跳到主要內容

臺灣博碩士論文加值系統

(3.231.230.177) 您好!臺灣時間:2021/07/28 18:41
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

我願授權國圖
: 
twitterline
研究生:陳建志
研究生(外文):Chien-chih Chen
論文名稱:運用快速光譜相關法於多光束干涉系統以量測薄膜厚度與折射率
論文名稱(外文):Using Fast Spectral Correlation Method to Measure Thin Film Thickness and Refractive Index in Multiple Beam Interferometry
指導教授:陳元方陳元方引用關係
指導教授(外文):Terry Yuan-Fang Chen
學位類別:碩士
校院名稱:國立成功大學
系所名稱:機械工程學系碩博士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:74
中文關鍵詞:快速光譜相關法薄膜厚度多光束干涉多層膜矩陣法等色階條紋
外文關鍵詞:Fast spectral correlation methodMultilayer matrix methodmultiple beam interferometryThickness of thin filmFringe of equal chromatic order
相關次數:
  • 被引用被引用:0
  • 點閱點閱:112
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
本文主要目的為運用快速光譜相關法建立一計算程式以分析多光束干涉所產生之等色階條紋。對稱式三層公式僅限用於對稱式三層多光束干涉架構,且薄膜厚度量測範圍限制於200nm以下;若使用快速光譜相關法則無上述之限制。
研究中以多層膜矩陣法模擬對稱式三層及非對稱式干涉下之等色階條紋,並利用快速光譜相關法分析可得在此兩種干涉子下其平均誤差百分比皆小於1%;另一方面,亦架設出對稱式三層及非對稱式干涉之實驗架構並根據實驗所得之等色階條紋來討論此兩種實驗之差異性,以拓展表面力分析儀之分析能力。
In this article, the main purpose is to establish a program based on fast spectral correlation method which can analyze the fringe of equal chromatic order (FECO) in multiple beam interferometry. The symmetrical three-layer formula only can be used in symmetrical three-layer multiple beam interferometry and have a limit of measurability of thin film thickness with 200nm. Fast spectral correlation method has no measurement restriction of thin film thickness and can be used in asymmetrical or symmetrical multi-layer interferometry.
In the research, I used fast spectral correlation method to analyze the simulated FECO images of symmetrical three-layer and asymmetrical types which is based on multilayer matrix method, and had an average error percentage less than 1% in analysis. On the other hand, I set up symmetrical three-layer and asymmetrical interferometry and compare the diversity according to the experimental FECO images. Finally, let the results in this article extend the measurement capability of the surface force apparatus.
摘要.......................................................I
Abstract..................................................II
誌謝.....................................................III
目錄......................................................IV
圖目錄....................................................VII
表目錄.....................................................IX
第一章 緒論.................................................1
1-1 研究背景與目的.........................................1
1-2 文獻回顧..............................................3
1-3 本文架構..............................................7
第二章 基本理論..............................................8
2-1 多光束干涉系統.........................................8
2-2 多層膜矩陣法..........................................10
2-3 快速光譜相關法........................................14
2-4 峰值判定.............................................17
第三章 條紋模擬及分析程序.....................................20
3-1 等色階條紋模擬........................................20
3-2 影像處理.............................................24
3-2-1 中值濾波..........................................24
3-2-2 中值濾波遮罩大小之選擇...............................25
3-3 FECO影像水平方向畫素位置對應波長之校正....................27
3-4 快速光譜相關法的分析程序................................28
3-5 模擬條紋之分析結果.....................................32
第四章 實驗裝置與程序........................................36
4-1 實驗系統介紹..........................................36
4-1-1 光源照射系統.......................................37
4-1-2 多光束干涉系統.....................................37
4-1-3 影像擷取系統.......................................39
4-2 實驗程序.............................................40
4-2-1 雲母片製作........................................40
4-2-2 對稱式干涉系統之製作................................43
4-2-3 非對稱式干涉系統之製作...............................44
4-2-4 干涉系統校正.......................................45
第五章 實驗結果與討論........................................46
5-1 對稱式三層干涉實驗之量測結果.............................46
5-2 非對稱式干涉實驗之量測結果..............................49
第六章 結論與建議............................................53
6-1 結論................................................53
6-2 建議................................................54
