(3.238.130.97) 您好！臺灣時間：2021/05/10 12:08

### 詳目顯示:::

:

• 被引用:1
• 點閱:834
• 評分:
• 下載:209
• 書目收藏:0
 論文主要以數值模擬方式分析微型樑受靜電驅動時之吸附現象，研究內容為分析微型樑與靜電場的耦合效應、微型樑因靜電力產生的變形及微型樑邊界效應之臨界電壓。在論文中使用有限元素分析軟體COMSOL Multiphysics®，以參數值方式模擬不同樑厚、不同樑寬之微型樑受靜電負載的偏斜與電壓關係，及探討模擬結果對微型樑之影響，以提供未來研究發展靜電式微結構的參考依據。
 This thesis is mainly based on the numerical simulation method to analyze the pull-in phenomenon on the micro beam driven by static electricity. The research contents are separated into coupling effect of micro beam and electrostatic field and the deflection of micro beam due to static electricity and the threshold voltage of the boundary effect of micro beam. In this thesis, the finite element analysis software COMSOL Multiphysics® is utilized and numerical method is adopted to simulate the relationship between the load deflection by static electricity and voltage of micro beam with different thickness and width and to explore the effect on micro beam by the simulation result. The results can serve as a reference for research on the development of electrostatic micro structure in the future.
 誌謝 I摘要 IIAbstract III目錄 IV表錄 VI圖錄 VII符號說明 X第一章 緒論 11.1 論文架構 11.2 前言 21.3 研究動機 41.4 文獻回顧 5第二章 理論分析 92.1 能量元素 92.2 吸附電壓 132.3 邊界效應之吸附電壓 16第三章 有限元素數值模擬法 203.1 COMSOL Multiphysics®簡介 203.2 電腦模擬 213.3 模擬結果分析 36第四章 結論 414.1 結論 414.2 未來展望 42參考文獻 43
 1. H.H. Lin, C.H. Chu, C.L. Chang, P.Z. Chang,"Mechanical Behavior of RF MEMS,"Second International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems, Chiba University, Japan, pp.121–125, 2004.2. P.M. Osterberg,"Electrostatically Actuated Microelectromechan–ical Test Structures for Material property Measurement,"Ph.D. Dissertation, Massachusetts Institute of Technology, Cambridge, MA, 1995.3. M. Lemkin, B. Boser,"A Micromachined Fully Differential Lateral Accelerometer,"IEEE Custom Integrated Circuits Conference, pp. 315–318, 1996.4. J.J. Yao, and M.F. Chang,"A Surface Micromachined MiniatureSwitch for Telecommunications Applications with Signal Frequencies from DC up to 4 GHz,"Transducers’95, The 8th International Conference on Solid–State Sensors and Actuators, pp.384–387, June 1995.5. H. Toshiyoshi, W. Piyawattanametha, C.T. Chan, and M.C. Wu,"Linearization of Electrostatically Actuated Surface Micromachined 2–D Optical Scanner,"Journal of Microelectromechanical Systems, Vol.10, No.2, pp.205–214, June 2001.6. N.P. Van Der Mejis, and J.T. Fokkema,"VLSI Circuit Reconstruction from Mask Topology,"Integration, Vol.2, No.2, pp.85–119, 1984.7. Sazzadur Chowdhury, M.Ahmadi, W.C.Miller,"Pull–In Voltage Study of Electrostatically Actuated Fixed–Fixed Beams Using a VLSI On–Chip Interconnect Capacitance Model,"Journal of Microelectromechanical Systems, Vol.15, No.3, pp.639–615, June 2006.8. S.Chowdhury, M.Ahmadi, W. C.Miller,"Pull–In Voltage Calculations for MEMS Sensors with Cantilevered Beams,"IEEE– NEWCAS Conference,2005. The 3rd International, June 2005, pp.143–146.9. I. Ladabaum, X. Jin, H.T. Soh, A. Atalar, B.T. Khuri–Yakub,"Surface Micromachined Capacitive Ultrasonic Transducers,"IEEE Transactions on Ultrasonic, Ferroelectrics, and Frequency Control, Vol.45, No.3, pp.679–690, May 1998.10. S.D. Senturia,"Microsystems Design,"Kluwer Academic Publishers, Boston 2001, pp.125–137.
 電子全文
 國圖紙本論文
 推文當script無法執行時可按︰推文 網路書籤當script無法執行時可按︰網路書籤 推薦當script無法執行時可按︰推薦 評分當script無法執行時可按︰評分 引用網址當script無法執行時可按︰引用網址 轉寄當script無法執行時可按︰轉寄

 1 熱管散熱器之熱管陣列配置設計 2 最佳化離子佈植條件以改善電容耦合式非揮發性記憶體效能

 無相關期刊

 1 無線胎壓系統之應用與有限元素分析 2 COMSOL之凝固與熱傳問題分析 3 以COMSOL有限元素軟體分析凝固問題 4 電容式類光學尺COMSOLMULTIPHYSICS模擬 5 以COMSOL Multiphysics模擬氣懸微粒於靜電集塵式細胞株暴露系統中之運動軌跡 6 THEOPTIMALDESIGNPROCESSOFTHEPLATEHEATEXCHANGER 7 整合實驗、簡易共軛梯度法及多重物理量分析之高功率LED陣列熱傳最佳化研究 8 具不同邊界條件之微樑結構的吸附電壓之探討 9 以COMSOL MULTIPHYSICS模擬光催化反應程序降解甲基藍及反應器設計 10 陣列式高功率LED均勻散熱研究 11 有限元素法應用於電力電纜電磁效應分析 12 高功率發光二極體封裝之熱傳最佳化研究暨使用者介面開發 13 以有限元素法分析表面聲波元件之特性 14 多孔式噴射撞擊平板之數值模擬分析 15 塑膠原型件用於精密鑄造過程中熱應力的數值分析

 簡易查詢 | 進階查詢 | 熱門排行 | 我的研究室