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研究生:許峻豪
研究生(外文):Chun-Hao Hsu
論文名稱:軟性電子元件與噴墨技術之開發與應用
論文名稱(外文):The Development and Application of Inkjet-Printing Based Soft Electronics
指導教授:吳文中
指導教授(外文):Wen-Jung Wu
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:工程科學及海洋工程學研究所
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:144
中文關鍵詞:pressure sensorOTFTP3HTcarbon blackPEDOTPVP
外文關鍵詞:pressure sensorOTFTP3HTcarbon blackPEDOTPVP
相關次數:
  • 被引用被引用:1
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隨著有機材料與製程設備的發展,軟性電子領域已有成熟的商品發表,基於有機材料的製程溫度、軟性基板的低溫製程需求與低成本考量,溶液製程廣為使用,尤其以噴墨製程搭配roll-to-roll製程方式,被視為最具潛力的製程方式。
本論文中,為了提昇製程環境,自製氮氣手套箱,水氣濃度小於20%,具有自動循環與手動功能,依據實驗需求自行使用切換手套箱運作功能。並且在手套箱內自製一台噴墨系統,結合氣壓控制系統、雙軸馬達平台定位系統、壓電驅動系統、觀測系統已達到高良率與高穩定性製程。
使用噴墨系統製作全噴墨有機薄膜電晶體(Organic thin film transistor, OTFT),手套箱外製作有機薄膜電晶體的電性效能,電流開關比=2.7×103,電子漂移率=0.31cm2/Vs,Vth=-3.5V;手套箱內製作有機薄膜電晶體的電性效能,電流開關比=3.5×103,電子漂移率=0.39cm2/Vs,Vth=-27V。採用噴墨製程與滴定製程製作有機薄膜壓力感測器,本論文研究壓力與元件撓曲的應變對元件的電阻值變化,針對一系列濃度與厚度的探討,得到最高靈敏度的元件製程參數。
With the advancement of the organic electronic material and appliance, there are some products in flexible electronics. Consider the process temperature of the organic material, the low temperature processing requirements for the plastic substrate and low cost, the solustion process was used extensively and the inkjet printing process and roll to toll process are best candidate for developmenting the flexible electronics.
In the thesis, in order to improve the environment, the nitrogen glove box with lower than 20% moisture, autocycle and manual control was fabricated. The function can be chose according the experiment. The inkjet printing system with high performance and stability was integrated with pneumatics controller system, two-axis motor stage with alignment system, piezoelectric driver system and observation system.
The organic thin film transistor was made by the inkjet print system and the thin film pressure sensor was made by the inkjet print system and drop coating. About the performance of the OTFT, Ion/off = 2.7×103, the mobility = 0.31 cm2/Vs and ,Vth=-3.5 V out of the glove box and Ion/off = 3.5×103, the mobility = 0.39 cm2/Vs and ,Vth=-27 V in the glove box. About the thin film pressure sensor, the resistance change with the pressure and the curvature of radius was studied, and the sensivite fabricating parameter was found based series concentration and thickness.
目錄
致謝 i
中文摘要 ii
Abstract iii
目錄 iv
圖目錄 vii
表目錄 vii
第1章 緒論 1
1.1. 前言 1
1.2. 研究動機 8
1.3. 論文架構 8
第2章 有機薄膜電晶體改良與壓力感測器 10
2.1 改善電極傳導性 10
2.2 絕緣層材料 18
2.2.1. 無機介電材料 18
2.2.2. 聚合介電材料 20
2.2.3. 有機與無機混合材料 31
2.2.4. 自組裝單體與多層材料 34
2.3 改善PVP層 37
2.4 雙層絕緣層 39
2.5 不同溶劑改善半導體層特性 43
2.6 提昇P3HT的導電性 45
2.7 鈍化層 46
2.8 壓力感測器 48
第3章 自製研發系統 56
3.1. 噴墨製程機台 56
3.1.1. 噴墨系統 59
3.1.2. 雙軸馬達平台定位系統 64
3.1.3. 觀測系統 70
3.1.4. 噴墨圖形繪製 74
3.2. 手套箱介紹 79
3.2.1. 壓克力手套箱 79
3.2.2. 真空手套箱 80
3.2.3. 厭氧手套箱 82
3.2.4. 自製手套箱系統 82
3.3. 壓力感測器載台製作 89
3.4. 量測儀器與製程設備 92
第4章 有機薄膜壓力感測器與有機薄膜電晶體製作 96
4.1 有機薄膜壓力感測器 96
4.1.1 軟性基板材料 97
4.1.2 指叉電極 98
4.1.3 壓力感測層 100
4.2 有機薄膜電晶體 104
4.2.1. 有機薄膜電晶體製作 104
4.2.2. 有機薄膜電晶體電性提昇 110
第5章 有機薄膜壓力感測器與有機薄膜電晶體的結果與討論 119
5.1 有機薄膜壓力感測器 119
5.1.1. 壓力與有機薄膜壓力感測器阻值變化 119
5.1.2. 曲率半徑與有機薄膜壓力感測器阻值變化 126
5.2 有機薄膜電晶體 128
5.2.1 製作環境對有機薄膜電晶體的電性影響 128
5.2.2 有機薄膜電晶體的絕緣層測試結果 130
第6章 結論與未來展望 132
6.1 結論 132
6.2 未來展望 133
附件 134
Reference 137
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