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研究生:邱士瑋
研究生(外文):Shih-wei Chiou
論文名稱:軟性微結構黏著接觸試驗分析
論文名稱(外文):Experimental analysis of Adhesive Contact of Soft Micro-structures
指導教授:林育芸
指導教授(外文):Yu-yun Lin
學位類別:碩士
校院名稱:國立成功大學
系所名稱:土木工程學系碩博士班
學門:工程學門
學類:土木工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:84
中文關鍵詞:聚二甲基矽氧烷微結構黏著接觸
外文關鍵詞:Polydimethyl Siloxane(PDMS)adhesive contactmicro-structure
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  • 被引用被引用:1
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  • 下載下載:29
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本文將微製造技術應用於聚二甲基矽氧烷(PDMS)表面微圓柱陣列的製作,並以半徑2 mm玻璃半球探頭進行JKR黏著接觸實驗,量測具表面微結構材料所表現出的有效彈性模數 與有效表面黏著能 。微結構模具是利用負型光阻SU-8透過曝光顯影製程製作,再以此模具翻製出聚二甲基矽氧烷(PDMS)表面微圓柱陣列,依微柱的高度、直徑、排列密度、排列方式分類,比較不同的變因對JKR黏著接觸實驗結果所造成的影響,發現微柱的存在會降低聚二甲基矽氧烷(PDMS)的有效彈性模數 ;影響有效表面黏著能 最鉅的因素為與玻璃球相接觸之微柱頂部的形貌。在實驗過程中亦發現減載速率有可能影響黏著接觸實驗的結果。
In this study, micro-columns on the surface of Polydimethyl Siloxane (PDMS) sample were fabricated by lithography, and the effective elastic modulus E and effective work of adhesion W of PDMS sample with micro-columns were measured by the JKR adhesive contact test using a hemispherical glass of radius 2mm. Negative photoresist SU-8 was used to fabricate the mold with micro-structures by UV light exposure and developing process, the micro-columns were then transferred on the surface of PDMS sample using this mold. PDMS samples were classified in terms of height, diameter and surface density of micro-columns, so that the effects of these parameters can be studied. From the experimental results, we found that the existence of micro-columns reduces effective elastic modulus E of the PDMS sample, and the effective work of adhesion W was strongly affected by the shape of micro-column top. Also, in the experiments, we found that different unloading rates may affect the results of the JKR adhesive contact test.
中文摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 VI
表目錄 XI
第一章 緒論 1
1.1研究動機與目的 1
1.2本文內容與組織 2
第二章 文獻回顧與理論介紹 4
2.1 文獻回顧 4
2.2 JKR理論介紹 7
2.3 微影製程技術的發展與應用 10
第三章 微結構製程 12
3.1 微結構製作流程 12
3.2 光罩製作 13
3.3 SU-8母模製作 15
3.4 聚二甲基矽氧烷(PDMS)微結構試體製作 20
第四章 表面微結構模具及試體檢測結果 23
4.1 掃描式電子顯微鏡(Scanning Electron Microscope) 23
4.2 彩色3D雷射共軛焦顯微鏡 25
4.3 SU-8母模表面形貌檢測結果 27
4.4 聚二甲基矽氧烷(PDMS)試體表面形貌檢測結果 34
第五章 表面微結構黏著接觸實驗之配置與量測結果 48
5.1 JKR實驗儀器之設置 48
5.2 實驗步驟說明 52
5.3 實驗結果分析比較 54
5.3.1 微柱高度不同,其餘條件相近 57
5.3.2 微柱直徑不同,其餘條件相近 60
5.3.3 微柱排列密度不同,其餘條件相近 64
5.3.4 載重速率探討 70
第六章 結論 76
參考文獻 79
附錄 82
自述 84
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