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研究生:李承勳
研究生(外文):Cheng-Shiun Lee
論文名稱:CMOS-MEMS磁通閘磁力計之驅動電路與晶片設計
論文名稱(外文):Designs of Driving Circuit and Chip Layout for the CMOS-MEMS Fluxgate Magnetometer
指導教授:呂志誠鄭振宗鄭振宗引用關係
口試委員:吳秋賢陳昭翰
口試日期:2008-07-25
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:機電整合研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:75
中文關鍵詞:磁通閘磁量計CMOS-MEMS感測器
外文關鍵詞:fluxgate magnetometerCMOS-MEMS sensor
相關次數:
  • 被引用被引用:9
  • 點閱點閱:385
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
本研究使用纏繞線圈於磁透合金上方式製作雙磁蕊式磁通閘感測元件,研究磁通閘感測元件之原理及軟磁材料之磁性特性,探討激發電流頻率與振幅變化對感測器軟磁蕊之磁滯曲線與及感測器輸出電壓的影響,並設計回授驅動電路,提高磁通閘磁量計量測磁場的線性度和靈敏度,且量測磁量計之雜訊和磁場-頻率變化輸出響應並探討其雜訊問題,並利用磁通閘磁量計做地磁的量測,以驗證其對於量測直流磁場之可行性。
此外將利用CMOS-MEMS製程設計微小化之磁通閘磁量計,之後整合磁控濺鍍磁性薄膜後製程,並設計最佳參數,以提供符合元件所需之磁性薄膜,其結果提將有助於開發高線性晶片式之磁通閘感測元件,對於未來各種應用具有重要的價值。
In this paper we design a double-rod fluxgate magnetometer, and study the principle of the fluxgate magnetometer and the magnetic characteristics of soft magnetic material. We also design a feedback driving circuit, which can enlarge the detectable range and improve the linearity of the device. To disuse the noise problem of the device, we measure the noise of the fluxgate magnetometer. Furthermore, we measure the geomagnetic field by using our device to demonstrate its capability in sensing the dc magnetic fields. Besides, we design the miniature fluxgate magnetometer and manufacture by use of CMOS-MEMS process. For integration with the post-process, we also investigate the deposition condition for the magnetic thin film with the magnetron sputtering to optimize the parameter of the planar fluxgate device. Our results are valuable in developing the small single-chip fluxgate magnetometer with high linearity, which is important for many practical applications.
摘 要 i
誌 謝 iii
目 錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1 研究背景 1
1.2 研究動機與目的 2
1.3 文獻回顧 3
第二章 原理與方法 7
2.1 原理 7
2.1.1 磁性材料 7
2.1.1.1 磁滯曲線介紹 7
2.1.1.2 軟磁材料選擇 8
2.1.2 磁通閘感測元件之原理 9
2.2 實驗方法 17
2.2.1 磁滯曲線量測 17
2.2.1.1 量測系統與方法 17
2.2.1.2 數據之校正 18
2.2.2 繞線式磁通閘磁量計 20
2.2.2.1 繞線式磁通閘感測元件之研製 21
2.2.2.2 驅動電路設計與特性分析 23
2.2.2.3 磁場-電壓轉移率校正 25
2.2.2.4 雜訊量測 27
2.2.2.5 環境磁場量測 28
2.2.3 晶片型磁通閘磁感測元件之研製 30
2.2.4 磁性材料鍍膜 32
第三章 結果與討論 35
3.1 磁滯曲線 35
3.1.2 Ni-Fe-Mo-Mn磁性薄膜之磁滯曲線 38
3.2 繞線式磁通閘磁量計之校正與特性分析 41
3.2.1繞線式磁通閘磁量計之轉移率 41
3.2.2繞線式磁通閘磁量計之雜訊 46
3.2.3 環境磁場量測 48
3.3 晶片型磁通閘感測元件 50
3.3.1平面式磁通閘感測元件特性模擬結果 51
3.3.1.1 激發磁場振幅之模擬 51
3.3.1.2 感應電壓模擬分析 56
3.3.2 操作電路架構設計 59
3.3.3 光罩佈局與晶片測試 61
3.3.3.1光罩佈局 61
3.3.3.2晶片之初步測試 64
第四章 結論與未來展望 69
4.1 結論 69
4.2 未來展望 71
參考文獻 72
[1]Pavel Ripka, "Review of fluxgate sensors," Sensors and Actuators A, vol. 33, 1992, pp. 129-141.
