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研究生:黃澤為
研究生(外文):Tse-Wei Huang
論文名稱:結合調控式平行相位展開法應用於白光干涉儀量測表面形貌
論文名稱(外文):Application in white light interferometry measurement surface by combination of parallel phase unwrapping algorithm
指導教授:黃敏睿
指導教授(外文):Min-Jui Huang
學位類別:碩士
校院名稱:國立中興大學
系所名稱:機械工程學系所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
畢業學年度:97
語文別:中文
論文頁數:65
中文關鍵詞:白光干涉術零階干涉條紋鑑定法相移法調控式平行相位展開法
外文關鍵詞:White-light interferenceZero-order interference fringe identificationPhase shifting methodParallel phase unwrapping algorithm
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文主要的目的為使用白光干涉技術,利用Mirau物鏡搭配光學顯微鏡來架設白光干涉儀,使用PZT掃描整張圖後找出干涉條紋的零階干涉位置,利用七步相移演算法求得包裹相位圖,接著使用調控式平行相位演算法重建待測物的三維形貌,最後得到的三維形貌結果再與干涉條紋鑑定法作比較。以上驗證得知,使用七步相移演算法可以得到最佳的三維形貌。
The goal of thesis is to use white light interference technology to rebuild the 3D surface profile of the object. Building up the white light interferometry by combining Mirau object lens and optical microscope, scanning the figure by PZT and finding out the position of Zero-order interference of the interference fringe, the wrapped phase map is obtained from seven-step phase shifting algorithm, then apply the parallel phase unwrapping algorithm to rebuild the 3D surface profiled. Finally, the result of 3D surface profiled can be compared with Zero-order interference fringe identification. In conclusion ,using seven-step phase shifting algorithm can get the best 3D surface profiled.
致謝....................... i
摘要....................... ii
Abstract................... iii
目錄....................... iv
圖目錄..................... vii
表目錄..................... xi
符號說明................... xii
第一章 緒論................ 1
1-1前言.................... 1
1-2文獻回顧................ 2
1-3論文架構................ 5
第二章 白光量測系統原理.... 6
2-1光的干涉原理............ 6
2-2顯微干涉儀類型.......... 7
2-2-1麥克森干涉儀.......... 7
2-2-2 Linnik干涉儀......... 8
2-2-3Mirau干涉儀........... 9
2-3白光干涉原理............ 10
2-4白光七步相移法.......... 14
2-5絕對條紋相位判斷........ 18
2-6零階干涉條紋鑑定法...... 19
第三章 相位展開技術回顧.... 21
3-1路徑相依型相位展開法.... 22
3-2路徑獨立型相位展開法.... 24
3-3調控式平行相位展開法.... 26
第四章 實驗設備與實驗步驟.. 31
4-1實驗儀器與架構.......... 31
4-2實驗量測步驟............ 34
第五章 實驗結果與討論...... 38
5-1光源量測................ 38
5-1-1不同光源對量測結果影響 40
5-1-2使用不同光源量測結果.. 42
5-2使用七步相移演算實驗結果 43
5-3討論不同點的比較........ 52
5-4使用干涉條紋鑑定法結果.. 57
第六章 結論與未來展望...... 60
6-1結論.................... 60
6-2未來展望................ 61
文獻回顧................... 63
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