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研究生:蔡源成
研究生(外文):Yuan-Cheng Tsai
論文名稱:具即時影像追蹤定位能力之雷射顯微雕刻系統
論文名稱(外文):Micro-laser engraving platform with imaging based real time tracking and positioning
指導教授:高甫仁
指導教授(外文):Fu-Jen Kao
學位類別:碩士
校院名稱:國立陽明大學
系所名稱:生醫光電工程研究所
學門:工程學門
學類:生醫工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:90
中文關鍵詞:4f 系統
外文關鍵詞:Projection LensGalvo-mirror
相關次數:
  • 被引用被引用:1
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本實驗提供了一種新的結合影像擷取與雷射雕刻系統的光學架構,目標在於改良傳統雷射雕刻系統的光學架構,提供同步且精準的影像對位功能。其作用方式為利用CCD影像擷取成像方式,事先擷取工件的影像,獲得與雕刻解析度相當的光學影像,以設定工作區域的大小與位置,並據以精密校準工件工作區域的3D位置。如此,傳統上因目視校正所造成的誤差可大幅減小,且可避免多次的嘗試錯誤,並可快速定位,大幅降低尋找與對位工作區域的時間。
應用雷射雕刻系統原理並改良傳統雷射雕刻系統的光學架構。其工作概念原理為結合小型Galvo-mirror暨共焦成像方式,再配合高精密度Projection Lens結合4f 系統與高數值孔徑(Numerical Aperture)物鏡且大面積掃描特性,以此系統可及時定位雕刻工件的顯微影像,其顯微解析度最小可小於1.0μm。如此,將傳統雷射雕刻系統雕刻大範圍改良至高解析度的顯微雕刻系統。
本實驗顯微雕刻系統有二:(一)飛秒雷射顯微雕刻系統。(二) 奈秒雷射顯微雕刻系統。使用Multi-Wall Carbon Nanotube當做sample,並配合SEM(掃描式電子顯微鏡)比較飛秒雷射與奈秒雷射做顯微雕刻時所產生不同的雷射與物質交互作用而所產生的不同結果。
This project employs the confocal plane imaging feedback optical setup to facilitate the positioning and alignment of the object (to be engraved) relative to the laser engraving beam. The pre-acquired images can be used as a template to fine adjust the targeted area on the object. In this way, misalignment in positioning the object can be highly reduced and the repetition of trial-and-error testing runs can be greatly reduced. The new function will speed up the engraving process while claiming higher precision simultaneously and resolution (spot width) down to less than 1μm.

We set up two micro-laser engraving platforms. (1)Femtosecond micro-laser engraving system. (2) Nanosecond micro-laser engraving system. And we use those systems combine Scanning Electron Microscope (SEM)compare with femtosecond-and nanosecond micro-laser engraving in carbon nanotube.
摘要
目錄
圖目錄
表目錄

第一章 實驗導論

第二章 雷射與物質交互作用
2.1 雷射與物質的交互作用基本原理
2.2 影響雷射雕刻解析度與雕刻品質的各種因素

第三章 實驗架設
3.1掃瞄機制
3.2奈秒雷射顯微雕刻系統光路架設
3.3奈秒雷射顯微雕刻系統控制訊號硬體架設
3.4飛秒雷射顯微雕刻系統光路架設
3.5飛秒雷射顯微雕刻系統控制訊號硬體架設
第四章 實驗結果及數據分析
4.1影響雷射雕刻之雷射參數
4.2奈秒雷射顯微雕刻系統分析
4.3奈秒雷射顯微雕刻系統雕刻後AFM影像
4.4飛秒雷射顯微雕刻系統雕刻後Confocal microscopy上影像
4.5 Nanosecond Micro-laser engraving system與Femtosecond Micro-laser engraving system之雕刻解析度分析-SEM分析(以Multi-Wall Carbon Nanotube為sample)
第五章 結論與未來展望
5.1 結論
5.2 未來展望

附錄一 、 儀器介紹
I. 電光調變器(E-O modulator)
II. 共焦掃描顯微系統
III. 電流驅動掃描鏡(Galvo-mirror)
IV. f-θLens
V. 高精密度投影鏡組(Projection Lens)
VI. 4-f系統
附錄二、共焦顯微術

附錄三、熱效應機制

附錄四、雕刻軟體使用說明

附錄五、共軛焦影像回饋式雷射雕刻系統專利書

附錄六、SBIR計畫書 頁次
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[1]Conoptics.Inc ,Electro-optic components and systems,Electro-optic Modulation
[2]http://cai.tongji.edu.cn/wanluokecheng/reading/R_guangxue/guangxue     3.htm
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[4] Satoshi Kawata,Dicret laser writing defects in holographic lithography-created photonic lattices,April 15,2005/Vol.30,No.8/OPTICS LETTERS
[5] Satoshi Kawata,Rapid sub-diffraction-limit laser micro/nanoprocessing in a threshod material system,APPLED PHYSICS LETTERS/Vol.80,Number 2/ Jan.14 2002
[6] Satoshi Kawata,Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization,23 January 2006 /Vol.14,No.2/OPTICS EXPRESS 800
[7]Min Gu,Femtosecond fabricated photomasks for fabrication of microfludic devices,30 October 2006/Vol.14,No.22/OPTICS EXPRES 10753
[8]Min Gu, Use of two-photon excitation for erasable-rewritable three-dimensional bit optical data storage in a photorefractive polymer,OPTICS LETTERS/Vol.24,No.14/July 15,1999
[9]HOLGER LUBATSCHOWSKI,ALEXANDER HEISTERKAMP, Intrastromal Refractive Surgery Using Ultrashort Laser Pulses,Med.Laser Appl.17:4-8(2002)
[10]Alfred Volgel,Mechanisms of femtosecond laser nanopressing of biological cells and tissue,Journal of Physics:Conference Series 59(2007)249-254
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of plasma formation in biological tissues induced by short laser pulses, Appl. Phys. B 90, 141–148 (2008)
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