037 (1996).
[20]http://www.pcworld.com/article/id,135683-pg,1/article.html
[21]G.E. Thompson and G.C. Wood,”Porous andic film formation on aluminium” ,Nature 290,230(1981).
[22] H. Masuda, K. Yasa, A. Osaka, “Self-Ordering of cell configuration of anodic porous alumina with large size pore in phosphoric acid solution,” Jpn. J. Appl. Phys.37(1998).
[23] H. Masuda, F. Hasegwa, S. Ono, “Self-ordering of cell arrangement of anodic pororus alumina formed in sulfuric acid solution,” J. Electrochem. Soc. 144,L127(1997).
[24]G. E. Thompson, “Porous anodic alumina:fabrication, characterization and application” ,Thin solid films 297,192(1997)
[25]D. Gong, C. A. Grimes, O. K. Varghese, W. C. Hu, R. S. Singh, Z. Chen, and E. C. Dickey, J. Mater. Res. 16, 3331 (2001)
[26]D. Velten, V. Biehl, F. Aubertin, B. Valeske, W.Possart, J. Breme, in: Preparation of TiO2 layers on cp-Ti and Ti6Al4V by thermal and anodic oxidation and by sol-gel coating techniques and their characterization.
[27]Zeng H. C.,Liu S.M. , Gan L. M. , Liu L. H.,Zhang W.D.Chem.Mater. 2002,14,1391
[28] Kasuga T., Hiramatsu M., Hoson A., Sekin T., Niihara K. Adv. Mater. 1999,11,1307
[29] 劉茂煌 工業材料雜誌201期 2002
[30] 王志光 工業材料雜誌201期 2002
[31]Fujishima, K. Honda, Nature 238 (1972) 37.
[32]J. T. Remillard, J.R. McBride, K.E. Nietering, A.R. Drews, X. Zhang, J.Phys. Chem. B 104 (2000) 4440.
[33]A.I. Kingon, J.P. Maris, S.K. Steiffer, Nature 406 (2000) 1032
[34] Satoshi Kaneco, Yongsheng Chen, Paul Westerhoff and John C.Crittenden, in: Fabrication of uniform size titanium oxide nanotubes:Impact of current density and solution conditions, Scripta Materialia 56, 373 (2007)
[35]H.-D. Speckmann, M.M. Lohrengel, J.W. Schultze, H.-H. Strehblow, Ber. Bunsenges. Phys. Chem. 89 (1985) 392-402.
[36]M.M. Lohrengel, J.W. Schultze, H.D. Speckmann, H.-H. Strehblow , Electrochim. Acta 32 (5) (1987) 733-742.
[37]J. Kunze, V. Maurice, L.H. Klein, H.-H. Strehblow, P. Marcus, Corros. Sci. 46 (2004) 245-264.
[38] A. Nakamura, T. Ohashi, K.Yamanoto, J. Ishihara, T.Aoki, and J. Temmyo, H.Gotoh,Appl. Phys. Lett. 90,093512(2007)
[39] Zhenling Wang, Cuikun Lin, Xiaoming Liu, Guangzhi Li, Yan Luo, Zewei Quan, Hongping Xiang, and Jun Lin J. Phys. Chem. B 2006,110,9469-9476.
[40] X. Y. Kong and Z. L. Wang, Nano Lett. 3, 1625 (2003).
[41] P. Yang, H. Yan, S. Mao, R. Russo, J. Johnson, R. Saykally, N. Morris, J.Pham, R. He, and H. Choi, Adv. Funct. Mater. 12, 323 (2003).
[42] X. Y. Zhang, J. Y. Dai, H. C. Ong, N. Wang, H. L. Chan, and C. L. Choy, Chem. Phys. Lett. 393, 17 (2004); B. Liu and H. C. Zeng, J. Am. Chem. Soc. 125, 4430 (2003).
[43] http://140.117.32.195/NOEMDP/ch-apparatus.htm
[44] A. Modinos, “Field, Thermionic, and Secondary Electron Emission Spectroscopy”, Plenum Press, New York (1984).
[45] HONG XIAO著,羅正忠、張鼎張 譯,半導體製程技術導論。
[46] K. Vanheusden, W. L. Warren, C. H. Seager, D. R. Tallant, J. A. Voigt,B.E. Gnade, J. Appl. Phys. 79 (1996) 7983.
[47] Y. I. Alivov, A. V. Chernykh, M. V. Chukichev, R. Y. Korotkov, Thin Solid Film 473, 241(2005)
[48] 郭奇文 ”奈米氧化鋅的成長與應用” , 94年6月
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
無相關期刊
 
系統版面圖檔 系統版面圖檔