臺灣博碩士論文加值系統

在本論文中，我們驗證且直接量測到在室溫下垂直共振面射型雷射之高階耳語廊模態(higher-order whispering-gallery modes) 。我們透過用表面微結構破壞垂直反射鏡，藉以抑制低階橫向模態。在實驗上，我們藉由量測光場強度分布來觀察氧化侷限形成之高階模態，並配合模擬分析，建立了簡易的方法研究微共振腔之模態。

In this dissertation, we demonstrate a direct method to observe higher-order whispering-gallery modes in vertical cavity surface emitting lasers (VCSELs) at room temperature. We show that suppression of lower-order cavity modes can be achieved by destroying vertical reflectors with a surface micro-structure. High order whispering-gallery modes confined laterally by the native oxide layers are observed in experiments through collecting near-field radiation patterns. The experimental observations and the simulation results provide an alternative but easy approach to access whispering-gallery modes (WGMs) in VCSELs at room temperature.

中文摘要 ---------------------- i
英文摘要 ----------------------- ii
誌謝 ------------------------------ iii
目錄 ------------------------------- iv
表目錄 ------------------------------- v
圖目錄 ------------------------------ vi
一、 緒論---------------------------
1.1 前言-------------------------- 1
1.1.1 光子晶體-------------------- 1
1.1.2 光子晶體微共振腔------------- 2
1.1.3 垂直共振腔面射型雷射之介紹--4
1.2 研究動機----------------------- 5
二、 面射型雷射橫向模態------------
2.1 面射型雷射之結構-------------- 6
2.1.1 幾何結構--------------------- 6
2.2 OC-VCSEL 製程步驟----------- 7
2.2.1 材料與能隙------------------ 11
2.3 面射型雷射工作原理----------- 12
2.3.1 布拉格反射鏡--------------- 12
2.4 共振腔模態理論------------- 17
2.4.1 共振腔內的TM、TE mode ------ 18
2.5 雷射模態-------------------- 21
2.6 耳語郎模態------------------ 22
三、 實驗架構與量測方法----------
3.1 光強度量測系統-------------- 23
3.1.1 光學量測架構---------------- 23
3.1.2 光學量測儀------------------ 23
3.1.3 L-I-V量測架構---------------- 23
3.2 數值模擬方法----------------- 28
3.2.1 有限元素法------------------- 28
3.3 靜、電磁場方程式-------------- 30
3.3.1 靜磁場方程式------------------- 31
3.3.2 靜電場方程式------------------ 32
3.4 實驗結果與分析---------------- 38
3.4.1 不同共振腔之模態------------- 39
實驗結構A------------------- 40
實驗結構B-------------------- 40
實驗結構C--------------------- 45
實驗結構D-------------------- 49
3.4.2 電流變化的光強度分佈--------- 62
實驗結構A------------------- 63
實驗結構B------------------- 65
實驗結構C------------------- 67
實驗結構D------------------- 69
五、 結論-------------------------
5.1 總論------------------------ 71
參考文獻 -------------------- 73

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