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研究生:張宏達
研究生(外文):Hung-Ta Chang
論文名稱:堇青石基玻璃陶瓷基板與銀/鈀電極共燒之研究
論文名稱(外文):Co-firing of the Cordierite Based Glass-Ceramic Substrates with Ag/Pd Conductors
指導教授:徐錦志
指導教授(外文):Jiin-Jyh Shyu
學位類別:碩士
校院名稱:大同大學
系所名稱:材料工程學系(所)
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:72
中文關鍵詞:銀/鈀電極刮刀成型基板堇青石玻璃陶瓷共燒
外文關鍵詞:Co-firingAg/Pd ConductorSubstrateGlass-Ceramicα-CordieriteTape Casting
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影響玻璃陶瓷粉末與銀╱鈀(Ag/Pd)電極共燒性的因素有:燒結過程中鈀的氧化還原反應、銀╱鈀電極與基板間的反應、銀的擴散、有機物的去除、電極與基板間的收縮率不同。
本研究主要是探討以可生成堇青石相(α- Cordierite)與鋰輝石相(β- Spodumene)之堇青石基玻璃陶瓷粉末(MgO.Al2O3.SiO2.B2O3.P2O5 (MAS) 80wt% + Li2O. Al2O3.2SiO2.B2O3.P2O5(LAS)20wt%)製備的玻璃陶瓷基板與Ag/Pd電極之共燒特性。利用刮刀成型技術先將堇青石基玻璃陶瓷粉末製成生胚,再網印上銀╱鈀電極,經熱疊壓成型後,透過改變燒結溫度、時間及升溫速率的參數,評估兩者的共燒性。研究結果熱處理分四個階段:140oC 2小時—285oC 2小時—495oC2小時— 925oC4小時,升溫速率1oC/min可得良好的共燒性。
研究中亦觀察到在堇青石基玻璃陶瓷基板與85Ag/15Pd(wt%)電極共燒過程中,靠近基板與電極的交接面逐漸形成因Ag 、Bi和Mg等元素擴散所形成四層顏色不同的區域。但在堇青石基玻璃陶瓷基板與70Ag / 30Pd(wt%)電極共燒過程中卻未發生相同的現象。因此,據推斷可能是電極中的Bi2O3與基板成分中的MgO發生反應形成一個阻擋Ag擴散的介面層。
The co-firing properties of the cordierite based glass-ceramic substrate with Ag/Pd electrodes are correlated to a number of factors, including Pd oxidation/reduction during the sintering process, the reaction of the substrate with Ag/Pd electrodes, Ag diffusion and migration, organic vehicle, and sintering shrinkage mismatch between electrode and di-electric layer.
In the present study, multilayer glass-ceramic substrate containingα- Cordierite andβ- Spodumene were co-fired with Ag/Pd electrodes. The green tape of MgO.Al2O3.SiO2.B2O3.P2O5 (MAS) 80wt% / Li2O. Al2O3.2SiO2.B2O3.P2O5(LAS)20wt% are prepared by the tape casting process, then low-resistivity Ag/Pd electrodes paste is applied onto the sheets by printing. These printed green sheets are laminated together by press machine. The objective of this investigation is to evaluate the materials compatibility and low-temperature co-firing aspects of the cordierite based glass-ceramic substrates with Ag/Pd electrodes. The heat-treatment parameters of sintering temperature, sintering time and heating rate will be studied. The stages of firing are 140oC for 2hr-285oC for 2hr-495oC for 2hr-925oC for 4hr (heating rate 1oC/min). In this investigation, the MgO-containing substrates with the co-fired Ag/Pd electrodes revealed a four-layer structure with abnormal Ag-, Bi-, and Mg-distributions near the electrode-substrate interface when 85Ag/15Pd electrode was used. This phenomenon disappeared when 70Ag/30Pd was used. It is thought that the existence of Bi2O3 in the electrode and MgO in the substrate might be responsible for anomaly.
中文摘要I
英文摘要II
目錄III
表目錄VI
圖目錄VII

第一章 緒論P1
第二章 文獻回顧P4
2-1鋰鋁矽酸鹽系玻璃陶瓷P4
2-2堇青石玻璃陶瓷P5
2-3低溫共燒陶瓷技術P5
2-4研究動機與目的P7
第三章 實驗方法與步驟P9
3-1玻璃成分設計P9
3-1-1玻璃粉末製備P9
3-1-2玻璃粉末成型P11
3-1-3 玻璃粉末DTA分析P11
3-1-4 玻璃粉末粒徑分析P12
3-1-5結晶熱處理P12
3-1-6 XRD分析P12
3-1-7 SEM分析P12
3-1-8 熱膨脹分析P13
3-1-9介電常數與介電損失分析P13
3-2 刮刀成型P14
3-2-1漿料配置P14
3-2-2刮刀成型P14
3-2-3熱重分析(TGA分析) P14
3-3 積層試片製作P14
3-3-1網印電極與疊壓P14
3-3-2積層試片熱處理P15
3-3-3 EPMA分析P15
第四章 結果與討論P16
4-1不同配製法對玻璃粉末的燒結、結晶與特性之影響P16
4-1-1玻璃粉末粒徑分析P16
4-1-2玻璃粉末之DTA分析P17
4-1-3 XRD分析P17
4-1-4微觀結構分析P19
4-1-5燒結收縮率分析P20
4-1-6熱膨脹分析P21
4-1-7介電常數與介電損失分析P21
4-2 積層試片之製備與燒結特性P22
4-2-1漿料的組成與影響P22
4-2-2漿料之TGA分析P23
4-2-3積層試片之熱處理條件P23
4-2-4積層試片密度量測P23
4-2-5積層試片之XRD分析P24
4-3玻璃陶瓷基板與Ag/Pd電極共燒性P24
第五章 結論P29
參考文獻P32
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