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論文名稱(外文):Vapor-Liquid Equilibria for the binary systems of PGME + water and PGME + alcohols
外文關鍵詞:PGMEwateralcoholvapor-liquid equilibriaEBR
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在生產液晶顯示器製程中,通常利用洗邊劑(Edge Bead Removers, EBR)來清除殘留在玻璃基板邊緣與背面的光阻,而晶邊清洗劑通常採用丙二醇甲醚(Propylene Glycol Monomethyl Ester, PGME)及丙二醇甲醚乙酸酯(Propylene Glycol Methyl Ether Acetate, PGMEA)之混合溶劑,由於在EBR廢液中,包含了光阻劑成分(如樹脂等)與丙二醇甲醚/丙二醇甲醚乙酸酯的混合物,因此在環保觀念與降低操作成本的考量下,丙二醇甲醚的回收程序即成為一重要課題。
因此在本研究中,將針對水+丙二醇甲醚、甲醇+丙二醇甲醚、乙醇+丙二醇甲醚、正丙醇+丙二醇甲醚和異丙醇+丙二醇甲醚等雙成份系統進行汽液平衡,所有量測的汽液相平衡數據均通過熱力學一致性測試。在理論上,分別採用 RK-UNIQUAC、RK-NRTL和RK-Wilson模式,實驗數據與計算相平衡行為的結果比對,得到良好之計算結果。

A liquid mixture consisted of propylene glycol monomethyl ether (PGME) and propylene glycol methyl ether acetate (PGMEA) is widely used as photoresist edge bead remover (EBR) in the color crystal displays (LCD) manufacturing process. It is important to recover the PGME from EBR wastes for the considerations of environment protection and lowering the operation cost.
Therefore, the investigation the vapor-liquid equilibria (VLE) of water + PGME, methanol + PGME, ethanol + PGME, 1-proanol + PGME and iso-propanol + PGME systems. All the VLE data of the five systems pass the thermodynamic consistency test. Activity coefficients, calculated by RK-UNIQUAC, RK-NRTL and RK-Wilson model can be used to represent the interactions in the solution. The calculated VLE data agree well with the experimental ones.

摘 要 i
Abstract ii
誌 謝 iii
目 錄 iv
圖 目 錄 vi
表 目 錄 vii
第一章 緒論 1
第二章 文獻回顧 3
2-1活性係數模式之回顧 3
2-2汽液相平衡之回顧 4
2-3丙二醇甲醚相關研究 5
第三章 實驗 7
3-1藥品 7
3-2設備 8
3-2-1氣相層析儀(Gas Chromatography) 10
3-3製作檢量線 11
3-3-1檢量曲線的擬合 11
3-4-1汽液平衡釜各部份之介紹 14
3-5汽液相平衡之量測 14
3-5-1汽液相平衡量測之要點 14
3-5-2汽液相平衡量測之步驟 15
3-6實驗結果與討論 15
3-6-1實驗的可靠性 15
3-6-2實驗數據討論 16
3-6-3熱力學一致性測試 16
3-6-4實驗活性係數的算法 18
第四章 理論 43
4-1相平衡理論 43
4-2氣相逸壓係數之狀態方程式 43
4-2-1 Redlich-Kwong狀態方程式 ( RK ) 43
4-2-2 Soave-Redlich-Kwong狀態方程式 ( SRK ) 44
4-2-3 Hayden-O'Connell狀態方程式 (HOC) 44
4-2-4 Peng-Robinson狀態方程式 ( PR ) 45
4-3液相活性係數模式 45
4-2-1 Wilson模式 45
4-2-2 NRTL模式 46
4-2-3 UNIQUAC模式 46
4-4活性係數模式迴歸 47
4-5結果與討論 48
第五章 結論 59
參考文獻 61
附錄 67
作者簡介 71

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