(34.226.234.102) 您好!臺灣時間:2021/05/12 09:47
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果

詳目顯示:::

: 
twitterline
研究生:蔡宗峰
研究生(外文):Tsung-Feng Tsai
論文名稱:PDMS為基底的壓力感測器製作
論文名稱(外文):Fabrication of Pressure Sensor Base on PDMS Substrate
指導教授:簡昭珩
指導教授(外文):Chao-Heng Chien
學位類別:碩士
校院名稱:大同大學
系所名稱:機械工程學系(所)
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:86
中文關鍵詞:PDMS
外文關鍵詞:PDMS
相關次數:
  • 被引用被引用:2
  • 點閱點閱:420
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:39
  • 收藏至我的研究室書目清單書目收藏:0
隨著微機電技術近年來的蓬勃發展,許多感測元件利用微機電技術將其微型化,但微機電技術所生產的元件,大多是使用不具有可撓性之硬式基底,只能適用於單一平面上,使用範圍有所限制。較少利用軟性高分子材料當做基底來製作,使元件具有可撓性。
本研究利用微機電技術,並配合軟性高分子材料”聚二甲基矽氧烷”(PDMS)取代傳統硬式基底,進行設計與製作軟性電容式壓力感測器。以軟性材料作為底材,所製作出的電容式壓力感測器可增加應用範圍,因為感測器的整體結構為具有可撓性,當應用於各種不同曲面時,可適應於各種曲面的物體。介電層為PDMS,使其撓曲前後的初始電容值不易因撓曲而造成改變。並於每個感測點的四周設計變形緩衝溝槽,此溝槽具有使介電層於受壓後具有變形的緩衝空間,能有效阻隔兩個感測點間應變互相干擾,因此當壓力壓於單一點時,將不會影響到位於受壓點四周的感測點。
本感測器設計為3×3陣列形式,單一感測點面積為3×3㎜,實驗量測過程針對單一感測點施加0-12.8N負載,所量測出的結果顯示,本壓力感測器受力範圍於0-10N之間有較佳之線性度,10-12.8N有較為趨緩的趨勢,較佳點之靈敏度為0.86fF/Kpa。
MEMS(Micro Electro-Mechanical System) has developed vigorously and many kinds of sensor become microminiaturization by using this technology. But the component which made by this technology use the hard material, for example : silicon, glass and PMMA. A few people use the flexible material to be base. The sensor made by using traditional base material can not be flexed. It can be used on one plane surface and has its limitation.
In this research, PDMS is used to replace the traditional base material to fabricate the flexible capacity pressure sensor. The sensor made by this material has more application and because the structure is flexible, it can be used on surface with inequality. And the dielectrophoretic layer is filled of PDMS to reduce initial data error caused by other force. Each point on the sensor has furrow around it. The furrow cut off other point’s stress and make sure that each point does not interfere with other point when it works.
The sensor is designed to be 3×3 array. Each sensing area is 3x3mm2 . The sensor is sensing each point for 0-12.8N. According to the consequence when the pressure range is 0~10N, and when the range up to 10-12.8N,the consequence is not linear. The sensitivity of the better point on the sensor is 0.86fF/Kpa.
第一章 序論
1.1 前言
1.2 研究動機
1.3 論文大綱
第二章 文獻回顧
2.1 目前壓力感測器之發展
2.2 軟性壓力感測器之發展
2.3 結論
第三章 軟性電容式壓力感測器設計
3.1平板電容感測原理
3.2 PDMS材料特性
3.3 軟性電容式壓力感測器設計
3.4 結構設計模擬
3.5 網片設計
3.6 結論
第四章 軟性電容式壓力感測器之製作
4.1感測器上下電極的製作
4.2電容式壓力感測器的介電層製作
4.3上下電極結合介電層與導線之製作
第五章 結果與討論
5.1 量測方法與設備
5.2 量測結果與討論
5.3 製程問題與討論
第六章 總結與未來工作
6.1 總結
6.2 未來工作參考文獻
參考文獻
[1] Yasunori Tada, Masahiro Inoue, Toshimi Kawasaki, Yasushi Kawahito, Hiroshi Ishiguro, and Katsuaki Suganuma,” A Flexible and Stretchable Tactile Sensor utilizing Static Electricity”, Proceedings of the 2007 IEEE/RSJ International Conference on Intelligent Robots and Systems San Diego, CA, USA, Oct 29 - Nov 2, 2007.
[2] 林志勳“2007年感測器市場與發展趨勢”工研院IEK。
[3] 邢泰剛,” 微機電系統技術與應用” P.467-468。
[4] P. REY , P. C HARVET, M.T. DELAYE, S. ABOUHASSAN“A High Density Capacitive Pressure Sensor Array For Fingerprint Sensor Application” TRANSDUCERS '97.
[5] Kyu-Ho Shin, Chang-Ryoul Moon, Tae-Hee Lee, Chang-Hyun Lim, Yong-Jun Kim” Flexible wireless pressure sensor module” Sensors and Actuators A 123–124 (2005) 30–35.
[6] Toshiharu MUKAI “Development of Soft Areal Tactile Sensors for Symbiotic Robots Using Semiconductor Pressure Sensors” Bio-Mimetic Control Research Center, RIKEN 2271-130, Shimoshidami Anagahora, Moriyama-ku, Nagoya, 463-0003, Japan.

[7] Toshiharu MUKAI, Masaki ONISHI, Shinya HIRANO, and Zhiwei LUO,” Development of Soft Areal Tactile Sensors for Human-Interactive Robots”, IEEE Sensor 2006, EXCO, Daegu, Korea / October 22-25, 2006.
[8] Xuefeng Zhuang, Der-Song Lin, Omer Oralkan, and Butrus T. Khuri-Yakub,” FLEXIBLE TRANSDUCER ARRAYS WITH THROUGH-WAFER ELECTRICAL INTERCONNECTS BASED ON TRENCH REFILLING WITH PDMS”, MEMS 2007, Kobe, Japan, 21-25 January 2007.
[9] Hyung-Kew Lee, Sun-Il Chang, and Euisik Yoon,” A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment ”, Journal of Microelectromecha Systems, Vol. 15, No. 6, December 2006.
[10] Eun-Soo Hwang, Jung-hoon Seo, and Yong-Jun Kim,” A Polymer-Based Flexible Tactile Sensor for Both Normal and Shear Load Detections and Its Application for Robotics”, Journal of Microelectromecha Systems, Vol. 16, No. 3, June 2007.
[11] 王士豪,”埋入式被動元件於軟性電路板之整合研究”大同大學碩士論文,2005.
[12] 周台華,” 自製大容量高分子薄膜萃取水中有機污染物之研究”國立中央大學碩士論文,2003.
[13] http://rdo.ntu.edu.tw/research/sslu/sslu.htm.
[14] Huan Hu, Kashan Shaikh and Chang Liu,” Super flexible sensor skin using liquid metal as interconnect”, IEEE SENSORS 2007 Conference.
[15] J C Lötters et al.,” The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications”, J. Micromech. Microeng. 7 (1997)145-147.
[16] http://en.wikipedia.org/wiki/Polydimethylsiloxane.
[17] 林清芳,”基本電學”高立出版社。
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
系統版面圖檔 系統版面圖檔