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研究生:張開恩
研究生(外文):Kai-En Chang
論文名稱:微細加工機即時誤差補償系統之設計與實現
論文名稱(外文):Design and Implementation of a Real-Time Error Compensation System for Micro-Machining Center
指導教授:柯志隆
指導教授(外文):Roy Chih-Lung Ko
學位類別:碩士
校院名稱:國立雲林科技大學
系所名稱:機械工程系碩士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:91
中文關鍵詞:雷射干涉儀插補法開放式通訊協定隔振系統PC-Based 控制器
外文關鍵詞:Laser interferometerPC-Based controllerVibration isolation systemInterpolation methodOpen communication- protocol
相關次數:
  • 被引用被引用:8
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我們成功地整合PC-based數控系統與美製線馬氣浮平台,開啟進入次微米級精密加工的大門,使用隔振系統增強機台穩定性,並使微細加工機具備高度彈性及開放性,而後建立量測系統架構及補償方法之藍圖,包括軸向定位補償、摩擦力補償及平面度之Z軸即時刀長補正等方法。在現今的產業中,雷射的運用在加工與量測領域已是非常普遍,其可靠度不僅在學術界,更是為業界所信任,因此在本研究中我們使用雷射設備進行實驗。
研究過程我們分別探討軸向定位精度及表面平面度之原理與應用,建立補償架構的方法、研究雷射測距儀的原理及其使用方法,並撰寫自動化量測軟體,完成補償系統的建立。以ANCA PC-Based 控制系統為核心,利用雷射量測設備校正平台精度,將補償資料整合於上位控制器中進行即時補償,最後對於補償前與補償後實驗之精度曲線分佈進行分析,發現溫度改變對於平台重現精度的影響頗大。而平面度方面,以量測系統與控制系統整合的概念,利用自行發展之自動化量測軟體,將雷射量測設備整合於控制系統中,以達到即時表面平面度之量測,最後由本研究所推導之數學關係式,建立即時補償算式。這些補償系統的建立,使控制系統未來得以順利完成即時的補償工作,協助實現高精度之加工。
In this work we integrated linear PM motors with air-static bearings and a PC-Based control system. To enhance the stability of the precision machine tool, we include vibration isolation technology in the machine frame, and the system was delivered with a framework of measurement and compensation to achieve completeness, openness, flexibility and performance. In today''s industry, Laser equipment is commonly used in the fields of processing and measurement, and its safety and reliability is suitable for our experiment.

In this study, we investigate positioning accuracy and surface flatness of the machine. We employed ANCA PC-based Control System as the platform to develop methods of measurement and software for automated measurement applications. The use of laser measurement equipment generates calibration data, which will then be integrated into the top-level controller for real-time compensation. Analyzing and comparing the result of axial precision, it showed that temperature effects on the repeatability of the experimental platform were quite significant. To measure the flatness, the integration between measurement and control system was the main effort. The laser equipment was integrated in the control system by application software of our own design to realize real-time compensation of surface flatness. The establishment of such compensation system will help the controller achieve high-precision machining.
中文摘要 ---------------------------------------------------------------------------- i
英文摘要 ---------------------------------------------------------------------------- ii
誌謝 ---------------------------------------------------------------------------- iii
目錄 ---------------------------------------------------------------------------- iv
表目錄 ---------------------------------------------------------------------------- vi
圖目錄 ---------------------------------------------------------------------------- vii
第一章 序論---------------------------------------------------------------------- 1
1.1 微型加工機發展簡介------------------------------------------------- 1
1.2 研究背景---------------------------------------------------------------- 1
1.3 研究動機及目的------------------------------------------------------- 2
1.4 文獻回顧---------------------------------------------------------------- 4
第二章 微細加工機數控系統之整合---------------------------------------- 7
2.1 硬體架構---------------------------------------------------------------- 7
2.1.1 ANCA控制器簡介---------------------------------------------------- 8
2.1.2 隔振平台---------------------------------------------------------------- 10
2.1.3 機台基座結構材料---------------------------------------------------- 15
2.2 控制介面板的設計與實作------------------------------------------- 16
2.2.1 電路方塊圖------------------------------------------------------------- 18
2.2.2 高速多工器------------------------------------------------------------- 20
2.2.3 光耦合器---------------------------------------------------------------- 21
2.2.4 馬達端訊號------------------------------------------------------------- 22
2.3 SERCOS通訊協定---------------------------------------------------- 23
2.4 ANCA Windows-Based CNC Software架構---------------------- 27
2.4.1 伺服驅動器軟體DSD Software------------------------------------- 28
2.4.2 可編程邏輯控制器PLC---------------------------------------------- 29
2.4.3 物件加工程式EPPL-------------------------------------------------- 31
2.4.4 應用軟體的發展------------------------------------------------------- 32
2.5 共享記憶體變數SMV------------------------------------------------ 33
第三章 X、Y軸補償技術----------------------------------------------------- 35

3.1 雲形線插補------------------------------------------------------------- 35
3.2 Fanuc 誤差補償系統------------------------------------------------- 38
3.3 線性插補---------------------------------------------------------------- 40
3.3.1 單向定位誤差補償---------------------------------------------------- 42
3.3.2 雙向定位誤差補償---------------------------------------------------- 44
3.4 補償格式範例---------------------------------------------------------- 46
第四章 平面度補償技術------------------------------------------------------- 50
4.1 數學平面模型---------------------------------------------------------- 50
4.2 數學平面模型證明---------------------------------------------------- 51
4.3 雙線性插補法---------------------------------------------------------- 52
4.4 補償系統架構---------------------------------------------------------- 55
第五章 雷射量測系統設計---------------------------------------------------- 56
5.1 HP 5529A雷射干涉儀原理------------------------------------------ 56
5.1.1 雷射干涉儀之架構---------------------------------------------------- 57
5.2 平面度量測與儀器介紹---------------------------------------------- 60
5.3 應用軟體設計---------------------------------------------------------- 68
第六章 實驗結果---------------------------------------------------------------- 72
6.1 控制介面板多工波形------------------------------------------------- 72
6.2 機台振動測試---------------------------------------------------------- 73
6.3 運動控制精度實驗---------------------------------------------------- 77
6.3.1 X、Y步階實驗-------------------------------------------------------- 77
6.3.2 X、Y循圓之摩擦力實驗-------------------------------------------- 78
6.3.3 X、Y直線定位量測曲線-------------------------------------------- 79
6.4 平面度實驗------------------------------------------------------------- 83
第七章 結論與未來展望------------------------------------------------------- 86
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