[2]F Primdahl, "The fluxgate magnetometer," J. Phys. E:Sci. Instrum., vol. 12, 1979, pp. 241-253.
[3]Trifon M. Liakopoulos, Chong H. Ahn," A micro-fluxgate magnetic sensor using micromachined planar solenoid coils," Sensors and Actuators A , vol. 77, 1999, pp. 66-72.
[4]R. Gottfried-Gottfried, W. Budde, R. Jahne, H. Kuck, B. Sauer, S. Ulbricht, U. Wende, "A miniaturized magnetic-field sensor system consisting of a planar fluxgate sensor and CMOS readout circuitry," Sensors and Actuators A, vol. 54, 1996, pp. 443-447.
[5]James Lenz and Alan S. Edelstein, "Magnetic Sensors and Their Applications," IEEE sensor journal, vol. 6, no. 3, 2006, pp. 631-649.
[6]Thomas Seitz, “Fluxgate Sensor in Planar Microtechnology,” Sensors and Actuators, A21 -A23, 1990, pp. 799-802.
[7]http://core2.gsfc.nasa.gov/research/purucker/encyclopedia/magsat/MAGSAT.pdf
[8]Frank Collar, Peter Fenning and Carlos Mora, “Application of drillhole vector magnetic measurements to resolvethe position of existing underground structures,” NDT&E International, vol. 38, 2005, pp. 231–236.
[9]S. Kumar et al, “Real-Time Tracking Magnetic Gradiometer for Underwater Mine Detection,” IEEE Quantum Magnetics , 2004, pp. 874-878.
[10]A. Sarris, E. Athanassopoulou, A. Doulgeri-Intzessiloglou, Eu. Skafida AND J. Weymouth, “Geophysical Prospection Survey of an Ancient Amphorae Workshop at Tsoukalia, Alonnisos (Greece),” Archaeol. Prospect, vol. 9, 2002, pp.183–195.
[11]Jose’Chilo, Abbas Jabor, Ludwik Lizska, A˚ ge J. Eide, Thomas Lindblad, “Obtaining “images” from iron objects using a 3-axis fluxgate magnetometer,” Nuclear Instruments and Methods in Physics Research A, vol. 580, 2007, pp. 1105–1109.
[12]Pavel Ripka, “Advances in fluxgate sensors,” Sensors and Actuators A, vol. 106, 2003, pp. 8-14.
[13]Yong-Hui Cao, Xiu-Hua Shi, Hui Xu, “Application of Integrated Fluxgate Magnetic and GPS Navigation System in AUV,” Chinese journal of Sensors and Actuators, vol. 18 , no.2, 2005, pp.391-393.
[14]Junichi Shimada, T, Kazuhiro Itoh, Satoshi Yamaguchi, Atsushi Nishikawa, Fumio Miyazaki, “Magnetic navigation system for surgery of the pig lung partial resection with thoracoscopic transbronchial marking,” International Congress Series, vol. 1281, 2005, pp. 752–755.
[15]Predrag M. Drljaˇca, Pavel Kejik, Franck Vincent, Dominique Piguet, François Gueissaz, Radivoje S. Popovi′c, “symmetrical core improves micro-fluxgate sensors,” Sensors and Actuators A, vol. 110, 2004, pp. 236–241.
[16]Andrea Baschirotto, Enrico Dallago, Piero Malcovati, Marco Marchesi, and Giuseppe Venchi, “A Fluxgate Magnetic Sensor: From PCB to Micro-Integrated Technology,” IEEE Transactions on Instrumentation and Measurement, vol. 56, no. 1, 2007, pp. 25-31,.
