臺灣博碩士論文加值系統

矽甲烷(Silane)為一高危害性之自燃性氣體，是目前半導體、光電、太陽能電池產業中常用的特殊氣體。矽甲烷為自燃性氣體，但在某特定壓力下外洩時並不會立即自燃，但外洩氣體會與空氣混合成為爆炸性混合氣體，形成一個龐大的爆炸性氣雲，當來源停止或排放壓力降低時，矽甲烷達到自燃條件，此時，矽甲烷自燃之火焰會引燃爆炸性混合氣，造成威力強大的爆炸，這也是自燃性矽甲烷所最容易產生的危險狀況。
本研究針對純矽甲烷進行穩定流速的外洩測試，搭配不同管徑(2.032mm、2.5mm、3.048mm、3.5mm、3.86mm及4.318mm)進行測試，透過流量控制器(Mass Flow Control, MFC)來控制出口流速，並透過暗影法(Shadowgraph)與高速攝影機來捕捉出口端之流場與矽甲烷立即自燃與延遲引燃的引燃狀況。
研究結果發現，對一固定口徑，有一最小的立即自燃臨界流速，當外洩流速超過此一界限時，矽甲烷可持續外洩而不會自燃；此臨界流速會隨不同外洩管徑而改變，當管徑變小時，此臨界流速也跟著變小，但其關係為非線性。由於立即自燃的臨界流速極低，幾乎所有的高壓外洩都會發生延遲引燃，若有立即引燃發生，多因有其他干擾因子的存在，此結果顯示，矽甲烷作業應儲存於開放空間中，並在開放空間中操作，以降低矽甲烷外洩後引起之爆炸危害。

Silane is one of the most widely used silicon source gases used in the semiconductor, TFT-LCD, and photovoltaic industries. Silane is also a well known pyrophoric gas which normally ignites upon in contact with air. The major potential hazard of silane is however not in its pyrophoricity but rather in its unpredictable ignition behavior. Silane release from a pressure source has been known not to lead to prompt ignition upon release and frequently ignition in the form of pop occurred when the release was shut-off. In a confined space change with gas accumulation, the pop can lead to gas explosion and resulted in significant damage.
This research aimed at the ignition behavior of pure silane steady release into air. Different vent sizes including 2.032mm, 2.5mm, 3.048mm, 3.5mm, 3.86mm and 4.318mm were used for the tests. Steady release was achieved through a mass flow controller. Shadowgraph and high speed video camera were used to capture the flow and the characteristics for prompt and delayed ignition.
It is found that a critical velocity for prompt ignition exits for a fixed vent size. Above this velocity, the silane can be released indefinitely with ignition. The critical velocity is also found to be a strong, non-linear function of vent size. For smaller vent size, the critical velocity is also smaller. All the observed critical velocities are far smaller than those from high pressure releases such that almost all high pressure release will have delayed ignition. Prompt ignition is observed owing to other disturbing factors. Thus, it is suggested that the silane storage and operation should be done in open space to minimize the potential hazards from silane release and explosion.

中文摘要 i
英文摘要 ii
誌謝 iii
圖目錄 vi
表目錄 viii
第壹章 前言 1
第貳章 文獻回顧 2
2-1、 矽甲烷之危害特性 2
2-2、 矽甲烷自然機制探討 2
2-3、 研究目的 5
第参章 研究方法與設備 6
3-1、 研究方法 6
3-2、 實驗裝置及設備 7
3-3、 實驗方法 12
3-3-1、 實驗耗材 12
3-3-2、 矽甲烷填充步驟 16
3-3-3、 測試步驟 16
3-3-4、 暫存槽排空步驟 16
第肆章 結果與討論 18
4-1、 出口流速之推估方式 18
4-2、 矽甲烷外洩立即引燃與延遲引燃之探討 20
4-2-1、 立即引燃區間之管口引燃狀況： 20
4-2-2、 延遲引燃區間之管口引燃狀況： 24
4-3、 各管徑之立即自燃與延遲自燃界限測試結果 26
4-4、 層流與紊流之管口流場及引燃狀況探討 29
4-4-1、 層流與紊流之管口流場狀況 29
4-4-2、 紊流之立即引燃狀況探討 30
4-5、 矽甲烷外洩立即引燃之界限探討 32
第伍章 結論與建議 34
參考文獻 36
附錄一、外洩口徑4.318mm測試記錄表 38
附錄二、外洩口徑3.86mm測試記錄表 42
附錄三、外洩口徑3.5mm測試記錄表 45
附錄四、外洩口徑3.048mm測試記錄表 47
附錄五、外洩口徑2.5mm測試記錄表 49
附錄六、外洩口徑2.032mm測試記錄表 51

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