本研究應用微機電中之電鑄技術，成功開發出將布拉格光纎光柵感測器埋入鐵-鎳金屬薄膜之製程，並利用金屬薄膜的熱膨脹係數搭配與振動特性，分別分析其輸出訊號對應於溫度循環及振動參數之關係。本研究首先探討金屬埋入式光纖光柵感測器於溫度量測過程的敏感度與穩定性，然後分析金屬薄膜承受不同撓度狀態時，光纖光柵感測器應變梯度、中心波長飄移及半峰全幅值之變化情形，以獲得金屬薄膜變形之訊號變化特性。接著予以金屬薄膜強制振動，觀察其光纖感測器輸出之中心波長變化，以判別其振動振幅，再經由快速傅立葉轉換，即可獲得其振動頻率。最後，量測實際振動源，藉以印證金屬埋入式光纖光柵感測器之應用特性。

In this thesis, a new electroforming technology has been proposed for embedding a Fiber Bragg Grating (FBG) sensor into Fe-Ni metal film. The reflected signals of FBG sensor relating to temperature and vibration are investigated on the basis of the matched thermal expansion coefficient and vibration characteristics of the metal film. Firstly, the sensitivity and stability of temperature measurement are obtained through a specified temperature cycle. Secondly, a deflection test of the metal film is performed. The relationships among the strain gradient of the metal film, the shift in Bragg wavelength and full width at half maximum (FWHM) of the reflected spectra are then investigated. Thirdly, the amplitude and frequency of vibration of the metal film can be extracted via the reflected spectra analysis and fast fourier transformation (FFT) as the metal film is subject to a forced vibration. Finally, the performance of the metal film embedded FBG sensor for vibration measurement is verified from a real experiment. The case study show that it agrees well with the analysis results

摘 要 I
Abstract II
誌謝 III
目錄 IV
表目錄 VII
圖目錄 VIII
第1章 緒論 1
1.1 研究背景 1
1.2 研究動機 2
1.3 文獻回顧 3
1.4 研究目的 6
1.5 論文架構 6
第2章 光纖原理與光纖光柵感測器理論 9
2.1 光纖光學原理 9
2.1.1 光纖種類 9
2.1.2 光纖中的損失 11
2.2 光纖光柵原理 12
2.2.1 光纖光柵種類與製造方法 14
2.2.2 光彈原理與熱光原理 15
2.2.3光纖光柵耦合原理 (Coupled Theory) 18
第3章 研究方法 29
3.1 等間距布拉格光纖光柵感測器 29
3.2光纖前處理 30
3.3濺鍍導體化製程 30
3.3.1 濺鍍原理 30
3.3.2 濺鍍製程步驟 31
3.4 無電鍍鎳導體化製程 31
3.4.1 無電鍍原理 31
3.4.2 無電鍍特性 32
3.4.3 無電鍍鎳反應原理 32
3.4.4 無電鍍鎳鍍液之組成 32
3.4.5 無電鍍鎳製程步驟 33
3.5 電鍍製程 34
3.5.1 電鑄技術基本原理 34
3.5.2 電鑄槽架設 34
3.5.3 光纖光柵埋入金屬薄膜製程 35
3.6 濺鍍與無電鍍鎳比較 35
3.7 實驗規劃與量測系統 36
3.7.1 量測系統 36
3.7.2 有限元素分析 37
第4章 應用金屬埋入光纖光柵感測器於溫度之量測 44
4.1 溫度特性原理 44
4.2 設備與實驗 47
4.3 溫度靈敏係數實驗 49
4.4 溫度循環實驗 50
第5章 應用金屬埋入式光纖光柵感測器於振動之量測 57
5.1 懸臂樑結構變形與振動分析 58
5.2 實驗設備 64
5.3 金屬薄膜自由端下壓量測 64
5.4 振動量測 66
5.5 振動感知器應用實例 69
第6章 結論 85
參考文獻 86
作者簡介 90

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