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研究生:蘇宏瑋
研究生(外文):Hung-Wei Su
論文名稱:無孔徑近場掃描式光學顯微術之訊噪比評估
論文名稱(外文):Apertureless Near-field Scanning Optical Microscopy: SNR considerations
指導教授:陳顯禎
指導教授(外文):Shean-jen Chen
學位類別:碩士
校院名稱:國立成功大學
系所名稱:工程科學系碩博士班
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:75
中文關鍵詞:奈米結構訊噪比無孔徑近場掃描式光學顯微術
外文關鍵詞:signal to noise rationnanostructureapertureless near-field scanning optical microsc
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近場掃描式光學顯微鏡提供了空間解析度小於繞射極限的光學資訊,而光纖式近場掃描式光學顯微鏡由於光纖易受到其截止效應、熱傷害等現象影響到其解析度,故發展出了無孔徑的近場掃描式光學顯微鏡。
本論文主要研究目的在於以原子力顯微鏡為基礎,建立一套無孔徑近場掃描式光學顯微鏡,藉由自差式干涉與外差式干涉技術的使用擷取光學訊號。而擷取的光學散射信號包含了探針與奈米結構交互作用的近場光學信號以及結構表面散射等作用產生的背景信號,將此信號經過鎖相放大器之解調變以獲得奈米結構的近場光學資訊。藉由資料擷取卡或數位信號處理器嵌入式系統做為控制核心,整合周邊的操控元件,並對此系統目前的穩定度進行校正以及針對量測得到的實驗結果進行訊噪比之評估。
Near-field scanning optical microscopy (NSOM) provides an optical spatial resolution below the diffraction limit. However, the resolution of the conventional aperture NSOM with a metal-coated fiber is confined greater than 50nm due to waveguide cut-off effect and thermal noise. In order to improve the spatial resolution, an apertureless NSOM (aNSOM) has been developed.
In this thesis, an aNSOM based on a commercial AFM is attempted to develop by intergrading a nanopositioning stage and other opto-electronic instruments. The near field optical information is detected by utilizing homodyne and heterodyne modulation detections. The optical signal includes the light scattered by the tip, interacted with sample in near-field, scattered by sample to induce background signal. The far field signal is detected by avalanche photodiode, and then the near-field optical information from the tip interacted with the sample is demodulated by a lock-in amplifier. All the signals and instruments are collected and controlled by using a data acquisition (DAQ) card and an embedded system based on a digital signal processing (DSP) board. Finally, the stability of system is calibrated and the signal-to-noise ratio is evaluated.
摘要 …………………………………………………………………….. I
Abstract ……………………………………………………………… II
致謝 …………………………………………………………………... III
目錄 ………………………………………………………………. IV
圖例目錄 …………………………………………………………….. VII
表格目錄 …………………………………………………………….... X
第一章 緒論 …………………………………………………………. 1
1-1 前言 ……………………………………………………………. 1
1-2 文獻回顧 ………………………………………………………. 2
1-3 研究動機與方法 ………………………………………………. 4
1-4 論文架構 ………………………………………………………. 5
第二章 無孔徑近場掃描式光學顯微鏡 ……………………………. 7
2-1 光學空間解析度 ………….………………………...…………. 7
2-2 原子力顯微鏡 …………………………………………..……. 10
2-3 光纖式近場掃描式光學顯微鏡 …………………………...… 13
2-4 無孔徑近場掃描式光學顯微鏡 …………………………...… 15
2-4-1 自差式干涉 …………………………..….……….………. 16
2-4-2 外差式干涉 …………………………..….……….………. 18

第三章 系統架構 ………………………………..….……….………. 20
3-1 光學系統簡介 ………………………………..….……….…... 20
3-2 主要元件系統 ………………………………..….……….…. 22
3-2-1 原子力顯微鏡與控制箱 ………………………………… 22
3-2-2 鎖相放大器 …………………………………..….………. 26
3-2-3 奈米定位平台系統 ………………………………….…… 28
3-2-4 可調式長工作距離物鏡與CMOS顯像系統 …………… 31
3-3 控制流程與韌體介紹 ………………………………….…..… 31
3-3-1 DSP發展卡 ………………………………….…..……….. 32
3-3-2 DSP發展卡控制流程 ………………………………….… 37
3-3-3 資料擷取卡……………………………………………...… 40
3-3-4 資料擷取卡控制流程 ……………………………………. 46
3-4 硬體電路設計 ………………………………………………... 48
第四章 實驗結果與討論 ……………………………………………. 52
4-1 系統介面 ……………………………………………………... 52
4-2 系統校正與分析 ……………………………………………... 54
4-3 訊噪比之分析 ………………………………………………... 60
4-4 奈米定位平台之高頻寬控制 ………………………………... 64
第五章 結論與外來展望 ……………………………………………. 72
參考文獻 ……………………………………………………………... 73
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