臺灣博碩士論文加值系統

本論文的研究著重於利用奈米碳管優異的場發射特性製作一個兩吋以內的螺旋圖案奈米碳管場發射平面光源以及在照明方面的應用。我們使用數種陰極基板與陰極電極去分析不同參數下的場發射特性，而且運用厚膜網印技術網印不同圖形奈米碳管到陰極基板上也對場發射特性有很大影響，另外我們網印數種不同螢光粉到陽極基板上來增進螢光粉在場發射量測的亮度及均勻性。我們製作二極式、反射式、線條二極式與三極式場發射元件，並比較彼此不同的特性，不論是場發射特性、亮度、均勻性，在本論文內有詳細的描述。在陽極部份，我們可以運用不同的結構、製程與材料，製作出擁有高亮度、均勻性佳、薄型平面的螺旋圖案奈米碳管場發射平面光源，且螺旋圖案奈米碳管場發射平面光源擁有優異的場發射特性，適合多種照明上的應用。

The study of this thesis focuses on the fabrication and investigation of the excellent carbon nanotubes field emission flat light source with a spiral cathode pattern that the diameter is less than 2-inch for lighting application. Several substrates as the cathode and several materials of the electrode have been used in the study for the analysis of characteristics of the parameters. The field emission properties strongly depend on the pattern of the cathode by the method of thick-film printing. We have also used several phosphors as the anode materials to improve the light brightness and uniformity. Some panel structures, such as diode, line diode reflective type diode, and triode structure, have been made and investigated for the comparison. The results of field emission properties, brightness, and uniformity are also shown in the this thesis, and the spiral cathode structure field emission flat light source has very excellent properties, such as high brightness, uniformity, and flexibility in the structure for different lighting application.

致謝 I
英文摘要 II
中文摘要 III
目錄 IV
圖目錄 VI
表目錄 XI
第一章 導論 1
1.1 場發射發展沿革 1
1.2 動機 9
第二章 理論 11
2.1 冷陰極發射原理 11
2.2 輝度 16
2.3 CIE座標 17
第三章 實驗 18
3.1 實驗步驟 20
3.1.1 陰極部分 20
3.1.2 陽極部分 21
3.1.3 量測部分 21
3.2 基板選擇 22
3.3 薄膜製程 23
3.4 厚膜製程 26
3.5 後處理製程 32
3.6 量測系統與其他分析 33
第四章 結果與討論 35
4.1 圖形對場發射特性之影響 36
4.2 陰極電極對場發射特性之影響 54
4.3 後處理對場發射特性之影響 71
4.4 間隔器對場發射特性與亮度之影響 80
4.5 陽極電極對場發射特性與亮度之影響 86
4.6 螢光粉對場發射特性與亮度之影響 90
第五章 結論和未來工作 97
參考文獻 99

[1]R. H. Fowler, L. Nordheim, “Elecyron Emission in Intense Electric Fields”, Mathematical and Physical A, 119, p. 173, 1928.
[2]C. A. Spindt, C. E. Holland, R. D. Stowell, “Recent Progress in Low-Voltage Field-Emission Cathode Development”, J. De Phys., 9, pp. 269-278, 1984.
[3 ]C. A. Spindt, “A thin film field emission cathode”, J. Appl. Phys, 39, pp. 3504-3505, 1968.
[ 4] C. A. Spindt, I. Brodie, L. Ilumphrey, W. R. Westerberg, “Physical propertiese of thin-film field emission cathodes with molybdenum cones”, J. Appl. Phys., 47, pp. 5248-5263, 1976.
[5]J. Koch and G. Keoleian, “Evaluating Environmental Performance: A Case Study in
the Flat-Panel-Display Industry”, Electronics and the Environment, 1995. ISEE.,
Proceedings of the 1995 IEEE International Dymposium, pp. 158-165, 1995.
[6]薛英家, “尖端平面顯示器課程講義”, 國立中興大學精密工程研究所.
[7]N. Liu, Z. Ma, X. Chu, T. Hu, Z. Xue, S. Pang, “Diamond-coated tips and their applications”, J. Vac. Sci. Technol. B, 12, p. 1712, 1994.
[8]A. A. Dadykin, A. G. Naumovets, V. D. Andreev, T. A. Nachalnaya, V. A. Semenovich, “A study of stable low-field electron emission from diamond-like films”, Diamond and Related Materials, 5, p. 771, 1996.
