臺灣博碩士論文加值系統

摘要
由於電子半導體業之蓬勃發展，精密定位研究逐漸受到各界的重視，欲達到次微米/奈米等級之精密定位，壓電材料成為當前機械結構設計人員首選對象，也因此壓電材料在這波熱潮中水漲船高。
然而壓電材料本身的限制，難以達到同時具備長行程驅動且精密定位雙重功效。因此精密定位設計者，普遍採用長行程粗位移平台與短行程微定位平台加以組合，以達到精密定位之需求。而本實驗室開發之高精度共平面平台乃採用超音波馬達作為致動器，此致動器同時具備長行程的共振彎曲模態驅動及精密位移的伸長模態驅動，透過此方式可簡化定位平台機械結構的複雜化，以提高定位精度。
而本研究是針對本實驗室所開發之共平面平台，透過個人電腦以BCB (Borland C++ Builder)開發一套奈米定位系統，並輔以NI DAQ裝置進行定位。在超音波馬達各位置摩擦力變動的情形下以自調式類神經PID控制器進行速度控制，達到精密定位控制之功效。

關鍵詞：超音波馬達、高精度共平面平台、自調式類神經PID控制器。

Abstract
As electronic semiconductor industry is booming, precision positioning is getting more and more attention. In order to achieve precise positions on submicrometer/nanometer levels, piezoelectric material becomes mechanism designer''s first choice. As a result, the piezoelectric material becomes more and more valuable.
However Piezoelectric Material has a problem that it could not reach long distance and precision positing at the same time. Therefore, mechanism designer mostly use long range moving stage to combine piezoelectric material to achieve precision positing.
The co-planar using ultrasonic motor as the actuator is made from NTU. Its bending mode can reach long range driving distance; and its longitudinal mode accomplishes precision positing. By using ultrasonic motor as the actuator, stage mechanism is simplified and positioning accuracy is improved.
This research proposes a PC-Based positioning system with BCB (Borland C++ Builder) software and DAQ (Data Acquisition) Device on the co-planar stage. On varied friction, we use self-tuning neuro-PID controller to control velocity to achieve the demand of nano positioning control.


Keywords： Ultrasonic Motor, Co-planar, Self-tuning Neuro-PID Controller

目錄
致謝 i
摘要 ii
Abstract iii
目錄 iv
圖目錄 vii
表目錄 x
第一章 緒論 1
1.1 研究緣起與目的 1
1.2 相關文獻回顧 3
1.2.1 奈米定位平台之發展 3
1.2.2 雷射干涉儀之發展 5
1.2.3 超音波馬達之發展 9
1.2.4 超音波馬達控制之發展 10
1.3 論文架構 11
第二章 超音波馬達之原理與驅動 13
2.1 超音波馬達之壓電效應原理介紹 13
2.1.1 壓電效應原理介紹 13
2.1.2 壓電伸致微動平台介紹 15
2.2 超音波馬達種類介紹 16
2.2.1 一般超音波馬達 18
2.2.2 Nanomotion超音波馬達 20
2.3 超音波馬達HR4之原理介紹 21
2.4 超音波馬達驅動器AB2 Driver介紹 26
2.4.1 AB2 Driver介紹 26
2.4.2 AB2 Driver驅動模式說明 27
第三章 自調式類神經PID控制理論 30
3.1 PID控制器 30
3.1.1 類比PID控制原理 31
3.1.2 數位PID控制原理 33
3.2 類神經網路理論 34
3.2.1 概論 34
3.2.2 類神經網路簡介 37
3.2.3 倒傳遞類神經網路 38
3.3 自調式類神經PID控制 42
第四章 基本運動控制之模擬與擬定 46
4.1 超音波馬達HR4之模型推導 46
4.1.1 超音波馬達共振頻率推導 46
4.1.2 超音波馬達等效模型建立 49
4.1.3 超音波馬達驅動情形模擬 51
4.2 定位系統架構及基本定位方法設計 54
4.2.1 定位系統架構 54
4.2.2 位移感測器訊號傳輸 57
4.2.3 定位驅動程序 59
4.2.4 基本定位方法設計 60
第五章 實驗結果 65
5.1 實驗設備與實驗設計 65
5.2 AC Mode 速度控制結果 66
5.3 Gate Mode 驅動結果 71
第六章 結論與未來展望 77
6.1 結論 77
6.2 討論 77
6.3 未來展望 77
參考文獻 79
附錄A 84

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