參考文獻...................................................55
附錄A 多層膜矩陣法其特徵矩陣與光強穿透率之推導....................59
附錄B Mirau干涉儀於薄膜厚度之量測.............................71
1.Tolanlnsky, S., Multiple-Beam Interferometry of Surfaces
and Films, Oxford Univ. Press, London, 1949.
2.Israelachvili, J. N. and Adams, G. E., “Measurement of
forces between two mica surfaces in aqueous potassium
nitrate solutions”, J. Chem. Soc. Faraday Trans I, 74, 975, 1978.
3.Becker, T. and Mugele, F., “Molecular Thin Lubricant
Layers under Confinement”, Molecular Simulation, v 31, n 6-
7, p 489-494, May 15, 2005.
4.Tadmor, R., Chen, N. and Israelachvili, J.N., “Thin film
rheology and lubricity of hyaluronic acid solutions at a
normal physiological concentration”, Journal of Biomedical
Materials Research, v 61, n 4, p 514-523, September 15,
2002.
5.Gauthier-Manuel, B., Gallinet, JP, “Study of behavior of
biological molecules in a thin gap by refractive index and
force measurements with an automatic surface force
apparatus”, Biochimie, 80, pp.391-399, 1998.
6.Tolansky, S., An introduction to interferometry, London:
Longmans, 174, 1960.
7.Heavens, OS., Optical properties of thin films, New York:
Dover, 111, 1965.
8.Malacara, D., Optical shop testing, New York: Wiley, 222,
1992.
9.Tabor, D. and Winterton, R. H. S., “Surface forces: direct
measurement of normal and retarded van der Waals forces”,
Proc. R. SOC. A 312, 435, 1969.
10.Israelachvili, J. N., “Thin Film Studies Using Multiple-
Beam Interferometry”, Colloid Interface Sci., 44, pp.259-
271 , 1973.
11.Clarkson, M. T., “Multiple-Beam Interferometry with Thin
Metal Films Unsymmetrical System”, J. Phys. D: Appl. Phys.,
22, pp. 475-482, 1989.
12.Born, M. and Wolf, E., Principles of Optics:
Electromagnetic Theory of Propagation, Interference and
Diffraction of Light, 6th ed., Pergamon, Oxford, 1980.
13.Levins, J. M., and Vanderlick, T. K., “Impact of
Roughness of Reflective Films on the Application of
Multiple Beam Interferometry”, J. Colloid Interface Sci.,
158, pp.223-227, 1993.
14.Levins, J. M., and Vanderlick, T. K., “Extended Spectral
Analsis of Multiple Beam Interferometry:A technique To
Study Metallic Films in Surface Force Apparatus”, Langmuir,
10, pp.2389-2394, 1994.
15.Horn, R. G., Smith, D. T., and Haller, W., “Surface
Forces and Viscosity of Water Measured Between Silica
Sheets”, Chem. Phys. Lett., 162, pp.404-407, 1989.
16.Horn, R. G., Clarke, D. R., and Clarkson, M. T., “Direct
Measurement of Surface Forces between Sapphire Crystals in
Aqueous Solutions”, J. Mater. Res., 3, pp.413-416, 1988.
17.Heuberger, M., “The extended surface forces apparatus.
Part I. Fast Spectral Correlation Interferometry”, Rev.
Sic. Instruments, Vol.72, No.3, pp.1700-1707, 2000.
18.Tadmor, R., Chen, N. and Israelachvili, J. N., “Thickness
and refractive index measurements using multiple beam
interference fringes(FECO)”, J. Colloid Interface Sci.,
264, pp.548-553, 2003.
19.林堯竣, “應用多光束干涉法決定薄膜之厚度與折射率”, 國立成功大學機械工
程研究所碩士論文, 2005.
20.胡世國, “發展多光束干涉儀於薄膜厚度與折射率之量測”,國立成功大學機械工
程研究所碩士論文, 2006.
21.鍾傑仲, “多光束表面力分析儀之研製” , 國立成功大學機械工程研究所碩士
論文, 2008.
22.Oppenheim, Alan V. and Schafer, Ronald W. ,Discrete Time
Signal Processing, Prentice Hall, 1999.
23.Johnson, P. B., Christy, R. W., “Optical Constant of the
Noble Metals”, Phy. Rev. B, 6, 4370, 1972.
24.User’s Manual for ANU Surface Force Apparatus Mark IV,
Research School of Physical Science and Engineering the
Australian National University, 21, 2004.
25.Gonzalez, R. C., Woods R. E., Digital Image Processing,
ed., Prentice Hall, 123,2001.
26.Willard, Hobert Hurd, Instrumental Methods of Analysis,
ed., Van Nostrand, 1981.
27.許東明、何東英,光譜化學分析,楊智文化事業,1997.
28.邱承美,儀器分析原理,科文出版社,1983.
29.Kohonen, M. M., Meldrum, F. C., “Particles on Melt-Cut
Mica Sheets Are Platinum”, Langmuir, 19, pp.975-976, 2003.
30.Zhiqun, L., Steve, G., “Platinum Nanoparticles at Mica
Surfaces”, Langmuir, 19, pp.7061-7070, 2003.
31.Material Property Data Base, http://www.matweb.com, LDPE
for film grade.
32.L. E. McNeil, M. Grimsditch, “Elastic Moduli of Muscovite
Mica”, IOP Pub. 5, pp.1681-1690, 1992.
連結至畢業學校之論文網頁點我開啟連結
註: 此連結為研究生畢業學校所提供,不一定有電子全文可供下載,若連結有誤,請點選上方之〝勘誤回報〞功能,我們會盡快修正,謝謝!
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top