[9]E. S. Kohn, “COLD-CATHODE ELECTRON EMISSION FROM SILICON”, Appl. Phys. Lett., 18, p. 272 ,1971.
[10]R. J. Harvery, R. A. Lee, A. J. Miller, J. K. Wigmore, “Aspects of field emission from silicon diode arrays”, IEEE Trans. Electron Devices., 38, p. 2323, 1991.
[11]A. M. Rao, D. Jacques, R, C, Haddon, W. Zhu, C. Bower, S. Jin, “In situ-grown Carbon Nanotube Array with Excellent Field Emission Characteristics”, Appl. Phys.
Lett., 76, p. 3813, 2000.
[12]S. Iijima, “Helical microtubules of graphitic carbon”, Nature, 354, pp. 56-58, 1991.
[13]C. H. Tsai1, S. P. Chen, G. W. Hsieh, C. C. Liang, W. C. Lin, S. J. Tseng, C. H. Tsai, “Selective carbon nanotube growth on silicon tips with the soft electrostatic forcebonding and catalyst transfer concepts”, Nanotechnology, 16(5), pp. 296-299, 2005.
[14]W.C. Lin, Y.J. Yang, G.W. Hsieh, C.H. Tsai, C.C. Chen, and C.C. Liang, “Selectivelocal synthesis of nanowires on a microreactor chip”, Sensors And Actuators A:Physical, 5283, pp. 1-8, 2006.
[15]D. S. Bethune, C. H. Kiang, M. S. De Vries, G. Gorman, R. Savoy, J. Vazquez, R. Beyers, “Cobalt-caralyzed growth of carbon nanotubes with single-atomic- layerwalls”, Nature, 363, pp. 605-607, 1993.
[16]T. W. Ebbesen, P. M. Ajayan, “Large Scale Synthesis of Carbon Nanotubes”, Nature, 358, p. 220, 1992.
[17]A. Thess, R. Lee, P. Nikolaev, H. J. Dai, P. Petit, J. Robert, C. Xu, Y. H. Lee, S. G. Kim, A. G. Rinzler, D. T. Colbert, G. E. Scuseria, D. Tomanek, J. E. Fisher, R. E. Smalley, “Crystalline Ropes of Metallic Carbon Nanotubes”, Science, 273(5274), pp. 483-487, 1996.
[18]J. Liu, A. G. Rinzler, H. Dai, J. H. Hafner, R. K. Bradley, P. J. Boul, A. Lu, T. Iverson, K. Shelimov, C. B. Huffman, F. Y. Shon, T. R. Lee, D. T. Colbert, R. E. Smalley, “Fullerene Pipes”, Science, 280(5367), pp. 1252-1256, 1998.
[19]Z. F. Ren, Z. P. Huang, J. W. Xu, J. H. Wang, P. Bush, M. P. Siegal, P. N. Provencio, “Synthesis of large arrays of well-aligned carbon nanotubes on glass”, Science, 282, pp. 1105-1107, 1998.
[20]W. Z. Li, S. S. Xie, L. X. Qain, B. H. Chang, B. S. Zou, W. Y. Zhou, R. A. Zhao, G. Wang, “Large-Scale Synthesis of Aligned Carbon Nanotubes”, Science, 274, p. 1701, 1996.
[21]S. Amelinckx, X. B. Zhang, D. Bernaerts, X. F. Zhang, V. Ivanov, J. B. Nagy, “A Formation Mechanism for Catalytically Grown Helix Shaped Graphite Nanotubes”, Science, 265, p. 635, 1994.
[22]S. Fan, M. G. Chapline, N. R. Franklin, T. W. Tombler, A. M. Cassell, H. Dai, “Self-oriented regular arrays of carbon nanotubes and their field emission properties”, Science, 283, p. 512, 1999.
[23]A.G. Rinzler, J.H. Hafner, P. Nikolaev, L. Lou, S.G. Kim, D. Tomanek, P. Nordlander, D. T. Colbert, R. El Smalley, “Unraveling nanotubes: field emission from an atomic wire”, Science, 269(5230), pp. 1550-1553, 1995.
[24]Fan-Guang Zeng, Chang-Chun Zhu, Xinghui, Weihua Liu, YuKui Li, “A novel mechanical approach to improve the field emission characteristics of printed CNT films”, Materials Lett., 60, pp. 2399-2402, 2006.
[25]Yuxiang Qin, Ming Hu, “Effects of microwave plasma treatment on the field properties of printed cabon nanotubes/Ag nano-particles films”, Applied surface science, 254, pp. 1757-1762, 2008.
