一般而言，RF無線收發機傳送的通道充滿了各種頻帶的無線電波，為了抑制不需要的頻帶與訊號進入系統，我們必須要用帶通濾波器抑制高低截止頻帶中的雜訊。本論文提出兩種帶通濾波器，首先為具三傳輸零點之非對稱帶通濾波器，其實現原理是利用傳統二階π-network 電感耦合帶通濾波器結合對地電容以及交錯耦合電容性機制，實現兩個低頻帶零點及一個高頻帶零點。最重要的是，此交錯耦合電容性機制並不會影響濾波器的導通帶性能，所以藉由仔細選擇濾波器之佈局模型於低阻抗的矽基板上，最小3 dB的插入損耗@ 24 GHz之帶通濾波器可以被完成，並具有三個低於-20dB衰減傳輸零點於10GHz、16.7GHz與60GHz。
雙模態環形共振腔具有架構簡單、易於實作以及具有高低頻傳輸零點等優點，故在第三章我們選用架構對稱簡單具有高品質數的雙模態環形共振腔作為濾波器。利用台積電0.18μm CMOS製程多層金屬，以三明治(Sandwich MIM Capacitor)結構作為饋入和微擾電容，可輕易調整輸入輸出埠的饋入位置，用較小的面積就可達到足夠的耦合量去匹配，並分析微擾電容對於零點位置和頻寬的影響。環形共振腔的部份也結合多層金屬，改變微帶線之特性阻抗，增加電路設計之彈性，得到更佳的通帶特性與零點位置。最後我們成功的實作一操作於60GHz之雙模態環型帶通濾波器，並藉由曲折（Meander）有效的縮小40%之面積，整體面積為0.56 × 0.73 mm2，通帶插入損耗小於4dB，零點位於46GHz和88GHz，衰減低於-20dB。
第四章利用第三章之設計流程，實作雙頻帶雙模態帶通濾波器於60GHz(室內點對點高速寬頻傳輸帶)以及77GHz(車載雷達)兩個免照商用頻帶。由於這兩個頻帶相近，在此使用穩懋半導體公司所提供之0.5μm pHEMT製程，成功的實現一個符合於60GHz與77GHz兩個頻帶之規範的雙頻帶通濾波器，其中在低頻通帶最小通帶插入損耗2.3dB，在高頻通帶最小通帶插入損耗3dB，在截止帶51.2、70、91.3GHz皆有-30dB以上的衰減拒斥能力，總面積為0.91 × 0.46 mm2。

In general, RF wireless signals transit in atmosphere. In order to reject unwanted radio waves or noises, a band-pass filter can be used to reject noise in stopband. Therefore, this paper presents two kinds of band-pass filter. The first one is an asymmetrical response band-pass filter with three transmission zeros, the design principle uses traditional π-network of second-order band-pass filter inductively coupled combining of capacitance to ground and coupling capacitance mechanisms to achieve the two lower bands and upper band zeros. The most important thing is that this mechanism of cross coupling capacitance does not affect the passband performance .The measured insertion loss of the passband is less than 3dB, and three transmission zeros of less than -20dB attenuation at 10GHz, 16.7GHz and 60GHz.
Second type of filter is dual-mode ring resonator, which has advantages of simple structure, easy implementation, and two transmission zeros at upper and lower. In Chapter III, we selected this simple symmetrical structure with high-quality dual-mode ring resonator as a filter. Using multi-layer metal process of TSMC 0.18μm CMOS to make sandwich MIM structure as the feed and perturbation capacitor, it can easily adjust the input and output ports of the feed location, and using a smaller area to achieve sufficient coupling to match the circuit. Also, we make analysis for the perturbation impact of transmission zeros and bandwidth. Besides, the ring resonator is also combined with multi-layer metal, by changing the characteristic impedance of microstrip line to increase flexibility of circuit design to get the better pass-band and stop-band characteristics. Finally, we implement a successful operation in the 60GHz dual-mode ring bandpass filter, and meander the ring to reduce the area of 40 percent, the overall area of 0.56 × 0.73 mm2, insertion loss is less than 4dB, transmission zeros at 46GHz and 88GHz get the attenuation lower than -20dB.
In Chapter IV, we use the design method shown in Chapter III to make a dual-mode dual-band bandpass filter in the pHEMT process which provided by semiconductor companies WIN. 60GHz is unlicensed band which can find applications in such as point-to-point wireless LANs and broadband internet access.77GHz is another unlicensed band for adaptive cruise control on cars. The measurement conform both of the 60GHz and 77GHz frequency bands of specification. Insertion loss of passband are less than 3dB, there is more than -30dB attenuation zeros located at 51, 70, and 91GHz. Those results fit the specification of 60 and 77 GHz systems.
The total area is 0.91×0.46 mm2.