[17]A. Tipek, P. Ripka, Terence O’Donnell, J. Kubik, “PCB technology used in fluxgate sensor construction,” Sensors and Actuators A, vol. 115, 2004, pp. 286–292.
[18]Jan Kubík, Lukáˇs Pavel, Pavel Ripka and Petr Kaˇspar, “Low-Power Printed Circuit Board Fluxgate Sensor,” IEEE Sensors Journal, vol. 7, no. 2, 2007, pp. 179-183.
[19]J. Kubík, L. Pavel, P. Ripka, and P. Kaˇspar, “Low-power PCB fluxgate sensor,” in Proc. IEEE Sensors 2005, Irvine, CA, 2005, pp. 432–435.
[20]S. O. Choi, S. Kawahito, Y. Matsumoto, M. Ishida, and Y. Tadokoro, “An integrated micro fluxgate magnetic sensor,” Sens. Actuators A, vol. 55, 1996, pp. 121–126.
[21]L. Chiesi , P. Kejik, B. Janossy, R.S. Popovic “CMOS planar 2D micro-fluxgate sensor,” Sensors and Actuators, VOL. 82, 2000, pp. 174–180.
[22]P. Ripka, S. Kawahito, S. O. Choi, A. Tipek, and M. Ishida, “Microfluxgate sensor with closed core,” Sens. Actuators A, vol. 91, 2001, pp. 65–69.
[23]S. Kawahito, A. Cerman, K. Aramaki, and Y. Tadokoro, “A weak magnetic field measurement system using micro-fluxgate sensors and delta-sigma interface,” IEEE Trans. Instrum. Meas., vol. 52, no. 1, 2003, pp. 103–110.
[24]Shoji Kawahito, Christoph Maier, Michael Schneider, Martin Zimmermann, and Henry Baltes, “A 2-D CMOS Microfluxgate Sensor System for Digital Detection of Weak Magnetic Fields.” IEEE Journal of Solid-State Circuits, vol. 34, no. 12, 1999, pp.1843 – 1851.
[25]Andrea Baschirotto, Enrico Dallago, Piero Malcovati, Marco Marchesi, Enrico Melissano, Pietro Siciliano and Giuseppe Venchi, “An Integrated Micro-Fluxgate Magnetic Sensor with Sputtered Ferromagnetic Core,” Instrumentation and Measurement Technology Conference, Sorrento, Italia,, 2006, pp. 2045-2049.
[26]Predrag M. Drljaˇca, Pavel Kejik, Franck Vincent, Dominique Piguet, François Gueissaz, Radivoje S. Popovi′c, “Single core fully integrated CMOS micro-fluxgate magnetometer,” Sensors and Actuators A, vol. 110, 2004, pp. 236–241.
[27]Predrag M. Drljaca, Pavel Kejik, Franck Vincent, Dominique Piguet, and Radivoje S. Popovic, “Low-Power 2-D Fully Integrated CMOS Fluxgate Magnetometer,” IEEE Sensors Journal, vol. 5, no. 5, 2005, pp. 909-915.
[28]Pavel Ripka, “New directions in fluxgate sensors”, Journal of Magnetism and Magnetic Materials, vol. 215-216, 2000, pp.735-739.
[29]Fritz Primdahl, “The fluxgate mechanism,part:The gating curves of parallel and orthogonal fluxgates,IEEE Transations on Magnetics, vol. MAG-6, no. 2, 1970, pp. 376-383.
[30]http://geomag.usgs.gov/
[31]P.I. Nikitin et al, “Deposition of thin ferromagnetic films for application in magnetic sensor microsystems,” Sensors and Actuators A, vol. 68, 1998 , pp. 442-446.
[32]P. D. Dimitropoulos, “Noise sources in miniature fluxgate sensors Part I: theoretical treatment,” International Journal of Electronics, vol. 92, no. 9, 2005, pp. 499–524.
[33]Sunderarajan S. Mohan, Maria del Mar Hershenson, Stephen P. Boyd, and Thomas H. Lee, “Simple Accurate Expressions for Planar Spiral Inductances,” IEEE Jornal of Solid-State Circuits, vol. 34, no. 10, 1999, pp. 1419-1424.
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