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Taiwan continuously develops the enlargement of the Hi-Tech factory building, such as new developing Solar energy industry, Flat Panel Display industry(FPD) & Semi-conductor IC industry etc. In order to save the cost and be competitive, factory buildings are large-sized oriented. We can imagine FPD & solar energy industries their equipment and unit become multiple enlarged relatively comparing to semi-conductor IC industry. Therefore, more chemicals are used in cleanroom, like pro-Process including Thin-film , Photolithograph, Etching , Stripping process, after-Process including Seal line , Assemble line and Testing line etc. Large amount of Silane(SiH4),Hydrogen(H2), Natural Gas (CH4) , Acetone , Isopropyl alcohol (IPA), which are dangerous, flammable or explosive chemicals, are used. The standard of CNS 3376-10 which provides domestice industries a explosion-proof compartment guide. This guide mostly plans on outdoor environment and chemical plant, but doesn’t plan explosion-proof compartments on equipments and define the standard for High-Tech fab. The study defined the explosion-proof compartment where using flammable vapor unit of the Hi-tech. The purpose of this article is to address how to assess the explosion-proof equipment settings and integrate the principles regarding the selection of explosion-proof equipments. Meanwhile, it shows accuracy and the fastest way to select safe and appropriate electrical explosion-proof facility while establishing machinery for ventilation to exhaust. Reasonable electrical explosion-proof apparatus cost can be proposed.
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