臺灣博碩士論文加值系統

光學膜片，是在透明的薄膜上，有著集合微小型透鏡成一陣列樣式，並且能應用在不同的領域或產品的一種元件。在平面顯示器中，光學膜片是一個重要的零件，能用於改善顯示器的發光效率和品質。在此篇論文，有一稱為「擴散膜片」的產品被成功開發、製造，兩種不同的微透鏡陣列製作在一片薄膜的兩面為此產品的特色。此光學膜片具有提升光源的亮度和均勻度的功能。同時，在此文章中，有數種不同的微透鏡陣列被發表，包含了無縫和有縫的六角型微透鏡陣列、無縫雙曲率微透鏡陣列以及擁有兩種微透鏡陣列的擴散膜片。製作這些微結構的製程，被稱為多角型微透鏡陣列製程。此製程具有大量生產、多角型外型和100％的填充率(Fill-factor)的特點。其基本程序保含了黃光微影、熱回流、濺鍍、電鑄和複製等製程。在複製的製程中，一種高分子材料的軟模具和鎳鈷合金材料的金屬模具被使用於複製微透鏡陣列。在本論文中，有多種複製的製程被採用，且持續地進行改良，以求得最適合的製作方式。
使用光學膜片的主要目的，是增進發光源的亮度和均勻度。吾人發現不同形狀和尺寸的微透鏡陣列，能表現出不同的光分佈。為了尋求較適合且創新的結構排列，利用了搭配模擬的「田口法」以設計複合式光學膜片上的微透鏡結構。最後，量測此光學膜片的光學效果，並驗證其實驗結果和設計理論的差異。根據其結果，光強度的平均值和訊雜比（S/N ratio）的比較均進行了討論，顯示兩者的表現趨勢是相同的。

Integrated microlens array on a transparent film, called an optical film, provides interesting applications for various fields. In a FPD (Flat Panel Display), the optical films are the more important components to improve the efficiency and quality. In this dissertation, a diffuser film which consisted of two different microlens arrays on the two surfaces of a film was developed and used to enhance the brightness and uniformity of a light source. There were also several microlens arrays developed, such as a hexagonal microlens array with gap and gapless, a gapless dual-curvature microlens array and a diffuser film.
A process called polygonal microlens array process had been used to manufacture them. It had advantages of mass production, various polygonal shapes and 100% fill-factor. A softer mold of PDMS and a metal mold of NiCo alloy were utilized to replicate the MLAs. In this dissertation, several replication processes were applied to mass product and to find out which one is more suitable for the diffuser film.
In this dissertation, the results of different shapes and dimensions of microlens arrays showed various light distribution. Therefore, for searching a more suitable and novel layout of a diffuser, Taguchi Method with simulation was used to design the layout of a diffuser film before fabrication process. Finally, a diffuser film was measured and demonstrated its optical effects. According to the results of measurement and simulation, the average intensity and the S/N ratios were shown. The trend of simulation and measurement was also similar.

LIST OF TABLE VI
LIST OF FIGURE VII
A Symbol Index XIV
摘要 XV
Abstract XVI

Chapter 1 Introduction 1
1.1 Background 1
1.2 Research of relative literature 10
1.3 Purpose and skeleton of this dissertation 19

Chapter 2 The theory of design for polygonal microlens array and a diffuser film 22
2.1 Introduction 22
2.2 The theory of a microlens 23
2.2.1 Law of refraction 23
2.2.2 Refractive elements 25
2.2.3 The design of a microlens 29
A general case of a spherical interface 30
General formulas of a plano-convex microlense 33
A predictable formula of thickness of photoresist 35
2.3 The design of a hexagonal and a dual-curvature microlens arrays 38
2.3.1 A mask for the gapless hexagonal microlens array 39
2.3.2 The controlling method of different dimensions for a hexagonal microlens array 40
2.3.3 Principles of design of a gapless dual-curvature microlens array 43
2.3.4 The calculation for optical effects 44
2.4 Design of a diffuser film by Taguchi Method 45
2.4.1 Introduction of Taguchi Method 45
2.4.2 The S/N ratio for analysis 46
2.4.3 Analysis method 48
2.4.4 The factors and Level of dimensions in a diffuser film 48
2.5 The studying procedure of a diffuser film with Taguchi Method 55

Chapter 3 A molding process of electroplating and hot embossing 59
3.1 Introduction 59
3.2 The molding idea for an optical disk with high storage capacity 61
3.3 Process procedures 62
3.3.1 Experimental setup 62
3.3.2 Electron beam lithography 64
3.3.3 High-hardness electroplating process 64
3.3.4 Replication process 66
3.4 Experimental results of the electron beam mastering process and the molding process 67
3.5 Conclusions of the experiment 72

Chapter 4 The polygonal microlens arrays 74
4.1 Introduction 74
4.2 The polygonal MLA process 75
4.2.1 Lithography process 76
4.2.2 Reflow process 77
4.2.3 NiCo alloy electroplating process 78
4.2.4 Passivation treatment 80
4.2.5 Second electroplating process 81
4.2.6 A replication process for the microlens array 82
4.3 The results of a gapless hexagonal microlens array 85
4.4 Hexagonal microlens arrays with different dimensions and fill-factor 89
4.4.1 Measurement of seven microlens arrays 90
4.4.2 The test results of the seven arrays 94
4.5 A gapless dual-curvature microlens array 102
4.5.1 Calculations of three MLAs 102
4.5.2 A new material of the stamp in the fabrication processes 107
4.5.3 Results of the fabrication processes and the optical tests 113
4.6 Conclusions of polygonal microlens arrays 118

Chapter 5 The deign and fabrication of a diffuser film 120
5.1 Introduction 120
5.2 Results of Taguchi Method 122
5.2.1 The optimal condition of a diffuser film 122
5.2.2 The masks in the experiments 126
5.3 Results of a diffuser film 129
5.3.1 Fabrication of a diffuser film 129
5.3.2 The results of the fabrication processes 131
5.3.3 The results of the optical measurement 145
5.4 Conclusion of this chapter 148

Chapter 6. Conclusions and further study. 151
6.1 The development of a polygonal microlens array 152
6.1.1 A Molding Process of Electroplating and Hot Embossing 152
6.1.2 The polygonal microlens array 153
6.1.3 The deign and fabrication of a diffuser film 154
6.2 The optical films and their optical effects 155
6.3 Contribution of this study 156
6.4 Further study of a gapless microlens array 157
Reference 159

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