臺灣博碩士論文加值系統

本實驗採用溶膠凝膠法製備ITO導電薄膜配製旋轉塗佈於高溫玻璃上作為太陽能電池的穿透層。為了有效利用太陽光在300~400nm的近紫外線高能量區段，我們使用氧化銦鍚作為母材摻雜發光元素銪，分別製作成粉末及導電薄膜兩種方法，實驗發現母材氧化銦鍚單摻雜銪(Europium)離子的發光特性不好，幾乎偵測不到銪離子之放射光，由此可知，氧化銦鍚對銪不是個好的母材，故我們試著藉由稀土元素釔(Yttrium)做共摻雜動作後，發現其發光特性大大的提升，且粉末及薄膜皆可明顯偵測到611 nm之放射光。
最後，經由元素摻雜量的控制，我們得一電阻率(3.11×10-3 Ω．cm)與未摻雜之氧化銦錫(2.91×10-3 Ω．cm)相近，其穿透率在可見光部分也可達到94%，但具下轉換功能的高品質透明導電薄膜，除了以上光電特性外，其中還對此材料做XRD及SEM對結晶性做分析，加上XPS分析參雜前後材料內部的化學變化。若再經由製程參數的改良，此薄膜可用於薄膜式太陽能電池之透明導電層，增加其轉換效率。

In this thesis, ITO films were prepared by sol-gel spin-coating method as the transparent conducting layer of solar cell. In order to utilize sunlight in 300-400 nm ultraviolet high-energy section effectively, we used Eu3+ ions doped ITO to fabricate the thin films and the powder. it has no 611 nm emission were Investigated from Eu3+ ions at the PL measure, and we tried to codoped Eu3+-Y3+ into ITO, as a result, the emission of 611 nm was magnificently increased.
Finally, we could obtain a quality thin films that the transmittance able to reach 94% , and the resistivity similar to pure ITO thin film, however, it has provided with down-conversion effect to increase the efficiency of solar cell. In addition to the Opto-Electronic characteristic measure , the ITO surface morphology and grain size were observed by the X-ray powder diffraction (XRD) and scanning electron microscopy (SEM) , and X-ray photoelectron spectra (XPS) was analysised the chemical environment of the materials.
After the suitable process parameters control, the thin films could be as the luminescent solar concentrators and transparent conductive electrode to enhance the efficiency of solar cells.

摘要 II
英文摘要 III
誌謝 IV
目錄 V
第一章 序論 1
1-1 前言 1
1-2 研究動機 2
第二章 文獻與理論基礎 5
2-1 透明導電膜簡介與文獻 5
2-1-1 透明導電膜的種類 6
2-1-2 透明導電薄膜的製備方法 6
2-1-3 溶膠-凝膠法 7
2-1-4 Sol–Gel 法的優點 9
2-2 ITO的結構與導電機制 11
2-2-1 結構 12
2-2-2 導電機制 13
2-3 螢光材料簡介與發展 14
2-3-1 螢光材料之簡介與發展 14
2-3-2 發光中心之種類與原理 16
2-3-3 螢光材料的設計 18
2-3-4 斯托克斯效應 21
2-3-5 影響螢光效率的因素 21
2-4 稀土離子Eu3+摻雜發光機制 24
2-5 luminescent solar concentrator; LSC 技術簡介 25
第三章 實驗方法 34
3-1 實驗藥品 34
3-2 實驗儀器 35
3-3 溶膠-凝膠法製備ITO/ITO:Y3+:Eu3+薄膜 36
3-3-1 高溫玻璃基板之前處理及塗佈參數 36
3-3-2 溶膠-凝膠法製備純ITO薄膜 37
3-3-3 溶膠-凝膠法製備ITO:Y3+:Eu3+薄膜 37
3-4 溶膠-凝膠法製備ITO/ITO:Y3+:Eu3+薄膜 38
3-4-1 溶膠-凝膠法製備純ITO粉末 38
3-4-2 溶膠-凝膠法製備ITO:Y3+:Eu3+粉末 39
3-5量測方法 40
3-5-1 X光繞射分析儀（X-ray Diffraction） 40
3-5-2 掃描式電子顯微鏡（SEM） 41
3-5-3 X光電子能譜儀（XPS） 41
3-5-4 光激螢光光譜原理 (PL) 42
3-5-5 光激螢光激發光譜原理 (PLE) 42
3-5-6 四點探針 (Four point probe) 43
3-5-7 穿透光譜儀 (T%) 45
第四章 實驗結果與討論 54
4-1 X光繞射分析 54
4-2掃描式電子顯微鏡量測 55
4-3 X光電子能譜儀分析 56
4-4光激螢光光譜量測 57
4-5光激螢光激發光譜量測 60
4-6穿透光譜量測 60
4-7四點探針量測 61
第五章 結論 86
參考文獻 88

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