臺灣博碩士論文加值系統

根據Wenzel 與Cassie 的理論，製作具有微/奈米結構之表面，
可增加其表面粗糙度，並增加表面疏水性。在微米結構方面，利用水
氣自組裝製作之Breath Figures 之模具壓印方法，翻印出PDMS 之微
米突起結構，並將PDMS 突起結構再轉印在平坦之SU8-2002 薄膜
上，製作凹槽微米結構。在製作奈米結構方面，使用團聯式共聚物
(block coplymers, BCPs)之高分子PS-b-PMMA，其分子量為501k，將
之塗佈於具凹槽微米結構之SU8-2002 上， 並利用溶劑誘導
(solvent-induce)的方式，使PS-b-PMMA 以微相分離(phase separation)
的機制產生奈米結構，再利用醋酸蝕刻樣品，使其奈米結構之表面起
伏變大。最後使用PDMS 於所完成的微/奈米結構樣品表面進行翻
模，製作具有微/奈米結構之高疏水性之表面，並且對其表面進行疏
水性量測與分析。

In this work, a novel method is presented to fabricate micro/nano
structured surface with large surface roughness to increase the
hydrophobic property according to Wenzel and Cassie theories. In the
fabrication process, the breath figures’ molds were adopted to imprint
PDMS bulges by molding method. The PDMS bulges were then
imprinted on SU-8 2002 thin films to fabricate micro concave structures.
In the fabrication of nano structures, the BCPs of PS-b-PMMA with
501K molecular weight were spin-coated on SU-8 2002 concave
structures and phase separated into nano balls morphologies by solvent
induced method. To increase the surface roughness of nano structures, the
BCPs were etched by acetic acid. The micro/nano structures (SU-8 2002
concave structures with BCPs nano balls) were then transferred into
PDMS thin film. The surface hydrophobic properties of PDMS
micro/nano structures were measured by contact angle technique.

第一章序論……………………………………………………………..1
第二章實驗原理………………………………………………………13
2-1 材料表面之濕潤性原理………………………………………...13
2-2 雙團聯式共聚物微相分離型態與原理………………………...16
2-3 以溶劑誘導的方法使團聯式共聚物形成微相分離之原理…...20
第三章實驗步驟………………………………………………………24
3-1 實驗材料………………………………………………………...24
3-2 實驗項目………………………………………………………...25
3-2-1 清洗玻璃基板……………………………………………...25
3-2-2 製作微米等級的聚甲基矽氧烷結構……………………...25
3-2-3 利用壓印及溶劑誘導方法製程具有微/奈米等級之結構..29
第四章結果與討論……………………………………………………33
4-1 表面接觸角之量測及計算方法………………………………...33
4-1-1 沒有任何結構的SU8-2002 之接觸角計算………………..33
4-1-2 具有微/奈米結構之PDMS 接觸角計算…………………..36
4-2 疏水性與表面粗糙性之關係研究……………………………...37
4-2-1 不同的材料及結構之疏水性變化之研究………………...37
4-2-2 不同的醋酸蝕刻時間對於疏水性的影響之研究………...41
4-2-3 各種結構之PDMS模具之疏水性研究……………………48
第五章結論……………………………………………………………53
參考文獻………………………………………………………………..54

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