[26]J. E. Jung, Y. W. Jin, J. H. Choi, Y. J. Park, T. Y. Ko, D. S. Chung, J. W. Kim, J. E. Jang, S. N. Cha, W. K. Yi, S. H. Cho, M. J. Yoon, C. G. Lee, J. H. You, N. S. Lee, J. B. Yoo, J. M. Kim, “Fabrication of triode-type field emission displays with high-density carbon-nanotube emitter arrays”, Phys. B, 323, pp. 71-77, 2002.
[27]Y. M. Wong, W. P. Kang, J. L. Davidson, B. K. Choi, W. Hofmeister, J. H. Huang, “Fabrication of aligned convex CNT firld emission triode by MPCVD”, Diamond and Related Materials, 15, p. 771, 2006.
[28]Hyung Soo Un, Sang Sik Park, “Carbon nanotubes growing on rapid thermal annealed Ni and their application to a triode-type field emission device”, Thin Solid Films, 504, pp. 50-54, 2006.
[29]Woo Jong, Seo Seungho Choi Soonil Lee, Ken Ha Koh, “Facrication of low-gate-current triode field emitters with planar carbon nanoparticle cathodes”, J. Vac. Sci. Technol. B, 22(3), pp. 1294-1297, 2004.
[30]Jin-Shou Hsiao, Chih-Che Kuo, Yao-Zong Chen, Yu-An Li, Jui-Ting Hsu, Shih-Chien Hsiao, Kuo-Hua Chen, Frank Yang, Ming-Chun Ho, Wei-Sheng Hsu, Chi-Hung Hsiao, Kevin Cheng, Cheng-Chieh Kao, Tien-Sung Liu, Kai-Shiuan Chen, David Yeh, Chun-Yen Hsiao, Te-Fong Chan, “Development of Carbon Nanotubes Field Emission Display”, IDMC 07 Digest, pp. 50-52, 2007.
[31]W. Taylor, H. E. Bishop, “FEDs for Large TV Display”, IDMC 07 Digest, pp. 109-112, 2007.
[32]W. B. Choi, D. S. Chung, S. H. Park, J. M. Kim, “A 4.5-inch Fully Sealed Carbon Nanotube-Based Field-Emission Flat-Panel Display”, SID 99 Digest, p. 1134, 1999.
[33]Jin-Shou Hsiao, Chih-Che Kuo, Yao-Zong Chen, Yu-An Li, Jui-Ting Hsu, Shih-Chien Hsiao, Kuo-Hua Chen, Frank Yang, Ming-Chun Ho, Wei-Sheng Hsu, Chi-Hung Hsiao, Kevin Cheng, Cheng-Chieh Kao, Tien-Sung Liu, Kai-Shiuan Chen, David Yeh, Chun-Yen Hsiao, Te-Fong Chan, “Development of Carbon Nanotubes Field Emission Display”, IDMC 07 Digest, pp. 53-57, 2007.
[34]Shy-Wen Lai, Jeng-Maw Chiou, Shu-Hsing Lee, Hung-Yuan Li, Shiao-Fan Wei, Ling-Ko Chang, Jyi-Tsong Lo, “MgO Thin Film Deposition and Secondary Emission Properties of Dynode-FED”, IDMC 07 Digest, pp. 50-52, 2007.
[35]C. C. Lee, B. N. Lin,, M. C. Hsiao, Y. Y. Chang, W. Y. Lin, L. Y. Jiang, “Development of CNT-FED by Printing Method”, SID 05 Digest, 36, pp. 1716-1719, 2005.
[36]T. H. Tsou, M. H. Lin, B. N. Lin, W. Y. Lin, Y. C. Jiang, C. H. Fu, L. Y. Chiang, Y. Y.,Chang, M. C. Hsiao, C. C. Lee, “Reflective Structure for Carbon Nano-TubeBacklight Unit”, IDW/AD 05, pp. 1695-1696, 2005.
[37]楊素華, 藍慶忠, “奈米碳管場發射顯示器”, 科學發展期刊, 382期, pp. 68-71, 2004.
[38]W. B. Choi, D. S. Chung, J. H. Kang, H. Y. Kim, Y. W. Jin, I. T. Han, Y. H. Lee, J. E. Jung, N. S. Lee, G. S. Park and J. M. Kim, “Fully sealed, high-brightness carbon-nanotube field-emission display”, Appl. Phys. Lett., 75, p. 3129, 1999.