Index Terms: Bandpass filter、transmission zero、dualband filter、dual-mode ring resonator

中文摘要 v
英文摘要 vi
目錄 viii
圖目錄 ix
表目錄 x
第一章 緒論 1
1.1 研究動機 1
1.2 章節概述 4
第二章 應用於K頻帶系統之非對稱 5
具三傳輸零點之帶通濾波器 5
2.1簡介 5
2.2濾波器基本理論 6
2.2-1特性參數 6
2.2-2 雙埠網路 8
2.3柴比雪夫二階帶通濾波器設計 13
2.3-1低通濾波器原型與阻抗轉換器及導納轉換器 13
2.3-2傳統π型與非對稱具三零點帶通濾波器設計流程 16
2.4 以CMOS製程技術實現非對稱具三傳輸零點帶通濾波器 25
2.5 結果與討論 28
第三章 曲折型雙模態帶通濾波器 29
3.1雙模態濾波器演進與基本理論 29
3.2奇偶模分析 34
3.2-1奇偶模等效電路與共振模態分析 34
3.2-2 微擾電容Cp與零點、頻寬之關係 37
3.2-3 耦合電容Cg與極點、匹配之關係 40
3.3雙模態帶通濾波器模擬與實作 44
3.4 結果與討論 50
第四章 雙頻帶雙模態帶通濾波器 51
4.1簡介 51
4.2以pHEMT製程技術實現雙頻帶雙模態帶通濾波器 53
4.3模擬與量測結果 55
第五章 結論 58
參考文獻 60
附錄一 62

圖目錄

圖1.1 射頻前端接收機系統示意圖 2
圖1.2 日規、歐規，以及美規對60GHz頻段的定義 3
圖2.1 帶通濾波器的振幅頻率響應 7
圖2.2 Z矩陣的雙埠串聯網路 9
圖2.3 Y矩陣雙埠網路 10
圖2.4 ABCD疊接的雙埠網路 12
圖2.5 常用的雙埠ABCD雙埠矩陣 12
圖2.6 低通原型濾波器 13
圖2.7 (a) 阻抗轉換器 13
圖2.7 (b) 導納轉換器 13
圖2.8 轉換器之集總元件等效 14
圖2.9 轉換器負載處理之等效電路 15
圖2.10 (a) 柴比雪夫二階濾波器低通原型 16
圖2.10 (b)加入導納轉換器使各諧振腔一致 16
圖2.12 運用轉換器與負載等效之帶通濾波器 17
圖2.13 (a) 將J12以集總元件取代 17
圖2.13 (b)π型帶通濾波器 18
圖2.14 Y型及Δ型阻抗電路 19
圖2.15 π轉T之電感耦合帶通濾波器 20
圖2.16 π型帶通濾波器 20
圖2.17 T型帶通濾波器 20
圖2.18 X分為兩個串接臂Xm1、 21
圖2.19串接臂Xm1、Xm2分為LC串聯共振電路 22
圖2.20非對稱具三傳輸零點之帶通濾波器電路圖 23
圖2.21 並聯耦合電容之後的Y參數等效模型 23
圖2.22 y12和Cc的Y參數及相位 24
圖2.23加上Cc之後的S11和S21 24
圖2.24 Cc=0.005pF時的Y參數 25
圖2.25 台積電 0.13μm 的矽基板剖面示意圖 25
圖2.26 品質因素值的比較 26
圖2.27 非對稱具低頻雙傳輸零點之二階帶通濾波器模擬圖 27
圖2.28 非對稱具三傳輸零點之帶通濾波器模擬與量測 27
圖2.29非對稱具低頻雙傳輸零點之二階帶通濾波器佈局圖 27
圖3.1 (a) 環形共振器圖 3.1(b) 環形共振器相位圖 30
圖3.1 (c) 雙模態濾波器架構圖 30
圖3.2 雙模態濾波器等效電路圖 31
圖3.3 不同Cp的Z11比較圖 31
圖3.4 不同Cp的Z21比較圖 32
圖3.5 無Cg雙模態濾波器電路架構 32
圖3.6 不同Cg的Z11比較圖 33
圖3.7 不同Cg的Z21比較圖 33
圖3.8 不同Cg的S11參數比較圖 33
圖3.9 不同Cg的S21參數比較圖 34
圖3.10(a) 偶模等效電路 圖3.10(b) 奇模等效電路 35
圖3.11 奇偶模的Z11模擬圖 35
圖3.12 偶模等效電路 36
圖3.13 奇模等效電路 36
圖3.14 模擬傳輸零點之位置 37
圖3.15 環形等效電路S參數模擬圖 38
圖3.16 Zeven與Zodd模擬圖 38
圖3.17 互易性雙埠網路的等效圖 40
圖3.18 奇偶模與Z參數之間的轉換 40
圖3.19 不同Cg的Γ分子部份比較圖 42
圖3.20 Zodd與S11比較圖 42
圖3.21 60GHz環形帶通濾波器設計流程 44
圖3.22 公式解之濾波器模型S參數模擬圖 45
圖3.23 50與30之Zodd以及Zeven 46
圖3.24 不同厚度固定中心頻率之S21 47
圖3.25 三明治結構作耦合電容Cg 47
圖3.26 3D佈局示意圖 48
圖3.27 晶片照相圖 48
圖3.28 雙模態環型帶通濾波器模擬量測圖 49
圖4.1 商用無照頻寬對照圖 51
圖4.2 pHEMT製成切面圖 52
圖4.3 60GHz之理想模型與電磁模擬結果 53
圖4.4 將77GHz之共振腔置於60GHz濾波器內 54
圖4.5 將77GHz之共振腔置於60GHz濾波器內Z參數 54
圖4.6 60GHz、77GHz雙頻帶濾波器模擬結果 55
圖4.7 晶片照相圖 55
圖4.8 電磁模擬與量測結果 56
表目錄

表1.1 國際通用不需要執照的商用頻段 1
表2.1 元件值 25
表2.2 非對稱具三傳輸零點之帶通濾波器規格表 28
表2.3 操作於K頻帶之帶通濾波器相關論文比較 28
表3.1 不同Cp時的頻寬比較表 39
表3.2 不同線寬之特性比較 46
表3.3 曲折型雙模態帶通濾波器規格表 50
表3.4 60GHz帶通濾波器相關論文比較 50
表4.1 雙模態雙頻帶帶通濾波器規格表 56

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