臺灣博碩士論文加值系統

硫化鋅-二氧化矽(ZnS-SiO2)複合陶瓷在本實驗中，以熱壓法於1060℃溫度且真空下進行燒結，並以不同之壓力控制獲得不同密度之材料，並與添加0.5-5 wt%之氧化鋅(ZnO)之試片相互比較陶瓷顯微組織、介電性質以及熱震性質之變化。ZnS-SiO2介電常數隨燒結密度增加而上升呈一線性關係，在13.56 MHz頻率測得之介電常數為6.3 ~ 8.03，高於Bruggeman及Lichtenecker方程式估算之結果，是由於奈米級細晶粒造成晶界表面積增加所致。添加ZnO之試片密度未如預期產生液相燒結效果而獲得提升，而與二氧化矽(SiO2)反應生成willemite(Zn2SiO4)相。添加0.5 ~ 5 wt%之氧化鋅(ZnO)在二氧化矽表面形成奈米級willemite相，使介電常數高於未添加之ZnS-SiO2陶瓷。本研究並利用熱震參數R''及R''之計算，估計ZnS-SiO2陶瓷的熱震行為，與熱震殘留強度結果相互符合，其不同溫度下之斷面型態由穿晶轉變成沿晶破壞是影響強度下降的因素。ZnO的添加使得ZnS-SiO2陶瓷界面強度獲得提升，而添加1% ZnO試片的破裂韌性增加且熱震參數值最高，因此有較好的抗熱震能力。

Zinc oxide- silicon dioxide (ZnS-SiO2) composite is prepared by hot press at 1060℃ in vacuum. Various pressures are used to obtain samples of different densities. A linear relationship is observed between dielectric permittivity and sintering density. The measured permittivity at 13.56MHz frequency is found to range from 6.3 to 8.03 which are higher than the estimated values for composite materials by the Bruggeman and Lichtenecker equations. The large grain boundary area arising from nano-size grains contributes to the increase of permittivity. Specimens with additions of 0.5-5 wt% zinc oxide are also made to compare with non-ZnO added specimens. ZnO appears to decrease the density of specimens slightly. However, ZnO addition can stabilize the high temperature ZnS phase. Additions of zinc oxide also increase the permittivity by forming nano-size Zn2SiO4 willemite phase at the surfaces of SiO2 particles. Thermal shock behaviors of these samples are also studied. The thermal shock parameters R'' and R'' are calculated, and they correspond well with the retained strength after thermal shock. Decrease of strength is caused by transfer of intragranular to intergranular fracture. Addition of zinc oxide can improve the interface strength of zinc sulfide-silicon dioxide composite ceramics. 1% zinc oxide added specimen demonstrates the best thermal shock resistance due to the balance between fracture toughness and interface strength.

摘　要 i
英文摘要 ii
誌 謝 iii
目 錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1 前言 1
1.2 研究動機 1
1.3 研究目的 4
第二章 文獻回顧與理論基礎 5
2.1 靶材種類與製備 5
2.1.1 靶材種類 5
2.1.2 靶材製備方法 5
2.2 複合材料介電常數估算方程式 12
2.2.1 Litchtenecker 方程式 12
2.2.2 Bruggeman 方程式 14
2.3 熱腐蝕原理與應用 16
2.4 材料熱震行為理論 18
2.4.1 熱震斷裂理論 18
2.4.2 熱震損害理論 19
2.5實驗規劃 20
第三章 實驗設備及步驟 22
3.1 實驗材料與儀器設備 22
3.1.1 實驗材料 22
3.1.2 儀器設備 22
3.2 實驗流程圖 23
3.2.1 粉末混合 24
3.2.2 熱壓燒結 24
3.3 材料分析 24
3.3.1 XRD相分析 24
3.3.2 密度量測 24
3.3.3 介電常數量測 25
3.3.4 熱腐蝕 25
3.3.5 熱震強度量測 26
3.3.6 硬度量測 26
3.3.7 破裂韌性量測 26
3.3.8 SEM觀察 27
第四章 結果與討論 28
4.1介電性質分析 28
4.1.1 XRD分析 28
4.1.2 熱腐蝕SEM綜合比較 33
4.1.3 介電常數與頻率之關係 38
4.1.4 介電常數與密度之關係 41
4.2熱震性質分析 46
4.2.1硬度與破裂韌性分析 46
4.2.2熱震強度與斷面分析 48
4.2.3熱震參數R''及R''分析 63
第五章 結論 65
參考文獻 67

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