[39]Biing-Nan Lin, Ming-Chun Hsiao, Yu-Yang Chang, Wei-Yi Lin, Liang-Yua Jiang, Ming-Hung Lin, Lih-Hsiung Chan, Yau-Chen Jiang, Te-Hao Tsou, Cheng-Chung Lee, “Novel Structure of Carbon Nanotube Backlight Unit”, SID 06 Digest, pp. 71-73, 2006.
[40 ]A. S. Leychenko, M. Yu. Leshukov, N. N. Chadaev, E. P. Sheshin, “Effective Lamp for LCD-Backlightning with the Field Emission Cathode”, IEEE, 4244, pp. 383-386, 2006.
[ 41]M. Yu. Leshukov, N. N. Chadaev, E. P. Sheshin, “Characterizations of light sources with carbon fiber cathodes”, Applied surface science, 215, pp. 260-264, 2003.
[42]M. Yumura, S. Ohshima, K. Uchida, Y. Tasaka, Y. Kuriki a, F. Ikazaki a,Y. Saito,S. Uemura, “Synthesis and purification of multi-walled carbon nanotubes for field emitter applications”, Diamond and Related Materials, 8, p. 785, 1999.
[43]Jean-Marc Bonard, Thomas Sto¨ ckli, Olivier Noury and Andre´ Chaˆ telain, “Field emission from cylindrical carbon nanotube cathodes: Possibilities for luminescent tubes”, Appl. Phys. Lett., 78, p. 2775, 2001.
[44]Biing-Nan Lin, Ming-Chun Hsiao, Yu-Yang Chang, Wei-Yi Lin, Liang-Yua Jiang, Ming-Hung Lin, Lih-Hsiung Chan, Yau-Chen Jiang, Te-Hao Tsou, Cheng-Chung Lee, “Novel Structure of Carbon Nanotubes Backlight Unit”, SID 06 Digest, pp. 71-73, 2006.
[45]Jean-Marc Bonard, Mirko Croci, Imad Arfaoui, Olivier Noury, Debajyoti Sarangi,
Andre Chatelain, “Can we reliably estimate the emission field and field enhancement factor of carbon nanotube film field emitters?”, Diamond and Related Materials, 11, p. 763, 2002.
[46]Martin Sveningsson, Raluca-Elena Morjan, Oleg A. Nerushev, Yoshinori Sato, Joakim Bäckström, Eleanor E.B. Campbell, Frank Rohmund, “Raman spectroscopy and field-emission properties of CVD-grown carbon-nanotube films”, Appl. Phys. A, 73, p. 409, 2001.
[47]Ruiping Gao, Zhengwei Pan, Zhong L. Wang, “In situ imaging of field emission from individual carbon nanotubes and their structural damage”, Appl. Phys. Lett., 78, 1757, 2001.
[48]J. A. Trottier, B. R. Chalamala, R. O. Petersen and M. S. Motorola, “Electron stimulated desorption of FED phosphors”, 11th International Vacuum Microelectronics reference, pp.75-76, 1998.
[49]S. H. Yang and M. Yokoyama, “Blue CuxS coated ZnS:Ag,Cl phosphor as potential field emission display material”, J. Vac. Sci. Technol. A, 16, pp. 3443-3448, 1998.
[50]J. M. Fitz-Gerald, T. A. Trottier, R. K. Singh and P. H. Holloway, “Significant reduction of cathodoluminescent degradation in sulfide-based phosphors”, Appl. Phys. Lett., 72, pp. 1838-1839, 1998.
[51]Alex Ryer, “Light Measurement Handbook”, International Light, 1998.
[52]Ian Ashdown, P. Eng., LC, FIES, “Photometry and Radiometry”, Heart Consultants Limited, 2002.
[53]J. L. Hsu, C. Y. Sun, H. F. Cheng, F. Y Chuang, C. H Tsai, W. C. Wang, “Annealing effect on the electron field emission characteristics of pulsed laser deposited diamond-like carbon films on glass”, Applied Surface Science, 142, pp. 510-515, 1999.
[54]S. M. Sze, “Physics of Semiconductor Devices”, New York: Wiley, 1981.
[55]San Jose, “LEDs and Photometry Appnote 1”, OSRAM Opto Semiconductors, 2000.
[56]顧鴻壽, “平面面板顯示器基本概論”, 高立圖書出版, 2004.
[57]趙中興, “顯示器原理與技術”, 全華書局, 1999.