臺灣博碩士論文加值系統

在本論文中，我們闡述表面電漿的發展，並利用電磁波與金屬表面自由電子交互作用之所產生的表面電漿子，進而對表面電漿與發光主動層之共振現象進行相關的研究。我們在奈米矽發光元件表面鍍上不同厚度的銀奈米粒子，然後利用侷域化表面電漿共振來提升奈米矽發光元件的光萃取效率。銀奈米粒子可以利用電子束蒸鍍機蒸鍍後，再透過高溫爐熱退火的處理來形成。銀奈米粒子大小可以經由三個條件來控制，分別是沈積的膜厚、熱退火的溫度以及熱退火的時間。由於侷域化表面電漿共振與銀金屬奈米粒子的幾何形狀有相當密切的關係，因此上述三個條件是非常重要的因素。我們量測與紀錄奈米矽發光元件在不同元件結構下電激發螢光光譜，發現銀奈米粒子層越接近發光層時，則電激發螢光強度就愈強。由此可知，結構設計與銀奈米粒子的幾何形狀對於表面電漿在發光元件中扮演的角色有著決定性的影響，若能掌握相關設計，將能有效提升發光元件之發光效率。

In this thesis, we elucidated the development and basic theory of surface plasmon. In the experiment, we deposited the different thickness of silver nanoparticles on the nano-silicon light emitting devices to enhance light extraction efficiency by using localized surface plasmon resonance (LSPR). Silver nanoparticles arrayed layers were fabricated by e-gun and annealing processes. The size and geometry of particles can be controlled by the three conditions, such as a deposited film thickness, annealing temperature and time. These are important factors to determine the efficiency, because a LSPR depends on both of the size and density of particles. Then we measured the electroluminescence (EL) spectra of nano-silicon light emitting devices with silver nanoparticles. We found that the luminescence efficiency enhancement was more apparent when the silver nanoparticles layer were closer to active layer of nano-silicon light emitting devices. From all the results, we can find out that the surface plasmon effect related with light emitters was depended on the parameters of the added structures. If these structures can be well designed, we will have a chance to improve the luminescence efficiency of nano-silicon light emitting devices.

中文摘要----------------------------------------------- Ⅰ
英文摘要----------------------------------------------- Ⅱ
誌謝--------------------------------------------------- Ⅲ
目錄--------------------------------------------------- Ⅳ
圖表目錄----------------------------------------------- Ⅵ
第一章 緒論--------------------------------------------- 1
1-1 歷史回顧-------------------------------------------- 1
1-2 表面電漿子簡介-------------------------------------- 2
1-3 奈米矽發光元件-------------------------------------- 3
1-4 研究動機-------------------------------------------- 6
1-5 研究方法與論文架構---------------------------------- 8
第二章 表面電漿原理------------------------------------ 12
2-1 色散曲線之推導------------------------------------- 12
2-2 表面電漿激發方式----------------------------------- 19
2-3 侷域化表面電將共振--------------------------------- 22
第三章 表面電漿發光元件之設計、製作與量測-------------- 27
3-1雷射輔助電漿增強式化學氣相沈積---------------------- 27
3-2 元件設計------------------------------------------- 28
3-3 元件製作------------------------------------------- 30
3-3.1元件清潔-------------------------------------- 30
3-3.2 元件製程------------------------------------- 31
3-4 量測原理與實驗裝置--------------------------------- 33
3-4.1電激發光-------------------------------------- 33
3-4.2 掃描式電子顯微鏡------------------------------ 35
第四章 實驗結果與討論---------------------------------- 38
4-1 奈米矽發光元件------------------------------------- 38
4-2 改良式奈米矽發光元件------------------------------- 42
4-3 銀奈米顆粒的特性----------------------------------- 45
4-4 夾層式奈米矽發光元件------------------------------- 47
第五章 結論與展望-------------------------------------- 51

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第二章 表面電漿原理
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第三章 表面電漿發光元件之設計、製作與量測
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